4/6/2012	10:05:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	10:05:34 AM	Recipe started at 10:05 AM
4/6/2012	10:05:34 AM	Helium valve closed
4/6/2012	10:05:34 AM	H2 valve closed
4/6/2012	10:05:34 AM	BCl3 valve closed
4/6/2012	10:05:34 AM	PH3 valve closed
4/6/2012	10:05:34 AM	SiCl4 pre valve closed
4/6/2012	10:05:34 AM	SiCl4 post valve closed
4/6/2012	10:05:34 AM	Main Vac valve closed
4/6/2012	10:05:34 AM	Bypass valve closed
4/6/2012	10:05:34 AM	Bubbler valve closed
4/6/2012	10:05:34 AM	Helium MFC set to  0.000000
4/6/2012	10:05:34 AM	H2 MFC set to  0.000000
4/6/2012	10:05:34 AM	BCl3 MFC set to  0.000000
4/6/2012	10:05:34 AM	PH3 MFC set to  0.000000
4/6/2012	10:05:34 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:05:34 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:05:34 AM	Tube furnace set to 0
4/6/2012	10:05:37 AM	H2 valve closed
4/6/2012	10:05:37 AM	BCl3 valve closed
4/6/2012	10:05:37 AM	PH3 valve closed
4/6/2012	10:05:37 AM	SiCl4 pre valve closed
4/6/2012	10:05:37 AM	SiCl4 post valve closed
4/6/2012	10:05:37 AM	Main Vac valve closed
4/6/2012	10:05:37 AM	Bypass valve closed
4/6/2012	10:05:37 AM	Bubbler valve closed
4/6/2012	10:05:37 AM	Helium valve opened
4/6/2012	10:05:37 AM	Helium MFC set to  500.000000
4/6/2012	10:05:37 AM	H2 MFC set to  0.000000
4/6/2012	10:05:37 AM	BCl3 MFC set to  0.000000
4/6/2012	10:05:37 AM	PH3 MFC set to  0.000000
4/6/2012	10:05:37 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:05:37 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:05:38 AM	Tube furnace set to 0
4/6/2012	10:06:43 AM	Helium valve closed
4/6/2012	10:06:43 AM	H2 valve closed
4/6/2012	10:06:43 AM	BCl3 valve closed
4/6/2012	10:06:43 AM	PH3 valve closed
4/6/2012	10:06:43 AM	SiCl4 pre valve closed
4/6/2012	10:06:43 AM	SiCl4 post valve closed
4/6/2012	10:06:43 AM	Main Vac valve closed
4/6/2012	10:06:43 AM	Bypass valve closed
4/6/2012	10:06:43 AM	Bubbler valve closed
4/6/2012	10:06:43 AM	Helium MFC set to  0.000000
4/6/2012	10:06:43 AM	H2 MFC set to  0.000000
4/6/2012	10:06:43 AM	BCl3 MFC set to  0.000000
4/6/2012	10:06:43 AM	PH3 MFC set to  0.000000
4/6/2012	10:06:43 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:06:43 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:06:43 AM	Tube furnace set to 0
4/6/2012	10:06:44 AM	Run finished at 10:06 AM
4/6/2012	10:06:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	10:08:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	10:08:51 AM	Recipe started at 10:08 AM
4/6/2012	10:08:51 AM	Helium valve closed
4/6/2012	10:08:51 AM	H2 valve closed
4/6/2012	10:08:51 AM	BCl3 valve closed
4/6/2012	10:08:51 AM	PH3 valve closed
4/6/2012	10:08:51 AM	SiCl4 pre valve closed
4/6/2012	10:08:51 AM	SiCl4 post valve closed
4/6/2012	10:08:51 AM	Main Vac valve closed
4/6/2012	10:08:51 AM	Bubbler valve closed
4/6/2012	10:08:51 AM	Bypass valve opened
4/6/2012	10:08:51 AM	Helium MFC set to  0.000000
4/6/2012	10:08:51 AM	H2 MFC set to  0.000000
4/6/2012	10:08:51 AM	BCl3 MFC set to  0.000000
4/6/2012	10:08:51 AM	PH3 MFC set to  0.000000
4/6/2012	10:08:51 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:08:51 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:08:51 AM	Tube furnace set to 0
4/6/2012	10:09:52 AM	Helium valve closed
4/6/2012	10:09:52 AM	H2 valve closed
4/6/2012	10:09:52 AM	BCl3 valve closed
4/6/2012	10:09:52 AM	PH3 valve closed
4/6/2012	10:09:52 AM	SiCl4 pre valve closed
4/6/2012	10:09:52 AM	SiCl4 post valve closed
4/6/2012	10:09:52 AM	Main Vac valve closed
4/6/2012	10:09:52 AM	Bubbler valve closed
4/6/2012	10:09:52 AM	Bypass valve opened
4/6/2012	10:09:52 AM	Helium MFC set to  0.000000
4/6/2012	10:09:52 AM	H2 MFC set to  0.000000
4/6/2012	10:09:52 AM	BCl3 MFC set to  0.000000
4/6/2012	10:09:52 AM	PH3 MFC set to  0.000000
4/6/2012	10:09:52 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:09:52 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:09:52 AM	Tube furnace set to 0
4/6/2012	10:10:52 AM	Helium valve closed
4/6/2012	10:10:52 AM	H2 valve closed
4/6/2012	10:10:52 AM	BCl3 valve closed
4/6/2012	10:10:52 AM	PH3 valve closed
4/6/2012	10:10:52 AM	SiCl4 pre valve closed
4/6/2012	10:10:52 AM	SiCl4 post valve closed
4/6/2012	10:10:52 AM	Bypass valve closed
4/6/2012	10:10:52 AM	Bubbler valve closed
4/6/2012	10:10:52 AM	Main Vac valve opened
4/6/2012	10:10:52 AM	Helium MFC set to  0.000000
4/6/2012	10:10:52 AM	H2 MFC set to  0.000000
4/6/2012	10:10:52 AM	BCl3 MFC set to  0.000000
4/6/2012	10:10:52 AM	PH3 MFC set to  0.000000
4/6/2012	10:10:52 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:10:52 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:10:52 AM	Tube furnace set to 0
4/6/2012	10:10:53 AM	Run finished at 10:10 AM
4/6/2012	10:10:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	10:38:35 AM	Recipe started at 10:38 AM
4/6/2012	10:38:35 AM	Helium valve closed
4/6/2012	10:38:35 AM	H2 valve closed
4/6/2012	10:38:35 AM	BCl3 valve closed
4/6/2012	10:38:35 AM	PH3 valve closed
4/6/2012	10:38:35 AM	SiCl4 pre valve closed
4/6/2012	10:38:35 AM	SiCl4 post valve closed
4/6/2012	10:38:35 AM	Bypass valve closed
4/6/2012	10:38:35 AM	Bubbler valve closed
4/6/2012	10:38:35 AM	Main Vac valve opened
4/6/2012	10:38:35 AM	Helium MFC set to  0.000000
4/6/2012	10:38:35 AM	H2 MFC set to  0.000000
4/6/2012	10:38:35 AM	BCl3 MFC set to  0.000000
4/6/2012	10:38:35 AM	PH3 MFC set to  0.000000
4/6/2012	10:38:35 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:38:35 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:38:35 AM	Tube furnace set to 0
4/6/2012	10:39:05 AM	H2 valve closed
4/6/2012	10:39:05 AM	BCl3 valve closed
4/6/2012	10:39:05 AM	PH3 valve closed
4/6/2012	10:39:05 AM	SiCl4 pre valve closed
4/6/2012	10:39:05 AM	SiCl4 post valve closed
4/6/2012	10:39:05 AM	Bypass valve closed
4/6/2012	10:39:05 AM	Bubbler valve closed
4/6/2012	10:39:05 AM	Helium valve opened
4/6/2012	10:39:05 AM	Main Vac valve opened
4/6/2012	10:39:05 AM	Helium MFC set to  20.000000
4/6/2012	10:39:05 AM	H2 MFC set to  0.000000
4/6/2012	10:39:05 AM	BCl3 MFC set to  0.000000
4/6/2012	10:39:05 AM	PH3 MFC set to  0.000000
4/6/2012	10:39:05 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:39:05 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:39:05 AM	Tube furnace set to 0
4/6/2012	10:39:35 AM	Helium valve closed
4/6/2012	10:39:35 AM	H2 valve closed
4/6/2012	10:39:35 AM	BCl3 valve closed
4/6/2012	10:39:35 AM	PH3 valve closed
4/6/2012	10:39:35 AM	SiCl4 pre valve closed
4/6/2012	10:39:35 AM	SiCl4 post valve closed
4/6/2012	10:39:35 AM	Bypass valve closed
4/6/2012	10:39:35 AM	Bubbler valve closed
4/6/2012	10:39:35 AM	Main Vac valve opened
4/6/2012	10:39:35 AM	Helium MFC set to  0.000000
4/6/2012	10:39:35 AM	H2 MFC set to  0.000000
4/6/2012	10:39:35 AM	BCl3 MFC set to  0.000000
4/6/2012	10:39:35 AM	PH3 MFC set to  0.000000
4/6/2012	10:39:35 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:39:35 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:39:36 AM	Tube furnace set to 0
4/6/2012	10:40:06 AM	H2 valve closed
4/6/2012	10:40:06 AM	BCl3 valve closed
4/6/2012	10:40:06 AM	PH3 valve closed
4/6/2012	10:40:06 AM	SiCl4 pre valve closed
4/6/2012	10:40:06 AM	SiCl4 post valve closed
4/6/2012	10:40:06 AM	Bypass valve closed
4/6/2012	10:40:06 AM	Bubbler valve closed
4/6/2012	10:40:06 AM	Helium valve opened
4/6/2012	10:40:06 AM	Main Vac valve opened
4/6/2012	10:40:06 AM	Helium MFC set to  20.000000
4/6/2012	10:40:06 AM	H2 MFC set to  0.000000
4/6/2012	10:40:06 AM	BCl3 MFC set to  0.000000
4/6/2012	10:40:06 AM	PH3 MFC set to  0.000000
4/6/2012	10:40:06 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:40:06 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:40:06 AM	Tube furnace set to 0
4/6/2012	10:40:36 AM	Helium valve closed
4/6/2012	10:40:36 AM	H2 valve closed
4/6/2012	10:40:36 AM	BCl3 valve closed
4/6/2012	10:40:36 AM	PH3 valve closed
4/6/2012	10:40:36 AM	SiCl4 pre valve closed
4/6/2012	10:40:36 AM	SiCl4 post valve closed
4/6/2012	10:40:36 AM	Bypass valve closed
4/6/2012	10:40:36 AM	Bubbler valve closed
4/6/2012	10:40:36 AM	Main Vac valve opened
4/6/2012	10:40:36 AM	Helium MFC set to  0.000000
4/6/2012	10:40:36 AM	H2 MFC set to  0.000000
4/6/2012	10:40:36 AM	BCl3 MFC set to  0.000000
4/6/2012	10:40:36 AM	PH3 MFC set to  0.000000
4/6/2012	10:40:36 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:40:36 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:40:36 AM	Tube furnace set to 0
4/6/2012	10:41:06 AM	H2 valve closed
4/6/2012	10:41:06 AM	BCl3 valve closed
4/6/2012	10:41:06 AM	PH3 valve closed
4/6/2012	10:41:06 AM	SiCl4 pre valve closed
4/6/2012	10:41:06 AM	SiCl4 post valve closed
4/6/2012	10:41:06 AM	Bypass valve closed
4/6/2012	10:41:06 AM	Bubbler valve closed
4/6/2012	10:41:06 AM	Helium valve opened
4/6/2012	10:41:06 AM	Main Vac valve opened
4/6/2012	10:41:06 AM	Helium MFC set to  20.000000
4/6/2012	10:41:06 AM	H2 MFC set to  0.000000
4/6/2012	10:41:06 AM	BCl3 MFC set to  0.000000
4/6/2012	10:41:06 AM	PH3 MFC set to  0.000000
4/6/2012	10:41:06 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:41:06 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:41:06 AM	Tube furnace set to 0
4/6/2012	10:41:36 AM	Helium valve closed
4/6/2012	10:41:36 AM	H2 valve closed
4/6/2012	10:41:36 AM	BCl3 valve closed
4/6/2012	10:41:36 AM	PH3 valve closed
4/6/2012	10:41:36 AM	SiCl4 pre valve closed
4/6/2012	10:41:36 AM	SiCl4 post valve closed
4/6/2012	10:41:36 AM	Bypass valve closed
4/6/2012	10:41:36 AM	Bubbler valve closed
4/6/2012	10:41:36 AM	Main Vac valve opened
4/6/2012	10:41:36 AM	Helium MFC set to  0.000000
4/6/2012	10:41:36 AM	H2 MFC set to  0.000000
4/6/2012	10:41:36 AM	BCl3 MFC set to  0.000000
4/6/2012	10:41:36 AM	PH3 MFC set to  0.000000
4/6/2012	10:41:36 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:41:36 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:41:37 AM	Tube furnace set to 0
4/6/2012	10:42:07 AM	H2 valve closed
4/6/2012	10:42:07 AM	BCl3 valve closed
4/6/2012	10:42:07 AM	PH3 valve closed
4/6/2012	10:42:07 AM	SiCl4 pre valve closed
4/6/2012	10:42:07 AM	SiCl4 post valve closed
4/6/2012	10:42:07 AM	Bypass valve closed
4/6/2012	10:42:07 AM	Bubbler valve closed
4/6/2012	10:42:07 AM	Helium valve opened
4/6/2012	10:42:07 AM	Main Vac valve opened
4/6/2012	10:42:07 AM	Helium MFC set to  20.000000
4/6/2012	10:42:07 AM	H2 MFC set to  0.000000
4/6/2012	10:42:07 AM	BCl3 MFC set to  0.000000
4/6/2012	10:42:07 AM	PH3 MFC set to  0.000000
4/6/2012	10:42:07 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:42:07 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:42:07 AM	Tube furnace set to 0
4/6/2012	10:42:37 AM	Helium valve closed
4/6/2012	10:42:37 AM	H2 valve closed
4/6/2012	10:42:37 AM	BCl3 valve closed
4/6/2012	10:42:37 AM	PH3 valve closed
4/6/2012	10:42:37 AM	SiCl4 pre valve closed
4/6/2012	10:42:37 AM	SiCl4 post valve closed
4/6/2012	10:42:37 AM	Bypass valve closed
4/6/2012	10:42:37 AM	Bubbler valve closed
4/6/2012	10:42:37 AM	Main Vac valve opened
4/6/2012	10:42:37 AM	Helium MFC set to  0.000000
4/6/2012	10:42:37 AM	H2 MFC set to  0.000000
4/6/2012	10:42:37 AM	BCl3 MFC set to  0.000000
4/6/2012	10:42:37 AM	PH3 MFC set to  0.000000
4/6/2012	10:42:37 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:42:37 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:42:37 AM	Tube furnace set to 0
4/6/2012	10:43:07 AM	H2 valve closed
4/6/2012	10:43:07 AM	BCl3 valve closed
4/6/2012	10:43:07 AM	PH3 valve closed
4/6/2012	10:43:07 AM	SiCl4 pre valve closed
4/6/2012	10:43:07 AM	SiCl4 post valve closed
4/6/2012	10:43:07 AM	Bypass valve closed
4/6/2012	10:43:07 AM	Bubbler valve closed
4/6/2012	10:43:07 AM	Helium valve opened
4/6/2012	10:43:07 AM	Main Vac valve opened
4/6/2012	10:43:07 AM	Helium MFC set to  20.000000
4/6/2012	10:43:07 AM	H2 MFC set to  0.000000
4/6/2012	10:43:07 AM	BCl3 MFC set to  0.000000
4/6/2012	10:43:07 AM	PH3 MFC set to  0.000000
4/6/2012	10:43:07 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:43:07 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:43:07 AM	Tube furnace set to 0
4/6/2012	10:43:37 AM	Helium valve closed
4/6/2012	10:43:37 AM	H2 valve closed
4/6/2012	10:43:37 AM	BCl3 valve closed
4/6/2012	10:43:37 AM	PH3 valve closed
4/6/2012	10:43:37 AM	SiCl4 pre valve closed
4/6/2012	10:43:37 AM	SiCl4 post valve closed
4/6/2012	10:43:37 AM	Bypass valve closed
4/6/2012	10:43:37 AM	Bubbler valve closed
4/6/2012	10:43:37 AM	Main Vac valve opened
4/6/2012	10:43:37 AM	Helium MFC set to  0.000000
4/6/2012	10:43:37 AM	H2 MFC set to  0.000000
4/6/2012	10:43:37 AM	BCl3 MFC set to  0.000000
4/6/2012	10:43:37 AM	PH3 MFC set to  0.000000
4/6/2012	10:43:37 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:43:37 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:43:38 AM	Tube furnace set to 0
4/6/2012	10:44:08 AM	H2 valve closed
4/6/2012	10:44:08 AM	BCl3 valve closed
4/6/2012	10:44:08 AM	PH3 valve closed
4/6/2012	10:44:08 AM	SiCl4 pre valve closed
4/6/2012	10:44:08 AM	SiCl4 post valve closed
4/6/2012	10:44:08 AM	Bypass valve closed
4/6/2012	10:44:08 AM	Bubbler valve closed
4/6/2012	10:44:08 AM	Helium valve opened
4/6/2012	10:44:08 AM	Main Vac valve opened
4/6/2012	10:44:08 AM	Helium MFC set to  20.000000
4/6/2012	10:44:08 AM	H2 MFC set to  0.000000
4/6/2012	10:44:08 AM	BCl3 MFC set to  0.000000
4/6/2012	10:44:08 AM	PH3 MFC set to  0.000000
4/6/2012	10:44:08 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:44:08 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:44:08 AM	Tube furnace set to 0
4/6/2012	10:44:38 AM	Helium valve closed
4/6/2012	10:44:38 AM	H2 valve closed
4/6/2012	10:44:38 AM	BCl3 valve closed
4/6/2012	10:44:38 AM	PH3 valve closed
4/6/2012	10:44:38 AM	SiCl4 pre valve closed
4/6/2012	10:44:38 AM	SiCl4 post valve closed
4/6/2012	10:44:38 AM	Bypass valve closed
4/6/2012	10:44:38 AM	Bubbler valve closed
4/6/2012	10:44:38 AM	Main Vac valve opened
4/6/2012	10:44:38 AM	Helium MFC set to  0.000000
4/6/2012	10:44:38 AM	H2 MFC set to  0.000000
4/6/2012	10:44:38 AM	BCl3 MFC set to  0.000000
4/6/2012	10:44:38 AM	PH3 MFC set to  0.000000
4/6/2012	10:44:38 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:44:38 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:44:38 AM	Tube furnace set to 0
4/6/2012	10:45:08 AM	H2 valve closed
4/6/2012	10:45:08 AM	BCl3 valve closed
4/6/2012	10:45:08 AM	PH3 valve closed
4/6/2012	10:45:08 AM	SiCl4 pre valve closed
4/6/2012	10:45:08 AM	SiCl4 post valve closed
4/6/2012	10:45:08 AM	Bypass valve closed
4/6/2012	10:45:08 AM	Bubbler valve closed
4/6/2012	10:45:08 AM	Helium valve opened
4/6/2012	10:45:08 AM	Main Vac valve opened
4/6/2012	10:45:08 AM	Helium MFC set to  20.000000
4/6/2012	10:45:08 AM	H2 MFC set to  0.000000
4/6/2012	10:45:08 AM	BCl3 MFC set to  0.000000
4/6/2012	10:45:08 AM	PH3 MFC set to  0.000000
4/6/2012	10:45:08 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:45:08 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:45:08 AM	Tube furnace set to 0
4/6/2012	10:45:38 AM	Helium valve closed
4/6/2012	10:45:38 AM	H2 valve closed
4/6/2012	10:45:38 AM	BCl3 valve closed
4/6/2012	10:45:38 AM	PH3 valve closed
4/6/2012	10:45:38 AM	SiCl4 pre valve closed
4/6/2012	10:45:38 AM	SiCl4 post valve closed
4/6/2012	10:45:38 AM	Bypass valve closed
4/6/2012	10:45:38 AM	Bubbler valve closed
4/6/2012	10:45:38 AM	Main Vac valve opened
4/6/2012	10:45:38 AM	Helium MFC set to  0.000000
4/6/2012	10:45:38 AM	H2 MFC set to  0.000000
4/6/2012	10:45:38 AM	BCl3 MFC set to  0.000000
4/6/2012	10:45:38 AM	PH3 MFC set to  0.000000
4/6/2012	10:45:38 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:45:38 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:45:38 AM	Tube furnace set to 0
4/6/2012	10:46:08 AM	H2 valve closed
4/6/2012	10:46:08 AM	BCl3 valve closed
4/6/2012	10:46:08 AM	PH3 valve closed
4/6/2012	10:46:09 AM	SiCl4 pre valve closed
4/6/2012	10:46:09 AM	SiCl4 post valve closed
4/6/2012	10:46:09 AM	Bypass valve closed
4/6/2012	10:46:09 AM	Bubbler valve closed
4/6/2012	10:46:09 AM	Helium valve opened
4/6/2012	10:46:09 AM	Main Vac valve opened
4/6/2012	10:46:09 AM	Helium MFC set to  20.000000
4/6/2012	10:46:09 AM	H2 MFC set to  0.000000
4/6/2012	10:46:09 AM	BCl3 MFC set to  0.000000
4/6/2012	10:46:09 AM	PH3 MFC set to  0.000000
4/6/2012	10:46:09 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:46:09 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:46:09 AM	Tube furnace set to 0
4/6/2012	10:46:39 AM	Helium valve closed
4/6/2012	10:46:39 AM	H2 valve closed
4/6/2012	10:46:39 AM	BCl3 valve closed
4/6/2012	10:46:39 AM	PH3 valve closed
4/6/2012	10:46:39 AM	SiCl4 pre valve closed
4/6/2012	10:46:39 AM	SiCl4 post valve closed
4/6/2012	10:46:39 AM	Bypass valve closed
4/6/2012	10:46:39 AM	Bubbler valve closed
4/6/2012	10:46:39 AM	Main Vac valve opened
4/6/2012	10:46:39 AM	Helium MFC set to  0.000000
4/6/2012	10:46:39 AM	H2 MFC set to  0.000000
4/6/2012	10:46:39 AM	BCl3 MFC set to  0.000000
4/6/2012	10:46:39 AM	PH3 MFC set to  0.000000
4/6/2012	10:46:39 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:46:39 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:46:39 AM	Tube furnace set to 0
4/6/2012	10:47:09 AM	H2 valve closed
4/6/2012	10:47:09 AM	BCl3 valve closed
4/6/2012	10:47:09 AM	PH3 valve closed
4/6/2012	10:47:09 AM	SiCl4 pre valve closed
4/6/2012	10:47:09 AM	SiCl4 post valve closed
4/6/2012	10:47:09 AM	Bypass valve closed
4/6/2012	10:47:09 AM	Bubbler valve closed
4/6/2012	10:47:09 AM	Helium valve opened
4/6/2012	10:47:09 AM	Main Vac valve opened
4/6/2012	10:47:09 AM	Helium MFC set to  20.000000
4/6/2012	10:47:09 AM	H2 MFC set to  0.000000
4/6/2012	10:47:09 AM	BCl3 MFC set to  0.000000
4/6/2012	10:47:09 AM	PH3 MFC set to  0.000000
4/6/2012	10:47:09 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:47:09 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:47:09 AM	Tube furnace set to 0
4/6/2012	10:47:39 AM	Helium valve closed
4/6/2012	10:47:39 AM	H2 valve closed
4/6/2012	10:47:39 AM	BCl3 valve closed
4/6/2012	10:47:39 AM	PH3 valve closed
4/6/2012	10:47:39 AM	SiCl4 pre valve closed
4/6/2012	10:47:39 AM	SiCl4 post valve closed
4/6/2012	10:47:39 AM	Bypass valve closed
4/6/2012	10:47:39 AM	Bubbler valve closed
4/6/2012	10:47:39 AM	Main Vac valve opened
4/6/2012	10:47:39 AM	Helium MFC set to  0.000000
4/6/2012	10:47:39 AM	H2 MFC set to  0.000000
4/6/2012	10:47:39 AM	BCl3 MFC set to  0.000000
4/6/2012	10:47:39 AM	PH3 MFC set to  0.000000
4/6/2012	10:47:39 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:47:39 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:47:39 AM	Tube furnace set to 200
4/6/2012	10:48:09 AM	H2 valve closed
4/6/2012	10:48:09 AM	BCl3 valve closed
4/6/2012	10:48:09 AM	PH3 valve closed
4/6/2012	10:48:09 AM	SiCl4 pre valve closed
4/6/2012	10:48:09 AM	SiCl4 post valve closed
4/6/2012	10:48:09 AM	Bypass valve closed
4/6/2012	10:48:09 AM	Bubbler valve closed
4/6/2012	10:48:09 AM	Helium valve opened
4/6/2012	10:48:09 AM	Main Vac valve opened
4/6/2012	10:48:09 AM	Helium MFC set to  20.000000
4/6/2012	10:48:09 AM	H2 MFC set to  0.000000
4/6/2012	10:48:09 AM	BCl3 MFC set to  0.000000
4/6/2012	10:48:09 AM	PH3 MFC set to  0.000000
4/6/2012	10:48:09 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:48:09 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:48:10 AM	Tube furnace set to 200
4/6/2012	10:48:40 AM	Helium valve closed
4/6/2012	10:48:40 AM	H2 valve closed
4/6/2012	10:48:40 AM	BCl3 valve closed
4/6/2012	10:48:40 AM	PH3 valve closed
4/6/2012	10:48:40 AM	SiCl4 pre valve closed
4/6/2012	10:48:40 AM	SiCl4 post valve closed
4/6/2012	10:48:40 AM	Bypass valve closed
4/6/2012	10:48:40 AM	Bubbler valve closed
4/6/2012	10:48:40 AM	Main Vac valve opened
4/6/2012	10:48:40 AM	Helium MFC set to  0.000000
4/6/2012	10:48:40 AM	H2 MFC set to  0.000000
4/6/2012	10:48:40 AM	BCl3 MFC set to  0.000000
4/6/2012	10:48:40 AM	PH3 MFC set to  0.000000
4/6/2012	10:48:40 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:48:40 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:48:40 AM	Tube furnace set to 200
4/6/2012	10:49:10 AM	H2 valve closed
4/6/2012	10:49:10 AM	BCl3 valve closed
4/6/2012	10:49:10 AM	PH3 valve closed
4/6/2012	10:49:10 AM	SiCl4 pre valve closed
4/6/2012	10:49:10 AM	SiCl4 post valve closed
4/6/2012	10:49:10 AM	Bypass valve closed
4/6/2012	10:49:10 AM	Bubbler valve closed
4/6/2012	10:49:10 AM	Helium valve opened
4/6/2012	10:49:10 AM	Main Vac valve opened
4/6/2012	10:49:10 AM	Helium MFC set to  20.000000
4/6/2012	10:49:10 AM	H2 MFC set to  0.000000
4/6/2012	10:49:10 AM	BCl3 MFC set to  0.000000
4/6/2012	10:49:10 AM	PH3 MFC set to  0.000000
4/6/2012	10:49:10 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:49:10 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:49:10 AM	Tube furnace set to 200
4/6/2012	10:49:40 AM	Helium valve closed
4/6/2012	10:49:40 AM	H2 valve closed
4/6/2012	10:49:40 AM	BCl3 valve closed
4/6/2012	10:49:40 AM	PH3 valve closed
4/6/2012	10:49:40 AM	SiCl4 pre valve closed
4/6/2012	10:49:40 AM	SiCl4 post valve closed
4/6/2012	10:49:40 AM	Bypass valve closed
4/6/2012	10:49:40 AM	Bubbler valve closed
4/6/2012	10:49:40 AM	Main Vac valve opened
4/6/2012	10:49:40 AM	Helium MFC set to  0.000000
4/6/2012	10:49:40 AM	H2 MFC set to  0.000000
4/6/2012	10:49:40 AM	BCl3 MFC set to  0.000000
4/6/2012	10:49:40 AM	PH3 MFC set to  0.000000
4/6/2012	10:49:40 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:49:40 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:49:40 AM	Tube furnace set to 200
4/6/2012	10:50:10 AM	H2 valve closed
4/6/2012	10:50:10 AM	BCl3 valve closed
4/6/2012	10:50:10 AM	PH3 valve closed
4/6/2012	10:50:10 AM	SiCl4 pre valve closed
4/6/2012	10:50:10 AM	SiCl4 post valve closed
4/6/2012	10:50:10 AM	Bypass valve closed
4/6/2012	10:50:10 AM	Bubbler valve closed
4/6/2012	10:50:10 AM	Helium valve opened
4/6/2012	10:50:10 AM	Main Vac valve opened
4/6/2012	10:50:10 AM	Helium MFC set to  20.000000
4/6/2012	10:50:10 AM	H2 MFC set to  0.000000
4/6/2012	10:50:10 AM	BCl3 MFC set to  0.000000
4/6/2012	10:50:10 AM	PH3 MFC set to  0.000000
4/6/2012	10:50:10 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:50:10 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:50:11 AM	Tube furnace set to 200
4/6/2012	10:50:41 AM	Helium valve closed
4/6/2012	10:50:41 AM	H2 valve closed
4/6/2012	10:50:41 AM	BCl3 valve closed
4/6/2012	10:50:41 AM	PH3 valve closed
4/6/2012	10:50:41 AM	SiCl4 pre valve closed
4/6/2012	10:50:41 AM	SiCl4 post valve closed
4/6/2012	10:50:41 AM	Bypass valve closed
4/6/2012	10:50:41 AM	Bubbler valve closed
4/6/2012	10:50:41 AM	Main Vac valve opened
4/6/2012	10:50:41 AM	Helium MFC set to  0.000000
4/6/2012	10:50:41 AM	H2 MFC set to  0.000000
4/6/2012	10:50:41 AM	BCl3 MFC set to  0.000000
4/6/2012	10:50:41 AM	PH3 MFC set to  0.000000
4/6/2012	10:50:41 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:50:41 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:50:41 AM	Tube furnace set to 200
4/6/2012	10:51:11 AM	H2 valve closed
4/6/2012	10:51:11 AM	BCl3 valve closed
4/6/2012	10:51:11 AM	PH3 valve closed
4/6/2012	10:51:11 AM	SiCl4 pre valve closed
4/6/2012	10:51:11 AM	SiCl4 post valve closed
4/6/2012	10:51:11 AM	Bypass valve closed
4/6/2012	10:51:11 AM	Bubbler valve closed
4/6/2012	10:51:11 AM	Helium valve opened
4/6/2012	10:51:11 AM	Main Vac valve opened
4/6/2012	10:51:11 AM	Helium MFC set to  20.000000
4/6/2012	10:51:11 AM	H2 MFC set to  0.000000
4/6/2012	10:51:11 AM	BCl3 MFC set to  0.000000
4/6/2012	10:51:11 AM	PH3 MFC set to  0.000000
4/6/2012	10:51:11 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:51:11 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:51:11 AM	Tube furnace set to 200
4/6/2012	10:51:41 AM	Helium valve closed
4/6/2012	10:51:41 AM	H2 valve closed
4/6/2012	10:51:41 AM	BCl3 valve closed
4/6/2012	10:51:41 AM	PH3 valve closed
4/6/2012	10:51:41 AM	SiCl4 pre valve closed
4/6/2012	10:51:41 AM	SiCl4 post valve closed
4/6/2012	10:51:41 AM	Bypass valve closed
4/6/2012	10:51:41 AM	Bubbler valve closed
4/6/2012	10:51:41 AM	Main Vac valve opened
4/6/2012	10:51:41 AM	Helium MFC set to  0.000000
4/6/2012	10:51:41 AM	H2 MFC set to  0.000000
4/6/2012	10:51:41 AM	BCl3 MFC set to  0.000000
4/6/2012	10:51:41 AM	PH3 MFC set to  0.000000
4/6/2012	10:51:41 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:51:41 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:51:41 AM	Tube furnace set to 200
4/6/2012	10:52:11 AM	H2 valve closed
4/6/2012	10:52:11 AM	BCl3 valve closed
4/6/2012	10:52:11 AM	PH3 valve closed
4/6/2012	10:52:11 AM	SiCl4 pre valve closed
4/6/2012	10:52:11 AM	SiCl4 post valve closed
4/6/2012	10:52:11 AM	Bypass valve closed
4/6/2012	10:52:11 AM	Bubbler valve closed
4/6/2012	10:52:11 AM	Helium valve opened
4/6/2012	10:52:11 AM	Main Vac valve opened
4/6/2012	10:52:11 AM	Helium MFC set to  20.000000
4/6/2012	10:52:11 AM	H2 MFC set to  0.000000
4/6/2012	10:52:11 AM	BCl3 MFC set to  0.000000
4/6/2012	10:52:11 AM	PH3 MFC set to  0.000000
4/6/2012	10:52:11 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:52:11 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:52:12 AM	Tube furnace set to 200
4/6/2012	10:52:42 AM	Helium valve closed
4/6/2012	10:52:42 AM	H2 valve closed
4/6/2012	10:52:42 AM	BCl3 valve closed
4/6/2012	10:52:42 AM	PH3 valve closed
4/6/2012	10:52:42 AM	SiCl4 pre valve closed
4/6/2012	10:52:42 AM	SiCl4 post valve closed
4/6/2012	10:52:42 AM	Bypass valve closed
4/6/2012	10:52:42 AM	Bubbler valve closed
4/6/2012	10:52:42 AM	Main Vac valve opened
4/6/2012	10:52:42 AM	Helium MFC set to  0.000000
4/6/2012	10:52:42 AM	H2 MFC set to  0.000000
4/6/2012	10:52:42 AM	BCl3 MFC set to  0.000000
4/6/2012	10:52:42 AM	PH3 MFC set to  0.000000
4/6/2012	10:52:42 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:52:42 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:52:42 AM	Tube furnace set to 200
4/6/2012	10:53:12 AM	H2 valve closed
4/6/2012	10:53:12 AM	BCl3 valve closed
4/6/2012	10:53:12 AM	PH3 valve closed
4/6/2012	10:53:12 AM	SiCl4 pre valve closed
4/6/2012	10:53:12 AM	SiCl4 post valve closed
4/6/2012	10:53:12 AM	Bypass valve closed
4/6/2012	10:53:12 AM	Bubbler valve closed
4/6/2012	10:53:12 AM	Helium valve opened
4/6/2012	10:53:12 AM	Main Vac valve opened
4/6/2012	10:53:12 AM	Helium MFC set to  20.000000
4/6/2012	10:53:12 AM	H2 MFC set to  0.000000
4/6/2012	10:53:12 AM	BCl3 MFC set to  0.000000
4/6/2012	10:53:12 AM	PH3 MFC set to  0.000000
4/6/2012	10:53:12 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:53:12 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:53:12 AM	Tube furnace set to 200
4/6/2012	10:53:42 AM	Helium valve closed
4/6/2012	10:53:42 AM	H2 valve closed
4/6/2012	10:53:42 AM	BCl3 valve closed
4/6/2012	10:53:42 AM	PH3 valve closed
4/6/2012	10:53:42 AM	SiCl4 pre valve closed
4/6/2012	10:53:42 AM	SiCl4 post valve closed
4/6/2012	10:53:42 AM	Bypass valve closed
4/6/2012	10:53:42 AM	Bubbler valve closed
4/6/2012	10:53:42 AM	Main Vac valve opened
4/6/2012	10:53:42 AM	Helium MFC set to  0.000000
4/6/2012	10:53:42 AM	H2 MFC set to  0.000000
4/6/2012	10:53:42 AM	BCl3 MFC set to  0.000000
4/6/2012	10:53:42 AM	PH3 MFC set to  0.000000
4/6/2012	10:53:42 AM	SiCl4 MFC set to  0.000000
4/6/2012	10:53:42 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:53:42 AM	Tube furnace set to 0
4/6/2012	10:53:43 AM	Run finished at 10:53 AM
4/6/2012	11:11:17 AM	Main Vac valve closed
4/6/2012	11:11:24 AM	Main Vac valve opened
4/6/2012	11:12:47 AM	Recipe started at 11:12 AM
4/6/2012	11:12:47 AM	Helium valve closed
4/6/2012	11:12:47 AM	H2 valve closed
4/6/2012	11:12:47 AM	BCl3 valve closed
4/6/2012	11:12:47 AM	PH3 valve closed
4/6/2012	11:12:47 AM	SiCl4 pre valve closed
4/6/2012	11:12:47 AM	SiCl4 post valve closed
4/6/2012	11:12:47 AM	Main Vac valve closed
4/6/2012	11:12:47 AM	Bypass valve closed
4/6/2012	11:12:47 AM	Bubbler valve closed
4/6/2012	11:12:47 AM	Helium MFC set to  0.000000
4/6/2012	11:12:47 AM	H2 MFC set to  0.000000
4/6/2012	11:12:47 AM	BCl3 MFC set to  0.000000
4/6/2012	11:12:48 AM	PH3 MFC set to  0.000000
4/6/2012	11:12:48 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:12:48 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:12:48 AM	Tube furnace set to 0
4/6/2012	11:12:51 AM	Helium valve closed
4/6/2012	11:12:51 AM	BCl3 valve closed
4/6/2012	11:12:51 AM	PH3 valve closed
4/6/2012	11:12:51 AM	SiCl4 pre valve closed
4/6/2012	11:12:51 AM	SiCl4 post valve closed
4/6/2012	11:12:51 AM	Main Vac valve closed
4/6/2012	11:12:51 AM	Bypass valve closed
4/6/2012	11:12:51 AM	Bubbler valve closed
4/6/2012	11:12:51 AM	H2 valve opened
4/6/2012	11:12:51 AM	Helium MFC set to  0.000000
4/6/2012	11:12:51 AM	H2 MFC set to  500.000000
4/6/2012	11:12:51 AM	BCl3 MFC set to  0.000000
4/6/2012	11:12:51 AM	PH3 MFC set to  0.000000
4/6/2012	11:12:51 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:12:51 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:12:51 AM	Tube furnace set to 0
4/6/2012	11:13:55 AM	Helium valve closed
4/6/2012	11:13:55 AM	BCl3 valve closed
4/6/2012	11:13:55 AM	PH3 valve closed
4/6/2012	11:13:55 AM	SiCl4 pre valve closed
4/6/2012	11:13:55 AM	SiCl4 post valve closed
4/6/2012	11:13:55 AM	Main Vac valve closed
4/6/2012	11:13:55 AM	Bypass valve closed
4/6/2012	11:13:55 AM	H2 valve opened
4/6/2012	11:13:55 AM	Bubbler valve opened
4/6/2012	11:13:55 AM	Helium MFC set to  0.000000
4/6/2012	11:13:55 AM	H2 MFC set to  500.000000
4/6/2012	11:13:55 AM	BCl3 MFC set to  0.000000
4/6/2012	11:13:55 AM	PH3 MFC set to  0.000000
4/6/2012	11:13:55 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:13:55 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:13:56 AM	Tube furnace set to 0
4/6/2012	11:13:57 AM	Helium valve closed
4/6/2012	11:13:57 AM	BCl3 valve closed
4/6/2012	11:13:57 AM	PH3 valve closed
4/6/2012	11:13:57 AM	SiCl4 pre valve closed
4/6/2012	11:13:57 AM	SiCl4 post valve closed
4/6/2012	11:13:57 AM	Main Vac valve closed
4/6/2012	11:13:57 AM	Bypass valve closed
4/6/2012	11:13:57 AM	H2 valve opened
4/6/2012	11:13:57 AM	Bubbler valve opened
4/6/2012	11:13:57 AM	Helium MFC set to  0.000000
4/6/2012	11:13:57 AM	H2 MFC set to  500.000000
4/6/2012	11:13:57 AM	BCl3 MFC set to  0.000000
4/6/2012	11:13:57 AM	PH3 MFC set to  0.000000
4/6/2012	11:13:57 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:13:57 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:13:57 AM	Tube furnace set to 1000
4/6/2012	11:33:57 AM	Helium valve closed
4/6/2012	11:33:57 AM	PH3 valve closed
4/6/2012	11:33:57 AM	Main Vac valve closed
4/6/2012	11:33:57 AM	Bypass valve closed
4/6/2012	11:33:57 AM	H2 valve opened
4/6/2012	11:33:57 AM	BCl3 valve opened
4/6/2012	11:33:57 AM	SiCl4 pre valve opened
4/6/2012	11:33:57 AM	SiCl4 post valve opened
4/6/2012	11:33:57 AM	Bubbler valve opened
4/6/2012	11:33:57 AM	Helium MFC set to  0.000000
4/6/2012	11:33:57 AM	H2 MFC set to  450.000000
4/6/2012	11:33:57 AM	BCl3 MFC set to  1.500000
4/6/2012	11:33:57 AM	PH3 MFC set to  0.000000
4/6/2012	11:33:57 AM	SiCl4 MFC set to  50.000000
4/6/2012	11:33:57 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:33:57 AM	Tube furnace set to 1000
4/6/2012	11:47:57 AM	Helium valve closed
4/6/2012	11:47:57 AM	BCl3 valve closed
4/6/2012	11:47:57 AM	PH3 valve closed
4/6/2012	11:47:57 AM	SiCl4 pre valve closed
4/6/2012	11:47:57 AM	SiCl4 post valve closed
4/6/2012	11:47:57 AM	Main Vac valve closed
4/6/2012	11:47:57 AM	Bypass valve closed
4/6/2012	11:47:57 AM	H2 valve opened
4/6/2012	11:47:57 AM	Bubbler valve opened
4/6/2012	11:47:57 AM	Helium MFC set to  0.000000
4/6/2012	11:47:57 AM	H2 MFC set to  500.000000
4/6/2012	11:47:57 AM	BCl3 MFC set to  0.000000
4/6/2012	11:47:57 AM	PH3 MFC set to  0.000000
4/6/2012	11:47:57 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:47:57 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:47:57 AM	Tube furnace set to 950
4/6/2012	11:49:57 AM	Helium valve closed
4/6/2012	11:49:57 AM	BCl3 valve closed
4/6/2012	11:49:57 AM	PH3 valve closed
4/6/2012	11:49:57 AM	SiCl4 pre valve closed
4/6/2012	11:49:57 AM	SiCl4 post valve closed
4/6/2012	11:49:57 AM	Main Vac valve closed
4/6/2012	11:49:57 AM	Bypass valve closed
4/6/2012	11:49:57 AM	H2 valve opened
4/6/2012	11:49:57 AM	Bubbler valve opened
4/6/2012	11:49:57 AM	Helium MFC set to  0.000000
4/6/2012	11:49:57 AM	H2 MFC set to  500.000000
4/6/2012	11:49:57 AM	BCl3 MFC set to  0.000000
4/6/2012	11:49:57 AM	PH3 MFC set to  0.000000
4/6/2012	11:49:57 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:49:57 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:49:57 AM	Tube furnace set to 900
4/6/2012	11:51:57 AM	Helium valve closed
4/6/2012	11:51:57 AM	BCl3 valve closed
4/6/2012	11:51:57 AM	PH3 valve closed
4/6/2012	11:51:57 AM	SiCl4 pre valve closed
4/6/2012	11:51:57 AM	SiCl4 post valve closed
4/6/2012	11:51:57 AM	Main Vac valve closed
4/6/2012	11:51:58 AM	Bypass valve closed
4/6/2012	11:51:58 AM	H2 valve opened
4/6/2012	11:51:58 AM	Bubbler valve opened
4/6/2012	11:51:58 AM	Helium MFC set to  0.000000
4/6/2012	11:51:58 AM	H2 MFC set to  500.000000
4/6/2012	11:51:58 AM	BCl3 MFC set to  0.000000
4/6/2012	11:51:58 AM	PH3 MFC set to  0.000000
4/6/2012	11:51:58 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:51:58 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:51:58 AM	Tube furnace set to 850
4/6/2012	11:53:58 AM	H2 valve closed
4/6/2012	11:53:58 AM	BCl3 valve closed
4/6/2012	11:53:58 AM	PH3 valve closed
4/6/2012	11:53:58 AM	SiCl4 pre valve closed
4/6/2012	11:53:58 AM	SiCl4 post valve closed
4/6/2012	11:53:58 AM	Main Vac valve closed
4/6/2012	11:53:58 AM	Bypass valve closed
4/6/2012	11:53:58 AM	Helium valve opened
4/6/2012	11:53:58 AM	Bubbler valve opened
4/6/2012	11:53:58 AM	Helium MFC set to  500.000000
4/6/2012	11:53:58 AM	H2 MFC set to  0.000000
4/6/2012	11:53:58 AM	BCl3 MFC set to  0.000000
4/6/2012	11:53:58 AM	PH3 MFC set to  0.000000
4/6/2012	11:53:58 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:53:58 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:53:58 AM	Tube furnace set to 800
4/6/2012	11:55:58 AM	H2 valve closed
4/6/2012	11:55:58 AM	BCl3 valve closed
4/6/2012	11:55:58 AM	PH3 valve closed
4/6/2012	11:55:58 AM	SiCl4 pre valve closed
4/6/2012	11:55:58 AM	SiCl4 post valve closed
4/6/2012	11:55:58 AM	Main Vac valve closed
4/6/2012	11:55:58 AM	Bypass valve closed
4/6/2012	11:55:58 AM	Helium valve opened
4/6/2012	11:55:58 AM	Bubbler valve opened
4/6/2012	11:55:58 AM	Helium MFC set to  500.000000
4/6/2012	11:55:58 AM	H2 MFC set to  0.000000
4/6/2012	11:55:58 AM	BCl3 MFC set to  0.000000
4/6/2012	11:55:58 AM	PH3 MFC set to  0.000000
4/6/2012	11:55:58 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:55:58 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:55:58 AM	Tube furnace set to 750
4/6/2012	11:57:58 AM	H2 valve closed
4/6/2012	11:57:58 AM	BCl3 valve closed
4/6/2012	11:57:58 AM	PH3 valve closed
4/6/2012	11:57:58 AM	SiCl4 pre valve closed
4/6/2012	11:57:58 AM	SiCl4 post valve closed
4/6/2012	11:57:58 AM	Main Vac valve closed
4/6/2012	11:57:58 AM	Bypass valve closed
4/6/2012	11:57:58 AM	Helium valve opened
4/6/2012	11:57:58 AM	Bubbler valve opened
4/6/2012	11:57:58 AM	Helium MFC set to  500.000000
4/6/2012	11:57:58 AM	H2 MFC set to  0.000000
4/6/2012	11:57:58 AM	BCl3 MFC set to  0.000000
4/6/2012	11:57:58 AM	PH3 MFC set to  0.000000
4/6/2012	11:57:58 AM	SiCl4 MFC set to  0.000000
4/6/2012	11:57:58 AM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:57:58 AM	Tube furnace set to 0
4/6/2012	12:17:58 PM	Helium valve closed
4/6/2012	12:17:58 PM	H2 valve closed
4/6/2012	12:17:58 PM	BCl3 valve closed
4/6/2012	12:17:58 PM	PH3 valve closed
4/6/2012	12:17:58 PM	SiCl4 pre valve closed
4/6/2012	12:17:58 PM	SiCl4 post valve closed
4/6/2012	12:17:58 PM	Main Vac valve closed
4/6/2012	12:17:58 PM	Bypass valve closed
4/6/2012	12:17:58 PM	Bubbler valve closed
4/6/2012	12:17:58 PM	Helium MFC set to  0.000000
4/6/2012	12:17:58 PM	H2 MFC set to  0.000000
4/6/2012	12:17:58 PM	BCl3 MFC set to  0.000000
4/6/2012	12:17:58 PM	PH3 MFC set to  0.000000
4/6/2012	12:17:58 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:17:58 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:17:59 PM	Tube furnace set to 0
4/6/2012	12:18:00 PM	Run finished at 12:18 PM
4/6/2012	12:34:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	12:34:52 PM	Recipe started at 12:34 PM
4/6/2012	12:34:53 PM	Helium valve closed
4/6/2012	12:34:53 PM	H2 valve closed
4/6/2012	12:34:53 PM	BCl3 valve closed
4/6/2012	12:34:53 PM	PH3 valve closed
4/6/2012	12:34:53 PM	SiCl4 pre valve closed
4/6/2012	12:34:53 PM	SiCl4 post valve closed
4/6/2012	12:34:53 PM	Main Vac valve closed
4/6/2012	12:34:53 PM	Bypass valve closed
4/6/2012	12:34:53 PM	Bubbler valve closed
4/6/2012	12:34:53 PM	Helium MFC set to  0.000000
4/6/2012	12:34:53 PM	H2 MFC set to  0.000000
4/6/2012	12:34:53 PM	BCl3 MFC set to  0.000000
4/6/2012	12:34:53 PM	PH3 MFC set to  0.000000
4/6/2012	12:34:53 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:34:53 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:34:53 PM	Tube furnace set to 0
4/6/2012	12:34:56 PM	H2 valve closed
4/6/2012	12:34:56 PM	BCl3 valve closed
4/6/2012	12:34:56 PM	PH3 valve closed
4/6/2012	12:34:56 PM	SiCl4 pre valve closed
4/6/2012	12:34:56 PM	SiCl4 post valve closed
4/6/2012	12:34:56 PM	Main Vac valve closed
4/6/2012	12:34:56 PM	Bypass valve closed
4/6/2012	12:34:56 PM	Bubbler valve closed
4/6/2012	12:34:56 PM	Helium valve opened
4/6/2012	12:34:56 PM	Helium MFC set to  500.000000
4/6/2012	12:34:56 PM	H2 MFC set to  0.000000
4/6/2012	12:34:56 PM	BCl3 MFC set to  0.000000
4/6/2012	12:34:56 PM	PH3 MFC set to  0.000000
4/6/2012	12:34:56 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:34:56 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:34:56 PM	Tube furnace set to 0
4/6/2012	12:35:02 PM	Helium valve closed
4/6/2012	12:35:02 PM	H2 valve closed
4/6/2012	12:35:02 PM	BCl3 valve closed
4/6/2012	12:35:02 PM	PH3 valve closed
4/6/2012	12:35:02 PM	SiCl4 pre valve closed
4/6/2012	12:35:02 PM	SiCl4 post valve closed
4/6/2012	12:35:02 PM	Main Vac valve closed
4/6/2012	12:35:02 PM	Bypass valve closed
4/6/2012	12:35:02 PM	Bubbler valve closed
4/6/2012	12:35:02 PM	Helium MFC set to  0.000000
4/6/2012	12:35:02 PM	H2 MFC set to  0.000000
4/6/2012	12:35:02 PM	BCl3 MFC set to  0.000000
4/6/2012	12:35:02 PM	PH3 MFC set to  0.000000
4/6/2012	12:35:02 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:35:02 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:35:02 PM	Tube furnace set to 0
4/6/2012	12:35:03 PM	Run finished at 12:35 PM
4/6/2012	12:35:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	12:37:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	12:37:44 PM	Recipe started at 12:37 PM
4/6/2012	12:37:44 PM	Helium valve closed
4/6/2012	12:37:44 PM	H2 valve closed
4/6/2012	12:37:44 PM	BCl3 valve closed
4/6/2012	12:37:44 PM	PH3 valve closed
4/6/2012	12:37:44 PM	SiCl4 pre valve closed
4/6/2012	12:37:44 PM	SiCl4 post valve closed
4/6/2012	12:37:44 PM	Main Vac valve closed
4/6/2012	12:37:44 PM	Bubbler valve closed
4/6/2012	12:37:44 PM	Bypass valve opened
4/6/2012	12:37:44 PM	Helium MFC set to  0.000000
4/6/2012	12:37:44 PM	H2 MFC set to  0.000000
4/6/2012	12:37:44 PM	BCl3 MFC set to  0.000000
4/6/2012	12:37:44 PM	PH3 MFC set to  0.000000
4/6/2012	12:37:44 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:37:44 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:37:44 PM	Tube furnace set to 0
4/6/2012	12:38:43 PM	Helium valve closed
4/6/2012	12:38:43 PM	H2 valve closed
4/6/2012	12:38:43 PM	BCl3 valve closed
4/6/2012	12:38:43 PM	PH3 valve closed
4/6/2012	12:38:43 PM	SiCl4 pre valve closed
4/6/2012	12:38:43 PM	SiCl4 post valve closed
4/6/2012	12:38:43 PM	Main Vac valve closed
4/6/2012	12:38:43 PM	Bubbler valve closed
4/6/2012	12:38:43 PM	Bypass valve opened
4/6/2012	12:38:43 PM	Helium MFC set to  0.000000
4/6/2012	12:38:43 PM	H2 MFC set to  0.000000
4/6/2012	12:38:43 PM	BCl3 MFC set to  0.000000
4/6/2012	12:38:43 PM	PH3 MFC set to  0.000000
4/6/2012	12:38:43 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:38:43 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:38:44 PM	Tube furnace set to 0
4/6/2012	12:39:44 PM	Helium valve closed
4/6/2012	12:39:44 PM	H2 valve closed
4/6/2012	12:39:44 PM	BCl3 valve closed
4/6/2012	12:39:44 PM	PH3 valve closed
4/6/2012	12:39:44 PM	SiCl4 pre valve closed
4/6/2012	12:39:44 PM	SiCl4 post valve closed
4/6/2012	12:39:44 PM	Bypass valve closed
4/6/2012	12:39:44 PM	Bubbler valve closed
4/6/2012	12:39:44 PM	Main Vac valve opened
4/6/2012	12:39:44 PM	Helium MFC set to  0.000000
4/6/2012	12:39:44 PM	H2 MFC set to  0.000000
4/6/2012	12:39:44 PM	BCl3 MFC set to  0.000000
4/6/2012	12:39:44 PM	PH3 MFC set to  0.000000
4/6/2012	12:39:44 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:39:44 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:39:44 PM	Tube furnace set to 0
4/6/2012	12:39:45 PM	Run finished at 12:39 PM
4/6/2012	12:39:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	12:42:30 PM	Recipe started at 12:42 PM
4/6/2012	12:42:30 PM	Helium valve closed
4/6/2012	12:42:30 PM	H2 valve closed
4/6/2012	12:42:30 PM	BCl3 valve closed
4/6/2012	12:42:30 PM	PH3 valve closed
4/6/2012	12:42:30 PM	SiCl4 pre valve closed
4/6/2012	12:42:30 PM	SiCl4 post valve closed
4/6/2012	12:42:30 PM	Bypass valve closed
4/6/2012	12:42:30 PM	Bubbler valve closed
4/6/2012	12:42:30 PM	Main Vac valve opened
4/6/2012	12:42:30 PM	Helium MFC set to  0.000000
4/6/2012	12:42:30 PM	H2 MFC set to  0.000000
4/6/2012	12:42:30 PM	BCl3 MFC set to  0.000000
4/6/2012	12:42:30 PM	PH3 MFC set to  0.000000
4/6/2012	12:42:30 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:42:30 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:42:30 PM	Tube furnace set to 0
4/6/2012	12:43:00 PM	H2 valve closed
4/6/2012	12:43:00 PM	BCl3 valve closed
4/6/2012	12:43:00 PM	PH3 valve closed
4/6/2012	12:43:00 PM	SiCl4 pre valve closed
4/6/2012	12:43:00 PM	SiCl4 post valve closed
4/6/2012	12:43:00 PM	Bypass valve closed
4/6/2012	12:43:00 PM	Bubbler valve closed
4/6/2012	12:43:00 PM	Helium valve opened
4/6/2012	12:43:00 PM	Main Vac valve opened
4/6/2012	12:43:00 PM	Helium MFC set to  20.000000
4/6/2012	12:43:00 PM	H2 MFC set to  0.000000
4/6/2012	12:43:00 PM	BCl3 MFC set to  0.000000
4/6/2012	12:43:00 PM	PH3 MFC set to  0.000000
4/6/2012	12:43:00 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:43:00 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:43:00 PM	Tube furnace set to 0
4/6/2012	12:43:30 PM	Helium valve closed
4/6/2012	12:43:30 PM	H2 valve closed
4/6/2012	12:43:30 PM	BCl3 valve closed
4/6/2012	12:43:30 PM	PH3 valve closed
4/6/2012	12:43:30 PM	SiCl4 pre valve closed
4/6/2012	12:43:30 PM	SiCl4 post valve closed
4/6/2012	12:43:30 PM	Bypass valve closed
4/6/2012	12:43:30 PM	Bubbler valve closed
4/6/2012	12:43:30 PM	Main Vac valve opened
4/6/2012	12:43:30 PM	Helium MFC set to  0.000000
4/6/2012	12:43:30 PM	H2 MFC set to  0.000000
4/6/2012	12:43:30 PM	BCl3 MFC set to  0.000000
4/6/2012	12:43:30 PM	PH3 MFC set to  0.000000
4/6/2012	12:43:30 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:43:30 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:43:30 PM	Tube furnace set to 0
4/6/2012	12:44:00 PM	H2 valve closed
4/6/2012	12:44:00 PM	BCl3 valve closed
4/6/2012	12:44:00 PM	PH3 valve closed
4/6/2012	12:44:00 PM	SiCl4 pre valve closed
4/6/2012	12:44:00 PM	SiCl4 post valve closed
4/6/2012	12:44:00 PM	Bypass valve closed
4/6/2012	12:44:00 PM	Bubbler valve closed
4/6/2012	12:44:00 PM	Helium valve opened
4/6/2012	12:44:00 PM	Main Vac valve opened
4/6/2012	12:44:00 PM	Helium MFC set to  20.000000
4/6/2012	12:44:00 PM	H2 MFC set to  0.000000
4/6/2012	12:44:00 PM	BCl3 MFC set to  0.000000
4/6/2012	12:44:00 PM	PH3 MFC set to  0.000000
4/6/2012	12:44:00 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:44:00 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:44:01 PM	Tube furnace set to 0
4/6/2012	12:44:31 PM	Helium valve closed
4/6/2012	12:44:31 PM	H2 valve closed
4/6/2012	12:44:31 PM	BCl3 valve closed
4/6/2012	12:44:31 PM	PH3 valve closed
4/6/2012	12:44:31 PM	SiCl4 pre valve closed
4/6/2012	12:44:31 PM	SiCl4 post valve closed
4/6/2012	12:44:31 PM	Bypass valve closed
4/6/2012	12:44:31 PM	Bubbler valve closed
4/6/2012	12:44:31 PM	Main Vac valve opened
4/6/2012	12:44:31 PM	Helium MFC set to  0.000000
4/6/2012	12:44:31 PM	H2 MFC set to  0.000000
4/6/2012	12:44:31 PM	BCl3 MFC set to  0.000000
4/6/2012	12:44:31 PM	PH3 MFC set to  0.000000
4/6/2012	12:44:31 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:44:31 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:44:31 PM	Tube furnace set to 0
4/6/2012	12:45:01 PM	H2 valve closed
4/6/2012	12:45:01 PM	BCl3 valve closed
4/6/2012	12:45:01 PM	PH3 valve closed
4/6/2012	12:45:01 PM	SiCl4 pre valve closed
4/6/2012	12:45:01 PM	SiCl4 post valve closed
4/6/2012	12:45:01 PM	Bypass valve closed
4/6/2012	12:45:01 PM	Bubbler valve closed
4/6/2012	12:45:01 PM	Helium valve opened
4/6/2012	12:45:01 PM	Main Vac valve opened
4/6/2012	12:45:01 PM	Helium MFC set to  20.000000
4/6/2012	12:45:01 PM	H2 MFC set to  0.000000
4/6/2012	12:45:01 PM	BCl3 MFC set to  0.000000
4/6/2012	12:45:01 PM	PH3 MFC set to  0.000000
4/6/2012	12:45:01 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:45:01 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:45:01 PM	Tube furnace set to 0
4/6/2012	12:45:31 PM	Helium valve closed
4/6/2012	12:45:31 PM	H2 valve closed
4/6/2012	12:45:31 PM	BCl3 valve closed
4/6/2012	12:45:31 PM	PH3 valve closed
4/6/2012	12:45:31 PM	SiCl4 pre valve closed
4/6/2012	12:45:31 PM	SiCl4 post valve closed
4/6/2012	12:45:31 PM	Bypass valve closed
4/6/2012	12:45:31 PM	Bubbler valve closed
4/6/2012	12:45:31 PM	Main Vac valve opened
4/6/2012	12:45:31 PM	Helium MFC set to  0.000000
4/6/2012	12:45:31 PM	H2 MFC set to  0.000000
4/6/2012	12:45:31 PM	BCl3 MFC set to  0.000000
4/6/2012	12:45:31 PM	PH3 MFC set to  0.000000
4/6/2012	12:45:31 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:45:31 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:45:31 PM	Tube furnace set to 0
4/6/2012	12:46:01 PM	H2 valve closed
4/6/2012	12:46:01 PM	BCl3 valve closed
4/6/2012	12:46:01 PM	PH3 valve closed
4/6/2012	12:46:01 PM	SiCl4 pre valve closed
4/6/2012	12:46:01 PM	SiCl4 post valve closed
4/6/2012	12:46:01 PM	Bypass valve closed
4/6/2012	12:46:01 PM	Bubbler valve closed
4/6/2012	12:46:01 PM	Helium valve opened
4/6/2012	12:46:01 PM	Main Vac valve opened
4/6/2012	12:46:01 PM	Helium MFC set to  20.000000
4/6/2012	12:46:01 PM	H2 MFC set to  0.000000
4/6/2012	12:46:01 PM	BCl3 MFC set to  0.000000
4/6/2012	12:46:01 PM	PH3 MFC set to  0.000000
4/6/2012	12:46:01 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:46:01 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:46:02 PM	Tube furnace set to 0
4/6/2012	12:46:32 PM	Helium valve closed
4/6/2012	12:46:32 PM	H2 valve closed
4/6/2012	12:46:32 PM	BCl3 valve closed
4/6/2012	12:46:32 PM	PH3 valve closed
4/6/2012	12:46:32 PM	SiCl4 pre valve closed
4/6/2012	12:46:32 PM	SiCl4 post valve closed
4/6/2012	12:46:32 PM	Bypass valve closed
4/6/2012	12:46:32 PM	Bubbler valve closed
4/6/2012	12:46:32 PM	Main Vac valve opened
4/6/2012	12:46:32 PM	Helium MFC set to  0.000000
4/6/2012	12:46:32 PM	H2 MFC set to  0.000000
4/6/2012	12:46:32 PM	BCl3 MFC set to  0.000000
4/6/2012	12:46:32 PM	PH3 MFC set to  0.000000
4/6/2012	12:46:32 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:46:32 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:46:32 PM	Tube furnace set to 0
4/6/2012	12:47:02 PM	H2 valve closed
4/6/2012	12:47:02 PM	BCl3 valve closed
4/6/2012	12:47:02 PM	PH3 valve closed
4/6/2012	12:47:02 PM	SiCl4 pre valve closed
4/6/2012	12:47:02 PM	SiCl4 post valve closed
4/6/2012	12:47:02 PM	Bypass valve closed
4/6/2012	12:47:02 PM	Bubbler valve closed
4/6/2012	12:47:02 PM	Helium valve opened
4/6/2012	12:47:02 PM	Main Vac valve opened
4/6/2012	12:47:02 PM	Helium MFC set to  20.000000
4/6/2012	12:47:02 PM	H2 MFC set to  0.000000
4/6/2012	12:47:02 PM	BCl3 MFC set to  0.000000
4/6/2012	12:47:02 PM	PH3 MFC set to  0.000000
4/6/2012	12:47:02 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:47:02 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:47:02 PM	Tube furnace set to 0
4/6/2012	12:47:32 PM	Helium valve closed
4/6/2012	12:47:32 PM	H2 valve closed
4/6/2012	12:47:32 PM	BCl3 valve closed
4/6/2012	12:47:32 PM	PH3 valve closed
4/6/2012	12:47:32 PM	SiCl4 pre valve closed
4/6/2012	12:47:32 PM	SiCl4 post valve closed
4/6/2012	12:47:32 PM	Bypass valve closed
4/6/2012	12:47:32 PM	Bubbler valve closed
4/6/2012	12:47:32 PM	Main Vac valve opened
4/6/2012	12:47:32 PM	Helium MFC set to  0.000000
4/6/2012	12:47:32 PM	H2 MFC set to  0.000000
4/6/2012	12:47:32 PM	BCl3 MFC set to  0.000000
4/6/2012	12:47:32 PM	PH3 MFC set to  0.000000
4/6/2012	12:47:32 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:47:32 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:47:32 PM	Tube furnace set to 0
4/6/2012	12:48:02 PM	H2 valve closed
4/6/2012	12:48:02 PM	BCl3 valve closed
4/6/2012	12:48:02 PM	PH3 valve closed
4/6/2012	12:48:02 PM	SiCl4 pre valve closed
4/6/2012	12:48:02 PM	SiCl4 post valve closed
4/6/2012	12:48:02 PM	Bypass valve closed
4/6/2012	12:48:02 PM	Bubbler valve closed
4/6/2012	12:48:02 PM	Helium valve opened
4/6/2012	12:48:02 PM	Main Vac valve opened
4/6/2012	12:48:02 PM	Helium MFC set to  20.000000
4/6/2012	12:48:02 PM	H2 MFC set to  0.000000
4/6/2012	12:48:02 PM	BCl3 MFC set to  0.000000
4/6/2012	12:48:02 PM	PH3 MFC set to  0.000000
4/6/2012	12:48:02 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:48:02 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:48:02 PM	Tube furnace set to 0
4/6/2012	12:48:32 PM	Helium valve closed
4/6/2012	12:48:32 PM	H2 valve closed
4/6/2012	12:48:32 PM	BCl3 valve closed
4/6/2012	12:48:33 PM	PH3 valve closed
4/6/2012	12:48:33 PM	SiCl4 pre valve closed
4/6/2012	12:48:33 PM	SiCl4 post valve closed
4/6/2012	12:48:33 PM	Bypass valve closed
4/6/2012	12:48:33 PM	Bubbler valve closed
4/6/2012	12:48:33 PM	Main Vac valve opened
4/6/2012	12:48:33 PM	Helium MFC set to  0.000000
4/6/2012	12:48:33 PM	H2 MFC set to  0.000000
4/6/2012	12:48:33 PM	BCl3 MFC set to  0.000000
4/6/2012	12:48:33 PM	PH3 MFC set to  0.000000
4/6/2012	12:48:33 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:48:33 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:48:33 PM	Tube furnace set to 0
4/6/2012	12:49:03 PM	H2 valve closed
4/6/2012	12:49:03 PM	BCl3 valve closed
4/6/2012	12:49:03 PM	PH3 valve closed
4/6/2012	12:49:03 PM	SiCl4 pre valve closed
4/6/2012	12:49:03 PM	SiCl4 post valve closed
4/6/2012	12:49:03 PM	Bypass valve closed
4/6/2012	12:49:03 PM	Bubbler valve closed
4/6/2012	12:49:03 PM	Helium valve opened
4/6/2012	12:49:03 PM	Main Vac valve opened
4/6/2012	12:49:03 PM	Helium MFC set to  20.000000
4/6/2012	12:49:03 PM	H2 MFC set to  0.000000
4/6/2012	12:49:03 PM	BCl3 MFC set to  0.000000
4/6/2012	12:49:03 PM	PH3 MFC set to  0.000000
4/6/2012	12:49:03 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:49:03 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:49:03 PM	Tube furnace set to 0
4/6/2012	12:49:33 PM	Helium valve closed
4/6/2012	12:49:33 PM	H2 valve closed
4/6/2012	12:49:33 PM	BCl3 valve closed
4/6/2012	12:49:33 PM	PH3 valve closed
4/6/2012	12:49:33 PM	SiCl4 pre valve closed
4/6/2012	12:49:33 PM	SiCl4 post valve closed
4/6/2012	12:49:33 PM	Bypass valve closed
4/6/2012	12:49:33 PM	Bubbler valve closed
4/6/2012	12:49:33 PM	Main Vac valve opened
4/6/2012	12:49:33 PM	Helium MFC set to  0.000000
4/6/2012	12:49:33 PM	H2 MFC set to  0.000000
4/6/2012	12:49:33 PM	BCl3 MFC set to  0.000000
4/6/2012	12:49:33 PM	PH3 MFC set to  0.000000
4/6/2012	12:49:33 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:49:33 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:49:33 PM	Tube furnace set to 0
4/6/2012	12:50:03 PM	H2 valve closed
4/6/2012	12:50:03 PM	BCl3 valve closed
4/6/2012	12:50:03 PM	PH3 valve closed
4/6/2012	12:50:03 PM	SiCl4 pre valve closed
4/6/2012	12:50:03 PM	SiCl4 post valve closed
4/6/2012	12:50:03 PM	Bypass valve closed
4/6/2012	12:50:03 PM	Bubbler valve closed
4/6/2012	12:50:03 PM	Helium valve opened
4/6/2012	12:50:03 PM	Main Vac valve opened
4/6/2012	12:50:03 PM	Helium MFC set to  20.000000
4/6/2012	12:50:03 PM	H2 MFC set to  0.000000
4/6/2012	12:50:03 PM	BCl3 MFC set to  0.000000
4/6/2012	12:50:03 PM	PH3 MFC set to  0.000000
4/6/2012	12:50:03 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:50:03 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:50:03 PM	Tube furnace set to 0
4/6/2012	12:50:33 PM	Helium valve closed
4/6/2012	12:50:33 PM	H2 valve closed
4/6/2012	12:50:33 PM	BCl3 valve closed
4/6/2012	12:50:33 PM	PH3 valve closed
4/6/2012	12:50:33 PM	SiCl4 pre valve closed
4/6/2012	12:50:33 PM	SiCl4 post valve closed
4/6/2012	12:50:33 PM	Bypass valve closed
4/6/2012	12:50:33 PM	Bubbler valve closed
4/6/2012	12:50:33 PM	Main Vac valve opened
4/6/2012	12:50:33 PM	Helium MFC set to  0.000000
4/6/2012	12:50:33 PM	H2 MFC set to  0.000000
4/6/2012	12:50:33 PM	BCl3 MFC set to  0.000000
4/6/2012	12:50:33 PM	PH3 MFC set to  0.000000
4/6/2012	12:50:33 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:50:34 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:50:34 PM	Tube furnace set to 0
4/6/2012	12:51:04 PM	H2 valve closed
4/6/2012	12:51:04 PM	BCl3 valve closed
4/6/2012	12:51:04 PM	PH3 valve closed
4/6/2012	12:51:04 PM	SiCl4 pre valve closed
4/6/2012	12:51:04 PM	SiCl4 post valve closed
4/6/2012	12:51:04 PM	Bypass valve closed
4/6/2012	12:51:04 PM	Bubbler valve closed
4/6/2012	12:51:04 PM	Helium valve opened
4/6/2012	12:51:04 PM	Main Vac valve opened
4/6/2012	12:51:04 PM	Helium MFC set to  20.000000
4/6/2012	12:51:04 PM	H2 MFC set to  0.000000
4/6/2012	12:51:04 PM	BCl3 MFC set to  0.000000
4/6/2012	12:51:04 PM	PH3 MFC set to  0.000000
4/6/2012	12:51:04 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:51:04 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:51:04 PM	Tube furnace set to 0
4/6/2012	12:51:34 PM	Helium valve closed
4/6/2012	12:51:34 PM	H2 valve closed
4/6/2012	12:51:34 PM	BCl3 valve closed
4/6/2012	12:51:34 PM	PH3 valve closed
4/6/2012	12:51:34 PM	SiCl4 pre valve closed
4/6/2012	12:51:34 PM	SiCl4 post valve closed
4/6/2012	12:51:34 PM	Bypass valve closed
4/6/2012	12:51:34 PM	Bubbler valve closed
4/6/2012	12:51:34 PM	Main Vac valve opened
4/6/2012	12:51:34 PM	Helium MFC set to  0.000000
4/6/2012	12:51:34 PM	H2 MFC set to  0.000000
4/6/2012	12:51:34 PM	BCl3 MFC set to  0.000000
4/6/2012	12:51:34 PM	PH3 MFC set to  0.000000
4/6/2012	12:51:34 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:51:34 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:51:34 PM	Tube furnace set to 200
4/6/2012	12:52:04 PM	H2 valve closed
4/6/2012	12:52:04 PM	BCl3 valve closed
4/6/2012	12:52:04 PM	PH3 valve closed
4/6/2012	12:52:04 PM	SiCl4 pre valve closed
4/6/2012	12:52:04 PM	SiCl4 post valve closed
4/6/2012	12:52:04 PM	Bypass valve closed
4/6/2012	12:52:04 PM	Bubbler valve closed
4/6/2012	12:52:04 PM	Helium valve opened
4/6/2012	12:52:04 PM	Main Vac valve opened
4/6/2012	12:52:04 PM	Helium MFC set to  20.000000
4/6/2012	12:52:04 PM	H2 MFC set to  0.000000
4/6/2012	12:52:04 PM	BCl3 MFC set to  0.000000
4/6/2012	12:52:04 PM	PH3 MFC set to  0.000000
4/6/2012	12:52:04 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:52:04 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:52:04 PM	Tube furnace set to 200
4/6/2012	12:52:34 PM	Helium valve closed
4/6/2012	12:52:34 PM	H2 valve closed
4/6/2012	12:52:34 PM	BCl3 valve closed
4/6/2012	12:52:34 PM	PH3 valve closed
4/6/2012	12:52:34 PM	SiCl4 pre valve closed
4/6/2012	12:52:34 PM	SiCl4 post valve closed
4/6/2012	12:52:34 PM	Bypass valve closed
4/6/2012	12:52:34 PM	Bubbler valve closed
4/6/2012	12:52:34 PM	Main Vac valve opened
4/6/2012	12:52:34 PM	Helium MFC set to  0.000000
4/6/2012	12:52:34 PM	H2 MFC set to  0.000000
4/6/2012	12:52:34 PM	BCl3 MFC set to  0.000000
4/6/2012	12:52:34 PM	PH3 MFC set to  0.000000
4/6/2012	12:52:34 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:52:34 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:52:35 PM	Tube furnace set to 200
4/6/2012	12:53:05 PM	H2 valve closed
4/6/2012	12:53:05 PM	BCl3 valve closed
4/6/2012	12:53:05 PM	PH3 valve closed
4/6/2012	12:53:05 PM	SiCl4 pre valve closed
4/6/2012	12:53:05 PM	SiCl4 post valve closed
4/6/2012	12:53:05 PM	Bypass valve closed
4/6/2012	12:53:05 PM	Bubbler valve closed
4/6/2012	12:53:05 PM	Helium valve opened
4/6/2012	12:53:05 PM	Main Vac valve opened
4/6/2012	12:53:05 PM	Helium MFC set to  20.000000
4/6/2012	12:53:05 PM	H2 MFC set to  0.000000
4/6/2012	12:53:05 PM	BCl3 MFC set to  0.000000
4/6/2012	12:53:05 PM	PH3 MFC set to  0.000000
4/6/2012	12:53:05 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:53:05 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:53:05 PM	Tube furnace set to 200
4/6/2012	12:53:35 PM	Helium valve closed
4/6/2012	12:53:35 PM	H2 valve closed
4/6/2012	12:53:35 PM	BCl3 valve closed
4/6/2012	12:53:35 PM	PH3 valve closed
4/6/2012	12:53:35 PM	SiCl4 pre valve closed
4/6/2012	12:53:35 PM	SiCl4 post valve closed
4/6/2012	12:53:35 PM	Bypass valve closed
4/6/2012	12:53:35 PM	Bubbler valve closed
4/6/2012	12:53:35 PM	Main Vac valve opened
4/6/2012	12:53:35 PM	Helium MFC set to  0.000000
4/6/2012	12:53:35 PM	H2 MFC set to  0.000000
4/6/2012	12:53:35 PM	BCl3 MFC set to  0.000000
4/6/2012	12:53:35 PM	PH3 MFC set to  0.000000
4/6/2012	12:53:35 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:53:35 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:53:35 PM	Tube furnace set to 200
4/6/2012	12:54:05 PM	H2 valve closed
4/6/2012	12:54:05 PM	BCl3 valve closed
4/6/2012	12:54:05 PM	PH3 valve closed
4/6/2012	12:54:05 PM	SiCl4 pre valve closed
4/6/2012	12:54:05 PM	SiCl4 post valve closed
4/6/2012	12:54:05 PM	Bypass valve closed
4/6/2012	12:54:05 PM	Bubbler valve closed
4/6/2012	12:54:05 PM	Helium valve opened
4/6/2012	12:54:05 PM	Main Vac valve opened
4/6/2012	12:54:05 PM	Helium MFC set to  20.000000
4/6/2012	12:54:05 PM	H2 MFC set to  0.000000
4/6/2012	12:54:05 PM	BCl3 MFC set to  0.000000
4/6/2012	12:54:05 PM	PH3 MFC set to  0.000000
4/6/2012	12:54:05 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:54:05 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:54:05 PM	Tube furnace set to 200
4/6/2012	12:54:35 PM	Helium valve closed
4/6/2012	12:54:35 PM	H2 valve closed
4/6/2012	12:54:35 PM	BCl3 valve closed
4/6/2012	12:54:35 PM	PH3 valve closed
4/6/2012	12:54:35 PM	SiCl4 pre valve closed
4/6/2012	12:54:35 PM	SiCl4 post valve closed
4/6/2012	12:54:35 PM	Bypass valve closed
4/6/2012	12:54:35 PM	Bubbler valve closed
4/6/2012	12:54:35 PM	Main Vac valve opened
4/6/2012	12:54:35 PM	Helium MFC set to  0.000000
4/6/2012	12:54:35 PM	H2 MFC set to  0.000000
4/6/2012	12:54:35 PM	BCl3 MFC set to  0.000000
4/6/2012	12:54:35 PM	PH3 MFC set to  0.000000
4/6/2012	12:54:35 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:54:35 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:54:36 PM	Tube furnace set to 200
4/6/2012	12:55:06 PM	H2 valve closed
4/6/2012	12:55:06 PM	BCl3 valve closed
4/6/2012	12:55:06 PM	PH3 valve closed
4/6/2012	12:55:06 PM	SiCl4 pre valve closed
4/6/2012	12:55:06 PM	SiCl4 post valve closed
4/6/2012	12:55:06 PM	Bypass valve closed
4/6/2012	12:55:06 PM	Bubbler valve closed
4/6/2012	12:55:06 PM	Helium valve opened
4/6/2012	12:55:06 PM	Main Vac valve opened
4/6/2012	12:55:06 PM	Helium MFC set to  20.000000
4/6/2012	12:55:06 PM	H2 MFC set to  0.000000
4/6/2012	12:55:06 PM	BCl3 MFC set to  0.000000
4/6/2012	12:55:06 PM	PH3 MFC set to  0.000000
4/6/2012	12:55:06 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:55:06 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:55:06 PM	Tube furnace set to 200
4/6/2012	12:55:36 PM	Helium valve closed
4/6/2012	12:55:36 PM	H2 valve closed
4/6/2012	12:55:36 PM	BCl3 valve closed
4/6/2012	12:55:36 PM	PH3 valve closed
4/6/2012	12:55:36 PM	SiCl4 pre valve closed
4/6/2012	12:55:36 PM	SiCl4 post valve closed
4/6/2012	12:55:36 PM	Bypass valve closed
4/6/2012	12:55:36 PM	Bubbler valve closed
4/6/2012	12:55:36 PM	Main Vac valve opened
4/6/2012	12:55:36 PM	Helium MFC set to  0.000000
4/6/2012	12:55:36 PM	H2 MFC set to  0.000000
4/6/2012	12:55:36 PM	BCl3 MFC set to  0.000000
4/6/2012	12:55:36 PM	PH3 MFC set to  0.000000
4/6/2012	12:55:36 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:55:36 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:55:36 PM	Tube furnace set to 200
4/6/2012	12:56:06 PM	H2 valve closed
4/6/2012	12:56:06 PM	BCl3 valve closed
4/6/2012	12:56:06 PM	PH3 valve closed
4/6/2012	12:56:06 PM	SiCl4 pre valve closed
4/6/2012	12:56:06 PM	SiCl4 post valve closed
4/6/2012	12:56:06 PM	Bypass valve closed
4/6/2012	12:56:06 PM	Bubbler valve closed
4/6/2012	12:56:06 PM	Helium valve opened
4/6/2012	12:56:06 PM	Main Vac valve opened
4/6/2012	12:56:06 PM	Helium MFC set to  20.000000
4/6/2012	12:56:06 PM	H2 MFC set to  0.000000
4/6/2012	12:56:06 PM	BCl3 MFC set to  0.000000
4/6/2012	12:56:06 PM	PH3 MFC set to  0.000000
4/6/2012	12:56:06 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:56:06 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:56:06 PM	Tube furnace set to 200
4/6/2012	12:56:36 PM	Helium valve closed
4/6/2012	12:56:36 PM	H2 valve closed
4/6/2012	12:56:36 PM	BCl3 valve closed
4/6/2012	12:56:36 PM	PH3 valve closed
4/6/2012	12:56:36 PM	SiCl4 pre valve closed
4/6/2012	12:56:36 PM	SiCl4 post valve closed
4/6/2012	12:56:36 PM	Bypass valve closed
4/6/2012	12:56:36 PM	Bubbler valve closed
4/6/2012	12:56:36 PM	Main Vac valve opened
4/6/2012	12:56:36 PM	Helium MFC set to  0.000000
4/6/2012	12:56:36 PM	H2 MFC set to  0.000000
4/6/2012	12:56:36 PM	BCl3 MFC set to  0.000000
4/6/2012	12:56:36 PM	PH3 MFC set to  0.000000
4/6/2012	12:56:36 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:56:36 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:56:36 PM	Tube furnace set to 200
4/6/2012	12:57:06 PM	H2 valve closed
4/6/2012	12:57:07 PM	BCl3 valve closed
4/6/2012	12:57:07 PM	PH3 valve closed
4/6/2012	12:57:07 PM	SiCl4 pre valve closed
4/6/2012	12:57:07 PM	SiCl4 post valve closed
4/6/2012	12:57:07 PM	Bypass valve closed
4/6/2012	12:57:07 PM	Bubbler valve closed
4/6/2012	12:57:07 PM	Helium valve opened
4/6/2012	12:57:07 PM	Main Vac valve opened
4/6/2012	12:57:07 PM	Helium MFC set to  20.000000
4/6/2012	12:57:07 PM	H2 MFC set to  0.000000
4/6/2012	12:57:07 PM	BCl3 MFC set to  0.000000
4/6/2012	12:57:07 PM	PH3 MFC set to  0.000000
4/6/2012	12:57:07 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:57:07 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:57:07 PM	Tube furnace set to 200
4/6/2012	12:57:37 PM	Helium valve closed
4/6/2012	12:57:37 PM	H2 valve closed
4/6/2012	12:57:37 PM	BCl3 valve closed
4/6/2012	12:57:37 PM	PH3 valve closed
4/6/2012	12:57:37 PM	SiCl4 pre valve closed
4/6/2012	12:57:37 PM	SiCl4 post valve closed
4/6/2012	12:57:37 PM	Bypass valve closed
4/6/2012	12:57:37 PM	Bubbler valve closed
4/6/2012	12:57:37 PM	Main Vac valve opened
4/6/2012	12:57:37 PM	Helium MFC set to  0.000000
4/6/2012	12:57:37 PM	H2 MFC set to  0.000000
4/6/2012	12:57:37 PM	BCl3 MFC set to  0.000000
4/6/2012	12:57:37 PM	PH3 MFC set to  0.000000
4/6/2012	12:57:37 PM	SiCl4 MFC set to  0.000000
4/6/2012	12:57:37 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	12:57:37 PM	Tube furnace set to 0
4/6/2012	12:57:38 PM	Run finished at 12:57 PM
4/6/2012	1:20:10 PM	Main Vac valve closed
4/6/2012	1:20:19 PM	Main Vac valve opened
4/6/2012	1:20:31 PM	Recipe started at 1:20 PM
4/6/2012	1:20:31 PM	Helium valve closed
4/6/2012	1:20:31 PM	H2 valve closed
4/6/2012	1:20:31 PM	BCl3 valve closed
4/6/2012	1:20:31 PM	PH3 valve closed
4/6/2012	1:20:31 PM	SiCl4 pre valve closed
4/6/2012	1:20:31 PM	SiCl4 post valve closed
4/6/2012	1:20:31 PM	Bypass valve closed
4/6/2012	1:20:31 PM	Bubbler valve closed
4/6/2012	1:20:31 PM	Main Vac valve opened
4/6/2012	1:20:31 PM	Helium MFC set to  0.000000
4/6/2012	1:20:31 PM	H2 MFC set to  0.000000
4/6/2012	1:20:31 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:31 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:31 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:31 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:31 PM	Tube furnace set to 0
4/6/2012	1:20:32 PM	H2 valve closed
4/6/2012	1:20:32 PM	BCl3 valve closed
4/6/2012	1:20:32 PM	PH3 valve closed
4/6/2012	1:20:32 PM	SiCl4 pre valve closed
4/6/2012	1:20:32 PM	SiCl4 post valve closed
4/6/2012	1:20:32 PM	Bypass valve closed
4/6/2012	1:20:32 PM	Bubbler valve closed
4/6/2012	1:20:32 PM	Helium valve opened
4/6/2012	1:20:32 PM	Main Vac valve opened
4/6/2012	1:20:32 PM	Helium MFC set to  20.000000
4/6/2012	1:20:32 PM	H2 MFC set to  0.000000
4/6/2012	1:20:32 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:32 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:32 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:32 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:33 PM	Tube furnace set to 0
4/6/2012	1:20:33 PM	Helium valve closed
4/6/2012	1:20:33 PM	H2 valve closed
4/6/2012	1:20:33 PM	BCl3 valve closed
4/6/2012	1:20:33 PM	PH3 valve closed
4/6/2012	1:20:33 PM	SiCl4 pre valve closed
4/6/2012	1:20:33 PM	SiCl4 post valve closed
4/6/2012	1:20:33 PM	Bypass valve closed
4/6/2012	1:20:33 PM	Bubbler valve closed
4/6/2012	1:20:33 PM	Main Vac valve opened
4/6/2012	1:20:33 PM	Helium MFC set to  0.000000
4/6/2012	1:20:33 PM	H2 MFC set to  0.000000
4/6/2012	1:20:33 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:33 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:33 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:33 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:33 PM	Tube furnace set to 0
4/6/2012	1:20:34 PM	H2 valve closed
4/6/2012	1:20:34 PM	BCl3 valve closed
4/6/2012	1:20:34 PM	PH3 valve closed
4/6/2012	1:20:34 PM	SiCl4 pre valve closed
4/6/2012	1:20:34 PM	SiCl4 post valve closed
4/6/2012	1:20:34 PM	Bypass valve closed
4/6/2012	1:20:34 PM	Bubbler valve closed
4/6/2012	1:20:34 PM	Helium valve opened
4/6/2012	1:20:34 PM	Main Vac valve opened
4/6/2012	1:20:34 PM	Helium MFC set to  20.000000
4/6/2012	1:20:34 PM	H2 MFC set to  0.000000
4/6/2012	1:20:34 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:34 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:34 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:34 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:34 PM	Tube furnace set to 0
4/6/2012	1:20:34 PM	Helium valve closed
4/6/2012	1:20:34 PM	H2 valve closed
4/6/2012	1:20:34 PM	BCl3 valve closed
4/6/2012	1:20:34 PM	PH3 valve closed
4/6/2012	1:20:34 PM	SiCl4 pre valve closed
4/6/2012	1:20:34 PM	SiCl4 post valve closed
4/6/2012	1:20:34 PM	Bypass valve closed
4/6/2012	1:20:34 PM	Bubbler valve closed
4/6/2012	1:20:34 PM	Main Vac valve opened
4/6/2012	1:20:34 PM	Helium MFC set to  0.000000
4/6/2012	1:20:34 PM	H2 MFC set to  0.000000
4/6/2012	1:20:34 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:34 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:34 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:34 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:34 PM	Tube furnace set to 0
4/6/2012	1:20:35 PM	H2 valve closed
4/6/2012	1:20:35 PM	BCl3 valve closed
4/6/2012	1:20:35 PM	PH3 valve closed
4/6/2012	1:20:35 PM	SiCl4 pre valve closed
4/6/2012	1:20:35 PM	SiCl4 post valve closed
4/6/2012	1:20:35 PM	Bypass valve closed
4/6/2012	1:20:35 PM	Bubbler valve closed
4/6/2012	1:20:35 PM	Helium valve opened
4/6/2012	1:20:35 PM	Main Vac valve opened
4/6/2012	1:20:35 PM	Helium MFC set to  20.000000
4/6/2012	1:20:35 PM	H2 MFC set to  0.000000
4/6/2012	1:20:35 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:35 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:35 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:35 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:35 PM	Tube furnace set to 0
4/6/2012	1:20:36 PM	Helium valve closed
4/6/2012	1:20:36 PM	H2 valve closed
4/6/2012	1:20:36 PM	BCl3 valve closed
4/6/2012	1:20:36 PM	PH3 valve closed
4/6/2012	1:20:36 PM	SiCl4 pre valve closed
4/6/2012	1:20:36 PM	SiCl4 post valve closed
4/6/2012	1:20:36 PM	Bypass valve closed
4/6/2012	1:20:36 PM	Bubbler valve closed
4/6/2012	1:20:36 PM	Main Vac valve opened
4/6/2012	1:20:36 PM	Helium MFC set to  0.000000
4/6/2012	1:20:36 PM	H2 MFC set to  0.000000
4/6/2012	1:20:36 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:36 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:36 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:36 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:36 PM	Tube furnace set to 0
4/6/2012	1:20:36 PM	H2 valve closed
4/6/2012	1:20:36 PM	BCl3 valve closed
4/6/2012	1:20:36 PM	PH3 valve closed
4/6/2012	1:20:36 PM	SiCl4 pre valve closed
4/6/2012	1:20:36 PM	SiCl4 post valve closed
4/6/2012	1:20:36 PM	Bypass valve closed
4/6/2012	1:20:36 PM	Bubbler valve closed
4/6/2012	1:20:36 PM	Helium valve opened
4/6/2012	1:20:36 PM	Main Vac valve opened
4/6/2012	1:20:36 PM	Helium MFC set to  20.000000
4/6/2012	1:20:36 PM	H2 MFC set to  0.000000
4/6/2012	1:20:36 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:36 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:36 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:36 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:36 PM	Tube furnace set to 0
4/6/2012	1:20:37 PM	Helium valve closed
4/6/2012	1:20:37 PM	H2 valve closed
4/6/2012	1:20:37 PM	BCl3 valve closed
4/6/2012	1:20:37 PM	PH3 valve closed
4/6/2012	1:20:37 PM	SiCl4 pre valve closed
4/6/2012	1:20:37 PM	SiCl4 post valve closed
4/6/2012	1:20:37 PM	Bypass valve closed
4/6/2012	1:20:37 PM	Bubbler valve closed
4/6/2012	1:20:37 PM	Main Vac valve opened
4/6/2012	1:20:37 PM	Helium MFC set to  0.000000
4/6/2012	1:20:37 PM	H2 MFC set to  0.000000
4/6/2012	1:20:37 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:37 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:37 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:37 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:37 PM	Tube furnace set to 0
4/6/2012	1:20:38 PM	H2 valve closed
4/6/2012	1:20:38 PM	BCl3 valve closed
4/6/2012	1:20:38 PM	PH3 valve closed
4/6/2012	1:20:38 PM	SiCl4 pre valve closed
4/6/2012	1:20:38 PM	SiCl4 post valve closed
4/6/2012	1:20:38 PM	Bypass valve closed
4/6/2012	1:20:38 PM	Bubbler valve closed
4/6/2012	1:20:38 PM	Helium valve opened
4/6/2012	1:20:38 PM	Main Vac valve opened
4/6/2012	1:20:38 PM	Helium MFC set to  20.000000
4/6/2012	1:20:38 PM	H2 MFC set to  0.000000
4/6/2012	1:20:38 PM	BCl3 MFC set to  0.000000
4/6/2012	1:20:38 PM	PH3 MFC set to  0.000000
4/6/2012	1:20:38 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:20:38 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:20:38 PM	Tube furnace set to 0
4/6/2012	1:21:08 PM	Helium valve closed
4/6/2012	1:21:08 PM	H2 valve closed
4/6/2012	1:21:08 PM	BCl3 valve closed
4/6/2012	1:21:08 PM	PH3 valve closed
4/6/2012	1:21:08 PM	SiCl4 pre valve closed
4/6/2012	1:21:08 PM	SiCl4 post valve closed
4/6/2012	1:21:08 PM	Bypass valve closed
4/6/2012	1:21:08 PM	Bubbler valve closed
4/6/2012	1:21:08 PM	Main Vac valve opened
4/6/2012	1:21:08 PM	Helium MFC set to  0.000000
4/6/2012	1:21:08 PM	H2 MFC set to  0.000000
4/6/2012	1:21:08 PM	BCl3 MFC set to  0.000000
4/6/2012	1:21:08 PM	PH3 MFC set to  0.000000
4/6/2012	1:21:08 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:21:08 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:21:08 PM	Tube furnace set to 0
4/6/2012	1:21:38 PM	H2 valve closed
4/6/2012	1:21:38 PM	BCl3 valve closed
4/6/2012	1:21:38 PM	PH3 valve closed
4/6/2012	1:21:38 PM	SiCl4 pre valve closed
4/6/2012	1:21:38 PM	SiCl4 post valve closed
4/6/2012	1:21:38 PM	Bypass valve closed
4/6/2012	1:21:38 PM	Bubbler valve closed
4/6/2012	1:21:38 PM	Helium valve opened
4/6/2012	1:21:38 PM	Main Vac valve opened
4/6/2012	1:21:38 PM	Helium MFC set to  20.000000
4/6/2012	1:21:38 PM	H2 MFC set to  0.000000
4/6/2012	1:21:38 PM	BCl3 MFC set to  0.000000
4/6/2012	1:21:38 PM	PH3 MFC set to  0.000000
4/6/2012	1:21:38 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:21:38 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:21:39 PM	Tube furnace set to 0
4/6/2012	1:22:09 PM	Helium valve closed
4/6/2012	1:22:09 PM	H2 valve closed
4/6/2012	1:22:09 PM	BCl3 valve closed
4/6/2012	1:22:09 PM	PH3 valve closed
4/6/2012	1:22:09 PM	SiCl4 pre valve closed
4/6/2012	1:22:09 PM	SiCl4 post valve closed
4/6/2012	1:22:09 PM	Bypass valve closed
4/6/2012	1:22:09 PM	Bubbler valve closed
4/6/2012	1:22:09 PM	Main Vac valve opened
4/6/2012	1:22:09 PM	Helium MFC set to  0.000000
4/6/2012	1:22:09 PM	H2 MFC set to  0.000000
4/6/2012	1:22:09 PM	BCl3 MFC set to  0.000000
4/6/2012	1:22:09 PM	PH3 MFC set to  0.000000
4/6/2012	1:22:09 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:22:09 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:22:09 PM	Tube furnace set to 0
4/6/2012	1:22:39 PM	H2 valve closed
4/6/2012	1:22:39 PM	BCl3 valve closed
4/6/2012	1:22:39 PM	PH3 valve closed
4/6/2012	1:22:39 PM	SiCl4 pre valve closed
4/6/2012	1:22:39 PM	SiCl4 post valve closed
4/6/2012	1:22:39 PM	Bypass valve closed
4/6/2012	1:22:39 PM	Bubbler valve closed
4/6/2012	1:22:39 PM	Helium valve opened
4/6/2012	1:22:39 PM	Main Vac valve opened
4/6/2012	1:22:39 PM	Helium MFC set to  20.000000
4/6/2012	1:22:39 PM	H2 MFC set to  0.000000
4/6/2012	1:22:39 PM	BCl3 MFC set to  0.000000
4/6/2012	1:22:39 PM	PH3 MFC set to  0.000000
4/6/2012	1:22:39 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:22:39 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:22:39 PM	Tube furnace set to 0
4/6/2012	1:23:09 PM	Helium valve closed
4/6/2012	1:23:09 PM	H2 valve closed
4/6/2012	1:23:09 PM	BCl3 valve closed
4/6/2012	1:23:09 PM	PH3 valve closed
4/6/2012	1:23:09 PM	SiCl4 pre valve closed
4/6/2012	1:23:09 PM	SiCl4 post valve closed
4/6/2012	1:23:09 PM	Bypass valve closed
4/6/2012	1:23:09 PM	Bubbler valve closed
4/6/2012	1:23:09 PM	Main Vac valve opened
4/6/2012	1:23:09 PM	Helium MFC set to  0.000000
4/6/2012	1:23:09 PM	H2 MFC set to  0.000000
4/6/2012	1:23:09 PM	BCl3 MFC set to  0.000000
4/6/2012	1:23:09 PM	PH3 MFC set to  0.000000
4/6/2012	1:23:09 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:23:09 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:23:09 PM	Tube furnace set to 0
4/6/2012	1:23:39 PM	H2 valve closed
4/6/2012	1:23:39 PM	BCl3 valve closed
4/6/2012	1:23:39 PM	PH3 valve closed
4/6/2012	1:23:39 PM	SiCl4 pre valve closed
4/6/2012	1:23:39 PM	SiCl4 post valve closed
4/6/2012	1:23:39 PM	Bypass valve closed
4/6/2012	1:23:39 PM	Bubbler valve closed
4/6/2012	1:23:39 PM	Helium valve opened
4/6/2012	1:23:39 PM	Main Vac valve opened
4/6/2012	1:23:39 PM	Helium MFC set to  20.000000
4/6/2012	1:23:39 PM	H2 MFC set to  0.000000
4/6/2012	1:23:39 PM	BCl3 MFC set to  0.000000
4/6/2012	1:23:39 PM	PH3 MFC set to  0.000000
4/6/2012	1:23:39 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:23:39 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:23:40 PM	Tube furnace set to 0
4/6/2012	1:24:10 PM	Helium valve closed
4/6/2012	1:24:10 PM	H2 valve closed
4/6/2012	1:24:10 PM	BCl3 valve closed
4/6/2012	1:24:10 PM	PH3 valve closed
4/6/2012	1:24:10 PM	SiCl4 pre valve closed
4/6/2012	1:24:10 PM	SiCl4 post valve closed
4/6/2012	1:24:10 PM	Bypass valve closed
4/6/2012	1:24:10 PM	Bubbler valve closed
4/6/2012	1:24:10 PM	Main Vac valve opened
4/6/2012	1:24:10 PM	Helium MFC set to  0.000000
4/6/2012	1:24:10 PM	H2 MFC set to  0.000000
4/6/2012	1:24:10 PM	BCl3 MFC set to  0.000000
4/6/2012	1:24:10 PM	PH3 MFC set to  0.000000
4/6/2012	1:24:10 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:24:10 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:24:10 PM	Tube furnace set to 0
4/6/2012	1:24:40 PM	H2 valve closed
4/6/2012	1:24:40 PM	BCl3 valve closed
4/6/2012	1:24:40 PM	PH3 valve closed
4/6/2012	1:24:40 PM	SiCl4 pre valve closed
4/6/2012	1:24:40 PM	SiCl4 post valve closed
4/6/2012	1:24:40 PM	Bypass valve closed
4/6/2012	1:24:40 PM	Bubbler valve closed
4/6/2012	1:24:40 PM	Helium valve opened
4/6/2012	1:24:40 PM	Main Vac valve opened
4/6/2012	1:24:40 PM	Helium MFC set to  20.000000
4/6/2012	1:24:40 PM	H2 MFC set to  0.000000
4/6/2012	1:24:40 PM	BCl3 MFC set to  0.000000
4/6/2012	1:24:40 PM	PH3 MFC set to  0.000000
4/6/2012	1:24:40 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:24:40 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:24:40 PM	Tube furnace set to 0
4/6/2012	1:25:10 PM	Helium valve closed
4/6/2012	1:25:10 PM	H2 valve closed
4/6/2012	1:25:10 PM	BCl3 valve closed
4/6/2012	1:25:10 PM	PH3 valve closed
4/6/2012	1:25:10 PM	SiCl4 pre valve closed
4/6/2012	1:25:10 PM	SiCl4 post valve closed
4/6/2012	1:25:10 PM	Bypass valve closed
4/6/2012	1:25:10 PM	Bubbler valve closed
4/6/2012	1:25:10 PM	Main Vac valve opened
4/6/2012	1:25:10 PM	Helium MFC set to  0.000000
4/6/2012	1:25:10 PM	H2 MFC set to  0.000000
4/6/2012	1:25:10 PM	BCl3 MFC set to  0.000000
4/6/2012	1:25:10 PM	PH3 MFC set to  0.000000
4/6/2012	1:25:10 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:25:10 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:25:10 PM	Tube furnace set to 200
4/6/2012	1:25:40 PM	H2 valve closed
4/6/2012	1:25:40 PM	BCl3 valve closed
4/6/2012	1:25:40 PM	PH3 valve closed
4/6/2012	1:25:40 PM	SiCl4 pre valve closed
4/6/2012	1:25:40 PM	SiCl4 post valve closed
4/6/2012	1:25:40 PM	Bypass valve closed
4/6/2012	1:25:40 PM	Bubbler valve closed
4/6/2012	1:25:40 PM	Helium valve opened
4/6/2012	1:25:40 PM	Main Vac valve opened
4/6/2012	1:25:40 PM	Helium MFC set to  20.000000
4/6/2012	1:25:40 PM	H2 MFC set to  0.000000
4/6/2012	1:25:40 PM	BCl3 MFC set to  0.000000
4/6/2012	1:25:40 PM	PH3 MFC set to  0.000000
4/6/2012	1:25:40 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:25:40 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:25:41 PM	Tube furnace set to 200
4/6/2012	1:26:11 PM	Helium valve closed
4/6/2012	1:26:11 PM	H2 valve closed
4/6/2012	1:26:11 PM	BCl3 valve closed
4/6/2012	1:26:11 PM	PH3 valve closed
4/6/2012	1:26:11 PM	SiCl4 pre valve closed
4/6/2012	1:26:11 PM	SiCl4 post valve closed
4/6/2012	1:26:11 PM	Bypass valve closed
4/6/2012	1:26:11 PM	Bubbler valve closed
4/6/2012	1:26:11 PM	Main Vac valve opened
4/6/2012	1:26:11 PM	Helium MFC set to  0.000000
4/6/2012	1:26:11 PM	H2 MFC set to  0.000000
4/6/2012	1:26:11 PM	BCl3 MFC set to  0.000000
4/6/2012	1:26:11 PM	PH3 MFC set to  0.000000
4/6/2012	1:26:11 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:26:11 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:26:11 PM	Tube furnace set to 200
4/6/2012	1:26:41 PM	H2 valve closed
4/6/2012	1:26:41 PM	BCl3 valve closed
4/6/2012	1:26:41 PM	PH3 valve closed
4/6/2012	1:26:41 PM	SiCl4 pre valve closed
4/6/2012	1:26:41 PM	SiCl4 post valve closed
4/6/2012	1:26:41 PM	Bypass valve closed
4/6/2012	1:26:41 PM	Bubbler valve closed
4/6/2012	1:26:41 PM	Helium valve opened
4/6/2012	1:26:41 PM	Main Vac valve opened
4/6/2012	1:26:41 PM	Helium MFC set to  20.000000
4/6/2012	1:26:41 PM	H2 MFC set to  0.000000
4/6/2012	1:26:41 PM	BCl3 MFC set to  0.000000
4/6/2012	1:26:41 PM	PH3 MFC set to  0.000000
4/6/2012	1:26:41 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:26:41 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:26:41 PM	Tube furnace set to 200
4/6/2012	1:27:11 PM	Helium valve closed
4/6/2012	1:27:11 PM	H2 valve closed
4/6/2012	1:27:11 PM	BCl3 valve closed
4/6/2012	1:27:11 PM	PH3 valve closed
4/6/2012	1:27:11 PM	SiCl4 pre valve closed
4/6/2012	1:27:11 PM	SiCl4 post valve closed
4/6/2012	1:27:11 PM	Bypass valve closed
4/6/2012	1:27:11 PM	Bubbler valve closed
4/6/2012	1:27:11 PM	Main Vac valve opened
4/6/2012	1:27:11 PM	Helium MFC set to  0.000000
4/6/2012	1:27:11 PM	H2 MFC set to  0.000000
4/6/2012	1:27:11 PM	BCl3 MFC set to  0.000000
4/6/2012	1:27:11 PM	PH3 MFC set to  0.000000
4/6/2012	1:27:11 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:27:11 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:27:11 PM	Tube furnace set to 200
4/6/2012	1:27:41 PM	H2 valve closed
4/6/2012	1:27:41 PM	BCl3 valve closed
4/6/2012	1:27:41 PM	PH3 valve closed
4/6/2012	1:27:41 PM	SiCl4 pre valve closed
4/6/2012	1:27:41 PM	SiCl4 post valve closed
4/6/2012	1:27:41 PM	Bypass valve closed
4/6/2012	1:27:41 PM	Bubbler valve closed
4/6/2012	1:27:41 PM	Helium valve opened
4/6/2012	1:27:41 PM	Main Vac valve opened
4/6/2012	1:27:41 PM	Helium MFC set to  20.000000
4/6/2012	1:27:41 PM	H2 MFC set to  0.000000
4/6/2012	1:27:41 PM	BCl3 MFC set to  0.000000
4/6/2012	1:27:41 PM	PH3 MFC set to  0.000000
4/6/2012	1:27:41 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:27:41 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:27:41 PM	Tube furnace set to 200
4/6/2012	1:28:11 PM	Helium valve closed
4/6/2012	1:28:11 PM	H2 valve closed
4/6/2012	1:28:11 PM	BCl3 valve closed
4/6/2012	1:28:11 PM	PH3 valve closed
4/6/2012	1:28:12 PM	SiCl4 pre valve closed
4/6/2012	1:28:12 PM	SiCl4 post valve closed
4/6/2012	1:28:12 PM	Bypass valve closed
4/6/2012	1:28:12 PM	Bubbler valve closed
4/6/2012	1:28:12 PM	Main Vac valve opened
4/6/2012	1:28:12 PM	Helium MFC set to  0.000000
4/6/2012	1:28:12 PM	H2 MFC set to  0.000000
4/6/2012	1:28:12 PM	BCl3 MFC set to  0.000000
4/6/2012	1:28:12 PM	PH3 MFC set to  0.000000
4/6/2012	1:28:12 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:28:12 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:28:12 PM	Tube furnace set to 200
4/6/2012	1:28:42 PM	H2 valve closed
4/6/2012	1:28:42 PM	BCl3 valve closed
4/6/2012	1:28:42 PM	PH3 valve closed
4/6/2012	1:28:42 PM	SiCl4 pre valve closed
4/6/2012	1:28:42 PM	SiCl4 post valve closed
4/6/2012	1:28:42 PM	Bypass valve closed
4/6/2012	1:28:42 PM	Bubbler valve closed
4/6/2012	1:28:42 PM	Helium valve opened
4/6/2012	1:28:42 PM	Main Vac valve opened
4/6/2012	1:28:42 PM	Helium MFC set to  20.000000
4/6/2012	1:28:42 PM	H2 MFC set to  0.000000
4/6/2012	1:28:42 PM	BCl3 MFC set to  0.000000
4/6/2012	1:28:42 PM	PH3 MFC set to  0.000000
4/6/2012	1:28:42 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:28:42 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:28:42 PM	Tube furnace set to 200
4/6/2012	1:29:12 PM	Helium valve closed
4/6/2012	1:29:12 PM	H2 valve closed
4/6/2012	1:29:12 PM	BCl3 valve closed
4/6/2012	1:29:12 PM	PH3 valve closed
4/6/2012	1:29:12 PM	SiCl4 pre valve closed
4/6/2012	1:29:12 PM	SiCl4 post valve closed
4/6/2012	1:29:12 PM	Bypass valve closed
4/6/2012	1:29:12 PM	Bubbler valve closed
4/6/2012	1:29:12 PM	Main Vac valve opened
4/6/2012	1:29:12 PM	Helium MFC set to  0.000000
4/6/2012	1:29:12 PM	H2 MFC set to  0.000000
4/6/2012	1:29:12 PM	BCl3 MFC set to  0.000000
4/6/2012	1:29:12 PM	PH3 MFC set to  0.000000
4/6/2012	1:29:12 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:29:12 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:29:12 PM	Tube furnace set to 200
4/6/2012	1:29:42 PM	H2 valve closed
4/6/2012	1:29:42 PM	BCl3 valve closed
4/6/2012	1:29:42 PM	PH3 valve closed
4/6/2012	1:29:42 PM	SiCl4 pre valve closed
4/6/2012	1:29:42 PM	SiCl4 post valve closed
4/6/2012	1:29:42 PM	Bypass valve closed
4/6/2012	1:29:42 PM	Bubbler valve closed
4/6/2012	1:29:42 PM	Helium valve opened
4/6/2012	1:29:42 PM	Main Vac valve opened
4/6/2012	1:29:42 PM	Helium MFC set to  20.000000
4/6/2012	1:29:42 PM	H2 MFC set to  0.000000
4/6/2012	1:29:42 PM	BCl3 MFC set to  0.000000
4/6/2012	1:29:42 PM	PH3 MFC set to  0.000000
4/6/2012	1:29:42 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:29:42 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:29:42 PM	Tube furnace set to 200
4/6/2012	1:30:12 PM	Helium valve closed
4/6/2012	1:30:12 PM	H2 valve closed
4/6/2012	1:30:12 PM	BCl3 valve closed
4/6/2012	1:30:12 PM	PH3 valve closed
4/6/2012	1:30:12 PM	SiCl4 pre valve closed
4/6/2012	1:30:12 PM	SiCl4 post valve closed
4/6/2012	1:30:12 PM	Bypass valve closed
4/6/2012	1:30:12 PM	Bubbler valve closed
4/6/2012	1:30:12 PM	Main Vac valve opened
4/6/2012	1:30:12 PM	Helium MFC set to  0.000000
4/6/2012	1:30:12 PM	H2 MFC set to  0.000000
4/6/2012	1:30:12 PM	BCl3 MFC set to  0.000000
4/6/2012	1:30:12 PM	PH3 MFC set to  0.000000
4/6/2012	1:30:12 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:30:12 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:30:13 PM	Tube furnace set to 200
4/6/2012	1:30:43 PM	H2 valve closed
4/6/2012	1:30:43 PM	BCl3 valve closed
4/6/2012	1:30:43 PM	PH3 valve closed
4/6/2012	1:30:43 PM	SiCl4 pre valve closed
4/6/2012	1:30:43 PM	SiCl4 post valve closed
4/6/2012	1:30:43 PM	Bypass valve closed
4/6/2012	1:30:43 PM	Bubbler valve closed
4/6/2012	1:30:43 PM	Helium valve opened
4/6/2012	1:30:43 PM	Main Vac valve opened
4/6/2012	1:30:43 PM	Helium MFC set to  20.000000
4/6/2012	1:30:43 PM	H2 MFC set to  0.000000
4/6/2012	1:30:43 PM	BCl3 MFC set to  0.000000
4/6/2012	1:30:43 PM	PH3 MFC set to  0.000000
4/6/2012	1:30:43 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:30:43 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:30:43 PM	Tube furnace set to 200
4/6/2012	1:31:13 PM	Helium valve closed
4/6/2012	1:31:13 PM	H2 valve closed
4/6/2012	1:31:13 PM	BCl3 valve closed
4/6/2012	1:31:13 PM	PH3 valve closed
4/6/2012	1:31:13 PM	SiCl4 pre valve closed
4/6/2012	1:31:13 PM	SiCl4 post valve closed
4/6/2012	1:31:13 PM	Bypass valve closed
4/6/2012	1:31:13 PM	Bubbler valve closed
4/6/2012	1:31:13 PM	Main Vac valve opened
4/6/2012	1:31:13 PM	Helium MFC set to  0.000000
4/6/2012	1:31:13 PM	H2 MFC set to  0.000000
4/6/2012	1:31:13 PM	BCl3 MFC set to  0.000000
4/6/2012	1:31:13 PM	PH3 MFC set to  0.000000
4/6/2012	1:31:13 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:31:13 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:31:13 PM	Tube furnace set to 0
4/6/2012	1:31:14 PM	Run finished at 1:31 PM
4/6/2012	1:32:07 PM	Main Vac valve closed
4/6/2012	1:32:15 PM	Main Vac valve opened
4/6/2012	1:34:05 PM	Recipe started at 1:34 PM
4/6/2012	1:34:05 PM	Helium valve closed
4/6/2012	1:34:05 PM	H2 valve closed
4/6/2012	1:34:05 PM	BCl3 valve closed
4/6/2012	1:34:05 PM	PH3 valve closed
4/6/2012	1:34:05 PM	SiCl4 pre valve closed
4/6/2012	1:34:05 PM	SiCl4 post valve closed
4/6/2012	1:34:05 PM	Main Vac valve closed
4/6/2012	1:34:05 PM	Bypass valve closed
4/6/2012	1:34:05 PM	Bubbler valve closed
4/6/2012	1:34:05 PM	Helium MFC set to  0.000000
4/6/2012	1:34:05 PM	H2 MFC set to  0.000000
4/6/2012	1:34:05 PM	BCl3 MFC set to  0.000000
4/6/2012	1:34:05 PM	PH3 MFC set to  0.000000
4/6/2012	1:34:05 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:34:05 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:34:05 PM	Tube furnace set to 0
4/6/2012	1:34:08 PM	Helium valve closed
4/6/2012	1:34:08 PM	BCl3 valve closed
4/6/2012	1:34:08 PM	PH3 valve closed
4/6/2012	1:34:08 PM	SiCl4 pre valve closed
4/6/2012	1:34:08 PM	SiCl4 post valve closed
4/6/2012	1:34:08 PM	Main Vac valve closed
4/6/2012	1:34:08 PM	Bypass valve closed
4/6/2012	1:34:08 PM	Bubbler valve closed
4/6/2012	1:34:08 PM	H2 valve opened
4/6/2012	1:34:08 PM	Helium MFC set to  0.000000
4/6/2012	1:34:08 PM	H2 MFC set to  500.000000
4/6/2012	1:34:08 PM	BCl3 MFC set to  0.000000
4/6/2012	1:34:08 PM	PH3 MFC set to  0.000000
4/6/2012	1:34:08 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:34:08 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:34:08 PM	Tube furnace set to 0
4/6/2012	1:35:12 PM	Helium valve closed
4/6/2012	1:35:12 PM	BCl3 valve closed
4/6/2012	1:35:12 PM	PH3 valve closed
4/6/2012	1:35:12 PM	SiCl4 pre valve closed
4/6/2012	1:35:12 PM	SiCl4 post valve closed
4/6/2012	1:35:12 PM	Main Vac valve closed
4/6/2012	1:35:12 PM	Bypass valve closed
4/6/2012	1:35:12 PM	H2 valve opened
4/6/2012	1:35:12 PM	Bubbler valve opened
4/6/2012	1:35:12 PM	Helium MFC set to  0.000000
4/6/2012	1:35:12 PM	H2 MFC set to  500.000000
4/6/2012	1:35:12 PM	BCl3 MFC set to  0.000000
4/6/2012	1:35:12 PM	PH3 MFC set to  0.000000
4/6/2012	1:35:12 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:35:12 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:35:12 PM	Tube furnace set to 0
4/6/2012	1:35:13 PM	Helium valve closed
4/6/2012	1:35:13 PM	BCl3 valve closed
4/6/2012	1:35:13 PM	PH3 valve closed
4/6/2012	1:35:13 PM	SiCl4 pre valve closed
4/6/2012	1:35:13 PM	SiCl4 post valve closed
4/6/2012	1:35:13 PM	Main Vac valve closed
4/6/2012	1:35:13 PM	Bypass valve closed
4/6/2012	1:35:13 PM	H2 valve opened
4/6/2012	1:35:13 PM	Bubbler valve opened
4/6/2012	1:35:13 PM	Helium MFC set to  0.000000
4/6/2012	1:35:13 PM	H2 MFC set to  500.000000
4/6/2012	1:35:13 PM	BCl3 MFC set to  0.000000
4/6/2012	1:35:13 PM	PH3 MFC set to  0.000000
4/6/2012	1:35:13 PM	SiCl4 MFC set to  0.000000
4/6/2012	1:35:13 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:35:13 PM	Tube furnace set to 1000
4/6/2012	1:55:13 PM	Helium valve closed
4/6/2012	1:55:13 PM	PH3 valve closed
4/6/2012	1:55:13 PM	Main Vac valve closed
4/6/2012	1:55:13 PM	Bypass valve closed
4/6/2012	1:55:13 PM	H2 valve opened
4/6/2012	1:55:13 PM	BCl3 valve opened
4/6/2012	1:55:13 PM	SiCl4 pre valve opened
4/6/2012	1:55:13 PM	SiCl4 post valve opened
4/6/2012	1:55:13 PM	Bubbler valve opened
4/6/2012	1:55:13 PM	Helium MFC set to  0.000000
4/6/2012	1:55:13 PM	H2 MFC set to  450.000000
4/6/2012	1:55:13 PM	BCl3 MFC set to  1.500000
4/6/2012	1:55:13 PM	PH3 MFC set to  0.000000
4/6/2012	1:55:13 PM	SiCl4 MFC set to  50.000000
4/6/2012	1:55:13 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	1:55:14 PM	Tube furnace set to 1000
4/6/2012	2:12:13 PM	Helium valve closed
4/6/2012	2:12:13 PM	BCl3 valve closed
4/6/2012	2:12:13 PM	PH3 valve closed
4/6/2012	2:12:13 PM	SiCl4 pre valve closed
4/6/2012	2:12:14 PM	SiCl4 post valve closed
4/6/2012	2:12:14 PM	Main Vac valve closed
4/6/2012	2:12:14 PM	Bypass valve closed
4/6/2012	2:12:14 PM	H2 valve opened
4/6/2012	2:12:14 PM	Bubbler valve opened
4/6/2012	2:12:14 PM	Helium MFC set to  0.000000
4/6/2012	2:12:14 PM	H2 MFC set to  500.000000
4/6/2012	2:12:14 PM	BCl3 MFC set to  0.000000
4/6/2012	2:12:14 PM	PH3 MFC set to  0.000000
4/6/2012	2:12:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	2:12:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	2:12:14 PM	Tube furnace set to 950
4/6/2012	2:14:14 PM	Helium valve closed
4/6/2012	2:14:14 PM	BCl3 valve closed
4/6/2012	2:14:14 PM	PH3 valve closed
4/6/2012	2:14:14 PM	SiCl4 pre valve closed
4/6/2012	2:14:14 PM	SiCl4 post valve closed
4/6/2012	2:14:14 PM	Main Vac valve closed
4/6/2012	2:14:14 PM	Bypass valve closed
4/6/2012	2:14:14 PM	H2 valve opened
4/6/2012	2:14:14 PM	Bubbler valve opened
4/6/2012	2:14:14 PM	Helium MFC set to  0.000000
4/6/2012	2:14:14 PM	H2 MFC set to  500.000000
4/6/2012	2:14:14 PM	BCl3 MFC set to  0.000000
4/6/2012	2:14:14 PM	PH3 MFC set to  0.000000
4/6/2012	2:14:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	2:14:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	2:14:14 PM	Tube furnace set to 900
4/6/2012	2:16:14 PM	Helium valve closed
4/6/2012	2:16:14 PM	BCl3 valve closed
4/6/2012	2:16:14 PM	PH3 valve closed
4/6/2012	2:16:14 PM	SiCl4 pre valve closed
4/6/2012	2:16:14 PM	SiCl4 post valve closed
4/6/2012	2:16:14 PM	Main Vac valve closed
4/6/2012	2:16:14 PM	Bypass valve closed
4/6/2012	2:16:14 PM	H2 valve opened
4/6/2012	2:16:14 PM	Bubbler valve opened
4/6/2012	2:16:14 PM	Helium MFC set to  0.000000
4/6/2012	2:16:14 PM	H2 MFC set to  500.000000
4/6/2012	2:16:14 PM	BCl3 MFC set to  0.000000
4/6/2012	2:16:14 PM	PH3 MFC set to  0.000000
4/6/2012	2:16:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	2:16:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	2:16:14 PM	Tube furnace set to 850
4/6/2012	2:18:14 PM	H2 valve closed
4/6/2012	2:18:14 PM	BCl3 valve closed
4/6/2012	2:18:14 PM	PH3 valve closed
4/6/2012	2:18:14 PM	SiCl4 pre valve closed
4/6/2012	2:18:14 PM	SiCl4 post valve closed
4/6/2012	2:18:14 PM	Main Vac valve closed
4/6/2012	2:18:14 PM	Bypass valve closed
4/6/2012	2:18:14 PM	Helium valve opened
4/6/2012	2:18:14 PM	Bubbler valve opened
4/6/2012	2:18:14 PM	Helium MFC set to  500.000000
4/6/2012	2:18:14 PM	H2 MFC set to  0.000000
4/6/2012	2:18:14 PM	BCl3 MFC set to  0.000000
4/6/2012	2:18:14 PM	PH3 MFC set to  0.000000
4/6/2012	2:18:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	2:18:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	2:18:14 PM	Tube furnace set to 800
4/6/2012	2:20:14 PM	H2 valve closed
4/6/2012	2:20:14 PM	BCl3 valve closed
4/6/2012	2:20:14 PM	PH3 valve closed
4/6/2012	2:20:14 PM	SiCl4 pre valve closed
4/6/2012	2:20:14 PM	SiCl4 post valve closed
4/6/2012	2:20:14 PM	Main Vac valve closed
4/6/2012	2:20:14 PM	Bypass valve closed
4/6/2012	2:20:14 PM	Helium valve opened
4/6/2012	2:20:14 PM	Bubbler valve opened
4/6/2012	2:20:14 PM	Helium MFC set to  500.000000
4/6/2012	2:20:14 PM	H2 MFC set to  0.000000
4/6/2012	2:20:14 PM	BCl3 MFC set to  0.000000
4/6/2012	2:20:14 PM	PH3 MFC set to  0.000000
4/6/2012	2:20:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	2:20:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	2:20:15 PM	Tube furnace set to 750
4/6/2012	2:22:15 PM	H2 valve closed
4/6/2012	2:22:15 PM	BCl3 valve closed
4/6/2012	2:22:15 PM	PH3 valve closed
4/6/2012	2:22:15 PM	SiCl4 pre valve closed
4/6/2012	2:22:15 PM	SiCl4 post valve closed
4/6/2012	2:22:15 PM	Main Vac valve closed
4/6/2012	2:22:15 PM	Bypass valve closed
4/6/2012	2:22:15 PM	Helium valve opened
4/6/2012	2:22:15 PM	Bubbler valve opened
4/6/2012	2:22:15 PM	Helium MFC set to  500.000000
4/6/2012	2:22:15 PM	H2 MFC set to  0.000000
4/6/2012	2:22:15 PM	BCl3 MFC set to  0.000000
4/6/2012	2:22:15 PM	PH3 MFC set to  0.000000
4/6/2012	2:22:15 PM	SiCl4 MFC set to  0.000000
4/6/2012	2:22:15 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	2:22:15 PM	Tube furnace set to 0
4/6/2012	2:42:15 PM	Helium valve closed
4/6/2012	2:42:15 PM	H2 valve closed
4/6/2012	2:42:15 PM	BCl3 valve closed
4/6/2012	2:42:15 PM	PH3 valve closed
4/6/2012	2:42:15 PM	SiCl4 pre valve closed
4/6/2012	2:42:15 PM	SiCl4 post valve closed
4/6/2012	2:42:15 PM	Main Vac valve closed
4/6/2012	2:42:15 PM	Bypass valve closed
4/6/2012	2:42:15 PM	Bubbler valve closed
4/6/2012	2:42:15 PM	Helium MFC set to  0.000000
4/6/2012	2:42:15 PM	H2 MFC set to  0.000000
4/6/2012	2:42:15 PM	BCl3 MFC set to  0.000000
4/6/2012	2:42:15 PM	PH3 MFC set to  0.000000
4/6/2012	2:42:15 PM	SiCl4 MFC set to  0.000000
4/6/2012	2:42:15 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	2:42:15 PM	Tube furnace set to 0
4/6/2012	2:42:16 PM	Run finished at 2:42 PM
4/6/2012	3:16:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	3:16:14 PM	Recipe started at 3:16 PM
4/6/2012	3:16:14 PM	Helium valve closed
4/6/2012	3:16:14 PM	H2 valve closed
4/6/2012	3:16:14 PM	BCl3 valve closed
4/6/2012	3:16:14 PM	PH3 valve closed
4/6/2012	3:16:14 PM	SiCl4 pre valve closed
4/6/2012	3:16:14 PM	SiCl4 post valve closed
4/6/2012	3:16:14 PM	Main Vac valve closed
4/6/2012	3:16:14 PM	Bypass valve closed
4/6/2012	3:16:14 PM	Bubbler valve closed
4/6/2012	3:16:14 PM	Helium MFC set to  0.000000
4/6/2012	3:16:14 PM	H2 MFC set to  0.000000
4/6/2012	3:16:14 PM	BCl3 MFC set to  0.000000
4/6/2012	3:16:14 PM	PH3 MFC set to  0.000000
4/6/2012	3:16:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:16:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:16:14 PM	Tube furnace set to 0
4/6/2012	3:16:17 PM	H2 valve closed
4/6/2012	3:16:17 PM	BCl3 valve closed
4/6/2012	3:16:17 PM	PH3 valve closed
4/6/2012	3:16:17 PM	SiCl4 pre valve closed
4/6/2012	3:16:17 PM	SiCl4 post valve closed
4/6/2012	3:16:17 PM	Main Vac valve closed
4/6/2012	3:16:17 PM	Bypass valve closed
4/6/2012	3:16:17 PM	Bubbler valve closed
4/6/2012	3:16:17 PM	Helium valve opened
4/6/2012	3:16:17 PM	Helium MFC set to  500.000000
4/6/2012	3:16:17 PM	H2 MFC set to  0.000000
4/6/2012	3:16:17 PM	BCl3 MFC set to  0.000000
4/6/2012	3:16:17 PM	PH3 MFC set to  0.000000
4/6/2012	3:16:17 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:16:17 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:16:17 PM	Tube furnace set to 0
4/6/2012	3:16:24 PM	Helium valve closed
4/6/2012	3:16:24 PM	H2 valve closed
4/6/2012	3:16:24 PM	BCl3 valve closed
4/6/2012	3:16:24 PM	PH3 valve closed
4/6/2012	3:16:24 PM	SiCl4 pre valve closed
4/6/2012	3:16:24 PM	SiCl4 post valve closed
4/6/2012	3:16:24 PM	Main Vac valve closed
4/6/2012	3:16:24 PM	Bypass valve closed
4/6/2012	3:16:24 PM	Bubbler valve closed
4/6/2012	3:16:24 PM	Helium MFC set to  0.000000
4/6/2012	3:16:24 PM	H2 MFC set to  0.000000
4/6/2012	3:16:24 PM	BCl3 MFC set to  0.000000
4/6/2012	3:16:24 PM	PH3 MFC set to  0.000000
4/6/2012	3:16:24 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:16:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:16:24 PM	Tube furnace set to 0
4/6/2012	3:16:25 PM	Run finished at 3:16 PM
4/6/2012	3:16:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	3:18:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	3:18:43 PM	Recipe started at 3:18 PM
4/6/2012	3:18:43 PM	Helium valve closed
4/6/2012	3:18:43 PM	H2 valve closed
4/6/2012	3:18:43 PM	BCl3 valve closed
4/6/2012	3:18:43 PM	PH3 valve closed
4/6/2012	3:18:43 PM	SiCl4 pre valve closed
4/6/2012	3:18:43 PM	SiCl4 post valve closed
4/6/2012	3:18:43 PM	Main Vac valve closed
4/6/2012	3:18:43 PM	Bubbler valve closed
4/6/2012	3:18:43 PM	Bypass valve opened
4/6/2012	3:18:43 PM	Helium MFC set to  0.000000
4/6/2012	3:18:43 PM	H2 MFC set to  0.000000
4/6/2012	3:18:43 PM	BCl3 MFC set to  0.000000
4/6/2012	3:18:43 PM	PH3 MFC set to  0.000000
4/6/2012	3:18:43 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:18:43 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:18:44 PM	Tube furnace set to 0
4/6/2012	3:19:42 PM	Helium valve closed
4/6/2012	3:19:42 PM	H2 valve closed
4/6/2012	3:19:42 PM	BCl3 valve closed
4/6/2012	3:19:42 PM	PH3 valve closed
4/6/2012	3:19:42 PM	SiCl4 pre valve closed
4/6/2012	3:19:42 PM	SiCl4 post valve closed
4/6/2012	3:19:42 PM	Main Vac valve closed
4/6/2012	3:19:42 PM	Bubbler valve closed
4/6/2012	3:19:42 PM	Bypass valve opened
4/6/2012	3:19:42 PM	Helium MFC set to  0.000000
4/6/2012	3:19:42 PM	H2 MFC set to  0.000000
4/6/2012	3:19:42 PM	BCl3 MFC set to  0.000000
4/6/2012	3:19:42 PM	PH3 MFC set to  0.000000
4/6/2012	3:19:42 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:19:42 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:19:42 PM	Tube furnace set to 0
4/6/2012	3:20:42 PM	Helium valve closed
4/6/2012	3:20:42 PM	H2 valve closed
4/6/2012	3:20:42 PM	BCl3 valve closed
4/6/2012	3:20:42 PM	PH3 valve closed
4/6/2012	3:20:42 PM	SiCl4 pre valve closed
4/6/2012	3:20:42 PM	SiCl4 post valve closed
4/6/2012	3:20:42 PM	Bypass valve closed
4/6/2012	3:20:42 PM	Bubbler valve closed
4/6/2012	3:20:42 PM	Main Vac valve opened
4/6/2012	3:20:42 PM	Helium MFC set to  0.000000
4/6/2012	3:20:42 PM	H2 MFC set to  0.000000
4/6/2012	3:20:42 PM	BCl3 MFC set to  0.000000
4/6/2012	3:20:42 PM	PH3 MFC set to  0.000000
4/6/2012	3:20:42 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:20:42 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:20:42 PM	Tube furnace set to 0
4/6/2012	3:20:43 PM	Run finished at 3:20 PM
4/6/2012	3:20:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	3:21:26 PM	Recipe started at 3:21 PM
4/6/2012	3:21:26 PM	Helium valve closed
4/6/2012	3:21:26 PM	H2 valve closed
4/6/2012	3:21:26 PM	BCl3 valve closed
4/6/2012	3:21:26 PM	PH3 valve closed
4/6/2012	3:21:26 PM	SiCl4 pre valve closed
4/6/2012	3:21:26 PM	SiCl4 post valve closed
4/6/2012	3:21:26 PM	Bypass valve closed
4/6/2012	3:21:26 PM	Bubbler valve closed
4/6/2012	3:21:26 PM	Main Vac valve opened
4/6/2012	3:21:26 PM	Helium MFC set to  0.000000
4/6/2012	3:21:26 PM	H2 MFC set to  0.000000
4/6/2012	3:21:26 PM	BCl3 MFC set to  0.000000
4/6/2012	3:21:26 PM	PH3 MFC set to  0.000000
4/6/2012	3:21:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:21:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:21:26 PM	Tube furnace set to 0
4/6/2012	3:21:56 PM	H2 valve closed
4/6/2012	3:21:56 PM	BCl3 valve closed
4/6/2012	3:21:56 PM	PH3 valve closed
4/6/2012	3:21:56 PM	SiCl4 pre valve closed
4/6/2012	3:21:56 PM	SiCl4 post valve closed
4/6/2012	3:21:56 PM	Bypass valve closed
4/6/2012	3:21:56 PM	Bubbler valve closed
4/6/2012	3:21:56 PM	Helium valve opened
4/6/2012	3:21:56 PM	Main Vac valve opened
4/6/2012	3:21:56 PM	Helium MFC set to  20.000000
4/6/2012	3:21:56 PM	H2 MFC set to  0.000000
4/6/2012	3:21:56 PM	BCl3 MFC set to  0.000000
4/6/2012	3:21:56 PM	PH3 MFC set to  0.000000
4/6/2012	3:21:56 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:21:56 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:21:56 PM	Tube furnace set to 0
4/6/2012	3:22:26 PM	Helium valve closed
4/6/2012	3:22:26 PM	H2 valve closed
4/6/2012	3:22:26 PM	BCl3 valve closed
4/6/2012	3:22:26 PM	PH3 valve closed
4/6/2012	3:22:26 PM	SiCl4 pre valve closed
4/6/2012	3:22:26 PM	SiCl4 post valve closed
4/6/2012	3:22:26 PM	Bypass valve closed
4/6/2012	3:22:26 PM	Bubbler valve closed
4/6/2012	3:22:26 PM	Main Vac valve opened
4/6/2012	3:22:26 PM	Helium MFC set to  0.000000
4/6/2012	3:22:26 PM	H2 MFC set to  0.000000
4/6/2012	3:22:26 PM	BCl3 MFC set to  0.000000
4/6/2012	3:22:26 PM	PH3 MFC set to  0.000000
4/6/2012	3:22:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:22:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:22:26 PM	Tube furnace set to 0
4/6/2012	3:22:56 PM	H2 valve closed
4/6/2012	3:22:57 PM	BCl3 valve closed
4/6/2012	3:22:57 PM	PH3 valve closed
4/6/2012	3:22:57 PM	SiCl4 pre valve closed
4/6/2012	3:22:57 PM	SiCl4 post valve closed
4/6/2012	3:22:57 PM	Bypass valve closed
4/6/2012	3:22:57 PM	Bubbler valve closed
4/6/2012	3:22:57 PM	Helium valve opened
4/6/2012	3:22:57 PM	Main Vac valve opened
4/6/2012	3:22:57 PM	Helium MFC set to  20.000000
4/6/2012	3:22:57 PM	H2 MFC set to  0.000000
4/6/2012	3:22:57 PM	BCl3 MFC set to  0.000000
4/6/2012	3:22:57 PM	PH3 MFC set to  0.000000
4/6/2012	3:22:57 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:22:57 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:22:57 PM	Tube furnace set to 0
4/6/2012	3:23:27 PM	Helium valve closed
4/6/2012	3:23:27 PM	H2 valve closed
4/6/2012	3:23:27 PM	BCl3 valve closed
4/6/2012	3:23:27 PM	PH3 valve closed
4/6/2012	3:23:27 PM	SiCl4 pre valve closed
4/6/2012	3:23:27 PM	SiCl4 post valve closed
4/6/2012	3:23:27 PM	Bypass valve closed
4/6/2012	3:23:27 PM	Bubbler valve closed
4/6/2012	3:23:27 PM	Main Vac valve opened
4/6/2012	3:23:27 PM	Helium MFC set to  0.000000
4/6/2012	3:23:27 PM	H2 MFC set to  0.000000
4/6/2012	3:23:27 PM	BCl3 MFC set to  0.000000
4/6/2012	3:23:27 PM	PH3 MFC set to  0.000000
4/6/2012	3:23:27 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:23:27 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:23:27 PM	Tube furnace set to 0
4/6/2012	3:23:57 PM	H2 valve closed
4/6/2012	3:23:57 PM	BCl3 valve closed
4/6/2012	3:23:57 PM	PH3 valve closed
4/6/2012	3:23:57 PM	SiCl4 pre valve closed
4/6/2012	3:23:57 PM	SiCl4 post valve closed
4/6/2012	3:23:57 PM	Bypass valve closed
4/6/2012	3:23:57 PM	Bubbler valve closed
4/6/2012	3:23:57 PM	Helium valve opened
4/6/2012	3:23:57 PM	Main Vac valve opened
4/6/2012	3:23:57 PM	Helium MFC set to  20.000000
4/6/2012	3:23:57 PM	H2 MFC set to  0.000000
4/6/2012	3:23:57 PM	BCl3 MFC set to  0.000000
4/6/2012	3:23:57 PM	PH3 MFC set to  0.000000
4/6/2012	3:23:57 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:23:57 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:23:57 PM	Tube furnace set to 0
4/6/2012	3:24:27 PM	Helium valve closed
4/6/2012	3:24:27 PM	H2 valve closed
4/6/2012	3:24:27 PM	BCl3 valve closed
4/6/2012	3:24:27 PM	PH3 valve closed
4/6/2012	3:24:27 PM	SiCl4 pre valve closed
4/6/2012	3:24:27 PM	SiCl4 post valve closed
4/6/2012	3:24:27 PM	Bypass valve closed
4/6/2012	3:24:27 PM	Bubbler valve closed
4/6/2012	3:24:27 PM	Main Vac valve opened
4/6/2012	3:24:27 PM	Helium MFC set to  0.000000
4/6/2012	3:24:27 PM	H2 MFC set to  0.000000
4/6/2012	3:24:27 PM	BCl3 MFC set to  0.000000
4/6/2012	3:24:27 PM	PH3 MFC set to  0.000000
4/6/2012	3:24:27 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:24:27 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:24:27 PM	Tube furnace set to 0
4/6/2012	3:24:57 PM	H2 valve closed
4/6/2012	3:24:57 PM	BCl3 valve closed
4/6/2012	3:24:57 PM	PH3 valve closed
4/6/2012	3:24:57 PM	SiCl4 pre valve closed
4/6/2012	3:24:57 PM	SiCl4 post valve closed
4/6/2012	3:24:57 PM	Bypass valve closed
4/6/2012	3:24:57 PM	Bubbler valve closed
4/6/2012	3:24:57 PM	Helium valve opened
4/6/2012	3:24:57 PM	Main Vac valve opened
4/6/2012	3:24:57 PM	Helium MFC set to  20.000000
4/6/2012	3:24:57 PM	H2 MFC set to  0.000000
4/6/2012	3:24:57 PM	BCl3 MFC set to  0.000000
4/6/2012	3:24:57 PM	PH3 MFC set to  0.000000
4/6/2012	3:24:57 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:24:57 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:24:58 PM	Tube furnace set to 0
4/6/2012	3:25:28 PM	Helium valve closed
4/6/2012	3:25:28 PM	H2 valve closed
4/6/2012	3:25:28 PM	BCl3 valve closed
4/6/2012	3:25:28 PM	PH3 valve closed
4/6/2012	3:25:28 PM	SiCl4 pre valve closed
4/6/2012	3:25:28 PM	SiCl4 post valve closed
4/6/2012	3:25:28 PM	Bypass valve closed
4/6/2012	3:25:28 PM	Bubbler valve closed
4/6/2012	3:25:28 PM	Main Vac valve opened
4/6/2012	3:25:28 PM	Helium MFC set to  0.000000
4/6/2012	3:25:28 PM	H2 MFC set to  0.000000
4/6/2012	3:25:28 PM	BCl3 MFC set to  0.000000
4/6/2012	3:25:28 PM	PH3 MFC set to  0.000000
4/6/2012	3:25:28 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:25:28 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:25:28 PM	Tube furnace set to 0
4/6/2012	3:25:58 PM	H2 valve closed
4/6/2012	3:25:58 PM	BCl3 valve closed
4/6/2012	3:25:58 PM	PH3 valve closed
4/6/2012	3:25:58 PM	SiCl4 pre valve closed
4/6/2012	3:25:58 PM	SiCl4 post valve closed
4/6/2012	3:25:58 PM	Bypass valve closed
4/6/2012	3:25:58 PM	Bubbler valve closed
4/6/2012	3:25:58 PM	Helium valve opened
4/6/2012	3:25:58 PM	Main Vac valve opened
4/6/2012	3:25:58 PM	Helium MFC set to  20.000000
4/6/2012	3:25:58 PM	H2 MFC set to  0.000000
4/6/2012	3:25:58 PM	BCl3 MFC set to  0.000000
4/6/2012	3:25:58 PM	PH3 MFC set to  0.000000
4/6/2012	3:25:58 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:25:58 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:25:58 PM	Tube furnace set to 0
4/6/2012	3:26:28 PM	Helium valve closed
4/6/2012	3:26:28 PM	H2 valve closed
4/6/2012	3:26:28 PM	BCl3 valve closed
4/6/2012	3:26:28 PM	PH3 valve closed
4/6/2012	3:26:28 PM	SiCl4 pre valve closed
4/6/2012	3:26:28 PM	SiCl4 post valve closed
4/6/2012	3:26:28 PM	Bypass valve closed
4/6/2012	3:26:28 PM	Bubbler valve closed
4/6/2012	3:26:28 PM	Main Vac valve opened
4/6/2012	3:26:28 PM	Helium MFC set to  0.000000
4/6/2012	3:26:28 PM	H2 MFC set to  0.000000
4/6/2012	3:26:28 PM	BCl3 MFC set to  0.000000
4/6/2012	3:26:28 PM	PH3 MFC set to  0.000000
4/6/2012	3:26:28 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:26:28 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:26:28 PM	Tube furnace set to 0
4/6/2012	3:26:58 PM	H2 valve closed
4/6/2012	3:26:58 PM	BCl3 valve closed
4/6/2012	3:26:58 PM	PH3 valve closed
4/6/2012	3:26:58 PM	SiCl4 pre valve closed
4/6/2012	3:26:58 PM	SiCl4 post valve closed
4/6/2012	3:26:58 PM	Bypass valve closed
4/6/2012	3:26:58 PM	Bubbler valve closed
4/6/2012	3:26:58 PM	Helium valve opened
4/6/2012	3:26:58 PM	Main Vac valve opened
4/6/2012	3:26:58 PM	Helium MFC set to  20.000000
4/6/2012	3:26:58 PM	H2 MFC set to  0.000000
4/6/2012	3:26:58 PM	BCl3 MFC set to  0.000000
4/6/2012	3:26:58 PM	PH3 MFC set to  0.000000
4/6/2012	3:26:58 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:26:58 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:26:59 PM	Tube furnace set to 0
4/6/2012	3:27:29 PM	Helium valve closed
4/6/2012	3:27:29 PM	H2 valve closed
4/6/2012	3:27:29 PM	BCl3 valve closed
4/6/2012	3:27:29 PM	PH3 valve closed
4/6/2012	3:27:29 PM	SiCl4 pre valve closed
4/6/2012	3:27:29 PM	SiCl4 post valve closed
4/6/2012	3:27:29 PM	Bypass valve closed
4/6/2012	3:27:29 PM	Bubbler valve closed
4/6/2012	3:27:29 PM	Main Vac valve opened
4/6/2012	3:27:29 PM	Helium MFC set to  0.000000
4/6/2012	3:27:29 PM	H2 MFC set to  0.000000
4/6/2012	3:27:29 PM	BCl3 MFC set to  0.000000
4/6/2012	3:27:29 PM	PH3 MFC set to  0.000000
4/6/2012	3:27:29 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:27:29 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:27:29 PM	Tube furnace set to 0
4/6/2012	3:27:59 PM	H2 valve closed
4/6/2012	3:27:59 PM	BCl3 valve closed
4/6/2012	3:27:59 PM	PH3 valve closed
4/6/2012	3:27:59 PM	SiCl4 pre valve closed
4/6/2012	3:27:59 PM	SiCl4 post valve closed
4/6/2012	3:27:59 PM	Bypass valve closed
4/6/2012	3:27:59 PM	Bubbler valve closed
4/6/2012	3:27:59 PM	Helium valve opened
4/6/2012	3:27:59 PM	Main Vac valve opened
4/6/2012	3:27:59 PM	Helium MFC set to  20.000000
4/6/2012	3:27:59 PM	H2 MFC set to  0.000000
4/6/2012	3:27:59 PM	BCl3 MFC set to  0.000000
4/6/2012	3:27:59 PM	PH3 MFC set to  0.000000
4/6/2012	3:27:59 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:27:59 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:27:59 PM	Tube furnace set to 0
4/6/2012	3:28:29 PM	Helium valve closed
4/6/2012	3:28:29 PM	H2 valve closed
4/6/2012	3:28:29 PM	BCl3 valve closed
4/6/2012	3:28:29 PM	PH3 valve closed
4/6/2012	3:28:29 PM	SiCl4 pre valve closed
4/6/2012	3:28:29 PM	SiCl4 post valve closed
4/6/2012	3:28:29 PM	Bypass valve closed
4/6/2012	3:28:29 PM	Bubbler valve closed
4/6/2012	3:28:29 PM	Main Vac valve opened
4/6/2012	3:28:29 PM	Helium MFC set to  0.000000
4/6/2012	3:28:29 PM	H2 MFC set to  0.000000
4/6/2012	3:28:29 PM	BCl3 MFC set to  0.000000
4/6/2012	3:28:29 PM	PH3 MFC set to  0.000000
4/6/2012	3:28:29 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:28:29 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:28:29 PM	Tube furnace set to 0
4/6/2012	3:28:59 PM	H2 valve closed
4/6/2012	3:28:59 PM	BCl3 valve closed
4/6/2012	3:28:59 PM	PH3 valve closed
4/6/2012	3:28:59 PM	SiCl4 pre valve closed
4/6/2012	3:28:59 PM	SiCl4 post valve closed
4/6/2012	3:28:59 PM	Bypass valve closed
4/6/2012	3:28:59 PM	Bubbler valve closed
4/6/2012	3:28:59 PM	Helium valve opened
4/6/2012	3:28:59 PM	Main Vac valve opened
4/6/2012	3:28:59 PM	Helium MFC set to  20.000000
4/6/2012	3:28:59 PM	H2 MFC set to  0.000000
4/6/2012	3:28:59 PM	BCl3 MFC set to  0.000000
4/6/2012	3:28:59 PM	PH3 MFC set to  0.000000
4/6/2012	3:28:59 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:28:59 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:29:00 PM	Tube furnace set to 0
4/6/2012	3:29:30 PM	Helium valve closed
4/6/2012	3:29:30 PM	H2 valve closed
4/6/2012	3:29:30 PM	BCl3 valve closed
4/6/2012	3:29:30 PM	PH3 valve closed
4/6/2012	3:29:30 PM	SiCl4 pre valve closed
4/6/2012	3:29:30 PM	SiCl4 post valve closed
4/6/2012	3:29:30 PM	Bypass valve closed
4/6/2012	3:29:30 PM	Bubbler valve closed
4/6/2012	3:29:30 PM	Main Vac valve opened
4/6/2012	3:29:30 PM	Helium MFC set to  0.000000
4/6/2012	3:29:30 PM	H2 MFC set to  0.000000
4/6/2012	3:29:30 PM	BCl3 MFC set to  0.000000
4/6/2012	3:29:30 PM	PH3 MFC set to  0.000000
4/6/2012	3:29:30 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:29:30 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:29:30 PM	Tube furnace set to 0
4/6/2012	3:30:00 PM	H2 valve closed
4/6/2012	3:30:00 PM	BCl3 valve closed
4/6/2012	3:30:00 PM	PH3 valve closed
4/6/2012	3:30:00 PM	SiCl4 pre valve closed
4/6/2012	3:30:00 PM	SiCl4 post valve closed
4/6/2012	3:30:00 PM	Bypass valve closed
4/6/2012	3:30:00 PM	Bubbler valve closed
4/6/2012	3:30:00 PM	Helium valve opened
4/6/2012	3:30:00 PM	Main Vac valve opened
4/6/2012	3:30:00 PM	Helium MFC set to  20.000000
4/6/2012	3:30:00 PM	H2 MFC set to  0.000000
4/6/2012	3:30:00 PM	BCl3 MFC set to  0.000000
4/6/2012	3:30:00 PM	PH3 MFC set to  0.000000
4/6/2012	3:30:00 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:30:00 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:30:00 PM	Tube furnace set to 0
4/6/2012	3:30:30 PM	Helium valve closed
4/6/2012	3:30:30 PM	H2 valve closed
4/6/2012	3:30:30 PM	BCl3 valve closed
4/6/2012	3:30:30 PM	PH3 valve closed
4/6/2012	3:30:30 PM	SiCl4 pre valve closed
4/6/2012	3:30:30 PM	SiCl4 post valve closed
4/6/2012	3:30:30 PM	Bypass valve closed
4/6/2012	3:30:30 PM	Bubbler valve closed
4/6/2012	3:30:30 PM	Main Vac valve opened
4/6/2012	3:30:30 PM	Helium MFC set to  0.000000
4/6/2012	3:30:30 PM	H2 MFC set to  0.000000
4/6/2012	3:30:30 PM	BCl3 MFC set to  0.000000
4/6/2012	3:30:30 PM	PH3 MFC set to  0.000000
4/6/2012	3:30:30 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:30:30 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:30:30 PM	Tube furnace set to 200
4/6/2012	3:31:00 PM	H2 valve closed
4/6/2012	3:31:00 PM	BCl3 valve closed
4/6/2012	3:31:00 PM	PH3 valve closed
4/6/2012	3:31:00 PM	SiCl4 pre valve closed
4/6/2012	3:31:00 PM	SiCl4 post valve closed
4/6/2012	3:31:00 PM	Bypass valve closed
4/6/2012	3:31:00 PM	Bubbler valve closed
4/6/2012	3:31:00 PM	Helium valve opened
4/6/2012	3:31:00 PM	Main Vac valve opened
4/6/2012	3:31:00 PM	Helium MFC set to  20.000000
4/6/2012	3:31:00 PM	H2 MFC set to  0.000000
4/6/2012	3:31:00 PM	BCl3 MFC set to  0.000000
4/6/2012	3:31:00 PM	PH3 MFC set to  0.000000
4/6/2012	3:31:00 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:31:00 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:31:00 PM	Tube furnace set to 200
4/6/2012	3:31:30 PM	Helium valve closed
4/6/2012	3:31:30 PM	H2 valve closed
4/6/2012	3:31:31 PM	BCl3 valve closed
4/6/2012	3:31:31 PM	PH3 valve closed
4/6/2012	3:31:31 PM	SiCl4 pre valve closed
4/6/2012	3:31:31 PM	SiCl4 post valve closed
4/6/2012	3:31:31 PM	Bypass valve closed
4/6/2012	3:31:31 PM	Bubbler valve closed
4/6/2012	3:31:31 PM	Main Vac valve opened
4/6/2012	3:31:31 PM	Helium MFC set to  0.000000
4/6/2012	3:31:31 PM	H2 MFC set to  0.000000
4/6/2012	3:31:31 PM	BCl3 MFC set to  0.000000
4/6/2012	3:31:31 PM	PH3 MFC set to  0.000000
4/6/2012	3:31:31 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:31:31 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:31:31 PM	Tube furnace set to 200
4/6/2012	3:32:01 PM	H2 valve closed
4/6/2012	3:32:01 PM	BCl3 valve closed
4/6/2012	3:32:01 PM	PH3 valve closed
4/6/2012	3:32:01 PM	SiCl4 pre valve closed
4/6/2012	3:32:01 PM	SiCl4 post valve closed
4/6/2012	3:32:01 PM	Bypass valve closed
4/6/2012	3:32:01 PM	Bubbler valve closed
4/6/2012	3:32:01 PM	Helium valve opened
4/6/2012	3:32:01 PM	Main Vac valve opened
4/6/2012	3:32:01 PM	Helium MFC set to  20.000000
4/6/2012	3:32:01 PM	H2 MFC set to  0.000000
4/6/2012	3:32:01 PM	BCl3 MFC set to  0.000000
4/6/2012	3:32:01 PM	PH3 MFC set to  0.000000
4/6/2012	3:32:01 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:32:01 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:32:01 PM	Tube furnace set to 200
4/6/2012	3:32:31 PM	Helium valve closed
4/6/2012	3:32:31 PM	H2 valve closed
4/6/2012	3:32:31 PM	BCl3 valve closed
4/6/2012	3:32:31 PM	PH3 valve closed
4/6/2012	3:32:31 PM	SiCl4 pre valve closed
4/6/2012	3:32:31 PM	SiCl4 post valve closed
4/6/2012	3:32:31 PM	Bypass valve closed
4/6/2012	3:32:31 PM	Bubbler valve closed
4/6/2012	3:32:31 PM	Main Vac valve opened
4/6/2012	3:32:31 PM	Helium MFC set to  0.000000
4/6/2012	3:32:31 PM	H2 MFC set to  0.000000
4/6/2012	3:32:31 PM	BCl3 MFC set to  0.000000
4/6/2012	3:32:31 PM	PH3 MFC set to  0.000000
4/6/2012	3:32:31 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:32:31 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:32:31 PM	Tube furnace set to 200
4/6/2012	3:33:01 PM	H2 valve closed
4/6/2012	3:33:01 PM	BCl3 valve closed
4/6/2012	3:33:01 PM	PH3 valve closed
4/6/2012	3:33:01 PM	SiCl4 pre valve closed
4/6/2012	3:33:01 PM	SiCl4 post valve closed
4/6/2012	3:33:01 PM	Bypass valve closed
4/6/2012	3:33:01 PM	Bubbler valve closed
4/6/2012	3:33:01 PM	Helium valve opened
4/6/2012	3:33:01 PM	Main Vac valve opened
4/6/2012	3:33:01 PM	Helium MFC set to  20.000000
4/6/2012	3:33:01 PM	H2 MFC set to  0.000000
4/6/2012	3:33:01 PM	BCl3 MFC set to  0.000000
4/6/2012	3:33:01 PM	PH3 MFC set to  0.000000
4/6/2012	3:33:01 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:33:01 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:33:01 PM	Tube furnace set to 200
4/6/2012	3:33:31 PM	Helium valve closed
4/6/2012	3:33:31 PM	H2 valve closed
4/6/2012	3:33:31 PM	BCl3 valve closed
4/6/2012	3:33:31 PM	PH3 valve closed
4/6/2012	3:33:31 PM	SiCl4 pre valve closed
4/6/2012	3:33:31 PM	SiCl4 post valve closed
4/6/2012	3:33:31 PM	Bypass valve closed
4/6/2012	3:33:31 PM	Bubbler valve closed
4/6/2012	3:33:31 PM	Main Vac valve opened
4/6/2012	3:33:31 PM	Helium MFC set to  0.000000
4/6/2012	3:33:31 PM	H2 MFC set to  0.000000
4/6/2012	3:33:31 PM	BCl3 MFC set to  0.000000
4/6/2012	3:33:31 PM	PH3 MFC set to  0.000000
4/6/2012	3:33:31 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:33:31 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:33:32 PM	Tube furnace set to 200
4/6/2012	3:34:02 PM	H2 valve closed
4/6/2012	3:34:02 PM	BCl3 valve closed
4/6/2012	3:34:02 PM	PH3 valve closed
4/6/2012	3:34:02 PM	SiCl4 pre valve closed
4/6/2012	3:34:02 PM	SiCl4 post valve closed
4/6/2012	3:34:02 PM	Bypass valve closed
4/6/2012	3:34:02 PM	Bubbler valve closed
4/6/2012	3:34:02 PM	Helium valve opened
4/6/2012	3:34:02 PM	Main Vac valve opened
4/6/2012	3:34:02 PM	Helium MFC set to  20.000000
4/6/2012	3:34:02 PM	H2 MFC set to  0.000000
4/6/2012	3:34:02 PM	BCl3 MFC set to  0.000000
4/6/2012	3:34:02 PM	PH3 MFC set to  0.000000
4/6/2012	3:34:02 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:34:02 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:34:02 PM	Tube furnace set to 200
4/6/2012	3:34:32 PM	Helium valve closed
4/6/2012	3:34:32 PM	H2 valve closed
4/6/2012	3:34:32 PM	BCl3 valve closed
4/6/2012	3:34:32 PM	PH3 valve closed
4/6/2012	3:34:32 PM	SiCl4 pre valve closed
4/6/2012	3:34:32 PM	SiCl4 post valve closed
4/6/2012	3:34:32 PM	Bypass valve closed
4/6/2012	3:34:32 PM	Bubbler valve closed
4/6/2012	3:34:32 PM	Main Vac valve opened
4/6/2012	3:34:32 PM	Helium MFC set to  0.000000
4/6/2012	3:34:32 PM	H2 MFC set to  0.000000
4/6/2012	3:34:32 PM	BCl3 MFC set to  0.000000
4/6/2012	3:34:32 PM	PH3 MFC set to  0.000000
4/6/2012	3:34:32 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:34:32 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:34:32 PM	Tube furnace set to 200
4/6/2012	3:35:02 PM	H2 valve closed
4/6/2012	3:35:02 PM	BCl3 valve closed
4/6/2012	3:35:02 PM	PH3 valve closed
4/6/2012	3:35:02 PM	SiCl4 pre valve closed
4/6/2012	3:35:02 PM	SiCl4 post valve closed
4/6/2012	3:35:02 PM	Bypass valve closed
4/6/2012	3:35:02 PM	Bubbler valve closed
4/6/2012	3:35:02 PM	Helium valve opened
4/6/2012	3:35:02 PM	Main Vac valve opened
4/6/2012	3:35:02 PM	Helium MFC set to  20.000000
4/6/2012	3:35:02 PM	H2 MFC set to  0.000000
4/6/2012	3:35:02 PM	BCl3 MFC set to  0.000000
4/6/2012	3:35:02 PM	PH3 MFC set to  0.000000
4/6/2012	3:35:02 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:35:02 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:35:02 PM	Tube furnace set to 200
4/6/2012	3:35:04 PM	Helium valve closed
4/6/2012	3:35:04 PM	H2 valve closed
4/6/2012	3:35:04 PM	BCl3 valve closed
4/6/2012	3:35:04 PM	PH3 valve closed
4/6/2012	3:35:04 PM	SiCl4 pre valve closed
4/6/2012	3:35:04 PM	SiCl4 post valve closed
4/6/2012	3:35:04 PM	Bypass valve closed
4/6/2012	3:35:04 PM	Bubbler valve closed
4/6/2012	3:35:04 PM	Main Vac valve opened
4/6/2012	3:35:04 PM	Helium MFC set to  0.000000
4/6/2012	3:35:04 PM	H2 MFC set to  0.000000
4/6/2012	3:35:04 PM	BCl3 MFC set to  0.000000
4/6/2012	3:35:04 PM	PH3 MFC set to  0.000000
4/6/2012	3:35:04 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:35:04 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:35:04 PM	Tube furnace set to 200
4/6/2012	3:35:04 PM	H2 valve closed
4/6/2012	3:35:04 PM	BCl3 valve closed
4/6/2012	3:35:04 PM	PH3 valve closed
4/6/2012	3:35:04 PM	SiCl4 pre valve closed
4/6/2012	3:35:04 PM	SiCl4 post valve closed
4/6/2012	3:35:04 PM	Bypass valve closed
4/6/2012	3:35:04 PM	Bubbler valve closed
4/6/2012	3:35:04 PM	Helium valve opened
4/6/2012	3:35:04 PM	Main Vac valve opened
4/6/2012	3:35:04 PM	Helium MFC set to  20.000000
4/6/2012	3:35:04 PM	H2 MFC set to  0.000000
4/6/2012	3:35:04 PM	BCl3 MFC set to  0.000000
4/6/2012	3:35:04 PM	PH3 MFC set to  0.000000
4/6/2012	3:35:04 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:35:04 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:35:05 PM	Tube furnace set to 200
4/6/2012	3:35:35 PM	Helium valve closed
4/6/2012	3:35:35 PM	H2 valve closed
4/6/2012	3:35:35 PM	BCl3 valve closed
4/6/2012	3:35:35 PM	PH3 valve closed
4/6/2012	3:35:35 PM	SiCl4 pre valve closed
4/6/2012	3:35:35 PM	SiCl4 post valve closed
4/6/2012	3:35:35 PM	Bypass valve closed
4/6/2012	3:35:35 PM	Bubbler valve closed
4/6/2012	3:35:35 PM	Main Vac valve opened
4/6/2012	3:35:35 PM	Helium MFC set to  0.000000
4/6/2012	3:35:35 PM	H2 MFC set to  0.000000
4/6/2012	3:35:35 PM	BCl3 MFC set to  0.000000
4/6/2012	3:35:35 PM	PH3 MFC set to  0.000000
4/6/2012	3:35:35 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:35:35 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:35:35 PM	Tube furnace set to 0
4/6/2012	3:35:36 PM	Run finished at 3:35 PM
4/6/2012	3:36:13 PM	Recipe started at 3:36 PM
4/6/2012	3:36:13 PM	Helium valve closed
4/6/2012	3:36:13 PM	H2 valve closed
4/6/2012	3:36:13 PM	BCl3 valve closed
4/6/2012	3:36:13 PM	PH3 valve closed
4/6/2012	3:36:13 PM	SiCl4 pre valve closed
4/6/2012	3:36:13 PM	SiCl4 post valve closed
4/6/2012	3:36:13 PM	Bypass valve closed
4/6/2012	3:36:13 PM	Bubbler valve closed
4/6/2012	3:36:13 PM	Main Vac valve opened
4/6/2012	3:36:13 PM	Helium MFC set to  0.000000
4/6/2012	3:36:13 PM	H2 MFC set to  0.000000
4/6/2012	3:36:13 PM	BCl3 MFC set to  0.000000
4/6/2012	3:36:13 PM	PH3 MFC set to  0.000000
4/6/2012	3:36:13 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:36:13 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:36:14 PM	Tube furnace set to 0
4/6/2012	3:36:44 PM	H2 valve closed
4/6/2012	3:36:44 PM	BCl3 valve closed
4/6/2012	3:36:44 PM	PH3 valve closed
4/6/2012	3:36:44 PM	SiCl4 pre valve closed
4/6/2012	3:36:44 PM	SiCl4 post valve closed
4/6/2012	3:36:44 PM	Bypass valve closed
4/6/2012	3:36:44 PM	Bubbler valve closed
4/6/2012	3:36:44 PM	Helium valve opened
4/6/2012	3:36:44 PM	Main Vac valve opened
4/6/2012	3:36:44 PM	Helium MFC set to  20.000000
4/6/2012	3:36:44 PM	H2 MFC set to  0.000000
4/6/2012	3:36:44 PM	BCl3 MFC set to  0.000000
4/6/2012	3:36:44 PM	PH3 MFC set to  0.000000
4/6/2012	3:36:44 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:36:44 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:36:44 PM	Tube furnace set to 0
4/6/2012	3:37:14 PM	Helium valve closed
4/6/2012	3:37:14 PM	H2 valve closed
4/6/2012	3:37:14 PM	BCl3 valve closed
4/6/2012	3:37:14 PM	PH3 valve closed
4/6/2012	3:37:14 PM	SiCl4 pre valve closed
4/6/2012	3:37:14 PM	SiCl4 post valve closed
4/6/2012	3:37:14 PM	Bypass valve closed
4/6/2012	3:37:14 PM	Bubbler valve closed
4/6/2012	3:37:14 PM	Main Vac valve opened
4/6/2012	3:37:14 PM	Helium MFC set to  0.000000
4/6/2012	3:37:14 PM	H2 MFC set to  0.000000
4/6/2012	3:37:14 PM	BCl3 MFC set to  0.000000
4/6/2012	3:37:14 PM	PH3 MFC set to  0.000000
4/6/2012	3:37:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:37:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:37:14 PM	Tube furnace set to 0
4/6/2012	3:37:44 PM	H2 valve closed
4/6/2012	3:37:44 PM	BCl3 valve closed
4/6/2012	3:37:44 PM	PH3 valve closed
4/6/2012	3:37:44 PM	SiCl4 pre valve closed
4/6/2012	3:37:44 PM	SiCl4 post valve closed
4/6/2012	3:37:44 PM	Bypass valve closed
4/6/2012	3:37:44 PM	Bubbler valve closed
4/6/2012	3:37:44 PM	Helium valve opened
4/6/2012	3:37:44 PM	Main Vac valve opened
4/6/2012	3:37:44 PM	Helium MFC set to  20.000000
4/6/2012	3:37:44 PM	H2 MFC set to  0.000000
4/6/2012	3:37:44 PM	BCl3 MFC set to  0.000000
4/6/2012	3:37:44 PM	PH3 MFC set to  0.000000
4/6/2012	3:37:44 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:37:44 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:37:44 PM	Tube furnace set to 0
4/6/2012	3:38:14 PM	Helium valve closed
4/6/2012	3:38:14 PM	H2 valve closed
4/6/2012	3:38:14 PM	BCl3 valve closed
4/6/2012	3:38:14 PM	PH3 valve closed
4/6/2012	3:38:14 PM	SiCl4 pre valve closed
4/6/2012	3:38:14 PM	SiCl4 post valve closed
4/6/2012	3:38:14 PM	Bypass valve closed
4/6/2012	3:38:14 PM	Bubbler valve closed
4/6/2012	3:38:14 PM	Main Vac valve opened
4/6/2012	3:38:14 PM	Helium MFC set to  0.000000
4/6/2012	3:38:14 PM	H2 MFC set to  0.000000
4/6/2012	3:38:14 PM	BCl3 MFC set to  0.000000
4/6/2012	3:38:14 PM	PH3 MFC set to  0.000000
4/6/2012	3:38:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:38:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:38:15 PM	Tube furnace set to 0
4/6/2012	3:38:45 PM	H2 valve closed
4/6/2012	3:38:45 PM	BCl3 valve closed
4/6/2012	3:38:45 PM	PH3 valve closed
4/6/2012	3:38:45 PM	SiCl4 pre valve closed
4/6/2012	3:38:45 PM	SiCl4 post valve closed
4/6/2012	3:38:45 PM	Bypass valve closed
4/6/2012	3:38:45 PM	Bubbler valve closed
4/6/2012	3:38:45 PM	Helium valve opened
4/6/2012	3:38:45 PM	Main Vac valve opened
4/6/2012	3:38:45 PM	Helium MFC set to  20.000000
4/6/2012	3:38:45 PM	H2 MFC set to  0.000000
4/6/2012	3:38:45 PM	BCl3 MFC set to  0.000000
4/6/2012	3:38:45 PM	PH3 MFC set to  0.000000
4/6/2012	3:38:45 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:38:45 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:38:45 PM	Tube furnace set to 0
4/6/2012	3:39:15 PM	Helium valve closed
4/6/2012	3:39:15 PM	H2 valve closed
4/6/2012	3:39:15 PM	BCl3 valve closed
4/6/2012	3:39:15 PM	PH3 valve closed
4/6/2012	3:39:15 PM	SiCl4 pre valve closed
4/6/2012	3:39:15 PM	SiCl4 post valve closed
4/6/2012	3:39:15 PM	Bypass valve closed
4/6/2012	3:39:15 PM	Bubbler valve closed
4/6/2012	3:39:15 PM	Main Vac valve opened
4/6/2012	3:39:15 PM	Helium MFC set to  0.000000
4/6/2012	3:39:15 PM	H2 MFC set to  0.000000
4/6/2012	3:39:15 PM	BCl3 MFC set to  0.000000
4/6/2012	3:39:15 PM	PH3 MFC set to  0.000000
4/6/2012	3:39:15 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:39:15 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:39:15 PM	Tube furnace set to 0
4/6/2012	3:39:45 PM	H2 valve closed
4/6/2012	3:39:45 PM	BCl3 valve closed
4/6/2012	3:39:45 PM	PH3 valve closed
4/6/2012	3:39:45 PM	SiCl4 pre valve closed
4/6/2012	3:39:45 PM	SiCl4 post valve closed
4/6/2012	3:39:45 PM	Bypass valve closed
4/6/2012	3:39:45 PM	Bubbler valve closed
4/6/2012	3:39:45 PM	Helium valve opened
4/6/2012	3:39:45 PM	Main Vac valve opened
4/6/2012	3:39:45 PM	Helium MFC set to  20.000000
4/6/2012	3:39:45 PM	H2 MFC set to  0.000000
4/6/2012	3:39:45 PM	BCl3 MFC set to  0.000000
4/6/2012	3:39:45 PM	PH3 MFC set to  0.000000
4/6/2012	3:39:45 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:39:45 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:39:45 PM	Tube furnace set to 0
4/6/2012	3:40:15 PM	Helium valve closed
4/6/2012	3:40:15 PM	H2 valve closed
4/6/2012	3:40:15 PM	BCl3 valve closed
4/6/2012	3:40:15 PM	PH3 valve closed
4/6/2012	3:40:15 PM	SiCl4 pre valve closed
4/6/2012	3:40:15 PM	SiCl4 post valve closed
4/6/2012	3:40:15 PM	Bypass valve closed
4/6/2012	3:40:15 PM	Bubbler valve closed
4/6/2012	3:40:15 PM	Main Vac valve opened
4/6/2012	3:40:15 PM	Helium MFC set to  0.000000
4/6/2012	3:40:15 PM	H2 MFC set to  0.000000
4/6/2012	3:40:15 PM	BCl3 MFC set to  0.000000
4/6/2012	3:40:15 PM	PH3 MFC set to  0.000000
4/6/2012	3:40:15 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:40:15 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:40:15 PM	Tube furnace set to 0
4/6/2012	3:40:45 PM	H2 valve closed
4/6/2012	3:40:45 PM	BCl3 valve closed
4/6/2012	3:40:45 PM	PH3 valve closed
4/6/2012	3:40:45 PM	SiCl4 pre valve closed
4/6/2012	3:40:46 PM	SiCl4 post valve closed
4/6/2012	3:40:46 PM	Bypass valve closed
4/6/2012	3:40:46 PM	Bubbler valve closed
4/6/2012	3:40:46 PM	Helium valve opened
4/6/2012	3:40:46 PM	Main Vac valve opened
4/6/2012	3:40:46 PM	Helium MFC set to  20.000000
4/6/2012	3:40:46 PM	H2 MFC set to  0.000000
4/6/2012	3:40:46 PM	BCl3 MFC set to  0.000000
4/6/2012	3:40:46 PM	PH3 MFC set to  0.000000
4/6/2012	3:40:46 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:40:46 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:40:46 PM	Tube furnace set to 0
4/6/2012	3:41:16 PM	Helium valve closed
4/6/2012	3:41:16 PM	H2 valve closed
4/6/2012	3:41:16 PM	BCl3 valve closed
4/6/2012	3:41:16 PM	PH3 valve closed
4/6/2012	3:41:16 PM	SiCl4 pre valve closed
4/6/2012	3:41:16 PM	SiCl4 post valve closed
4/6/2012	3:41:16 PM	Bypass valve closed
4/6/2012	3:41:16 PM	Bubbler valve closed
4/6/2012	3:41:16 PM	Main Vac valve opened
4/6/2012	3:41:16 PM	Helium MFC set to  0.000000
4/6/2012	3:41:16 PM	H2 MFC set to  0.000000
4/6/2012	3:41:16 PM	BCl3 MFC set to  0.000000
4/6/2012	3:41:16 PM	PH3 MFC set to  0.000000
4/6/2012	3:41:16 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:41:16 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:41:16 PM	Tube furnace set to 0
4/6/2012	3:41:46 PM	H2 valve closed
4/6/2012	3:41:46 PM	BCl3 valve closed
4/6/2012	3:41:46 PM	PH3 valve closed
4/6/2012	3:41:46 PM	SiCl4 pre valve closed
4/6/2012	3:41:46 PM	SiCl4 post valve closed
4/6/2012	3:41:46 PM	Bypass valve closed
4/6/2012	3:41:46 PM	Bubbler valve closed
4/6/2012	3:41:46 PM	Helium valve opened
4/6/2012	3:41:46 PM	Main Vac valve opened
4/6/2012	3:41:46 PM	Helium MFC set to  20.000000
4/6/2012	3:41:46 PM	H2 MFC set to  0.000000
4/6/2012	3:41:46 PM	BCl3 MFC set to  0.000000
4/6/2012	3:41:46 PM	PH3 MFC set to  0.000000
4/6/2012	3:41:46 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:41:46 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:41:46 PM	Tube furnace set to 0
4/6/2012	3:42:16 PM	Helium valve closed
4/6/2012	3:42:16 PM	H2 valve closed
4/6/2012	3:42:16 PM	BCl3 valve closed
4/6/2012	3:42:16 PM	PH3 valve closed
4/6/2012	3:42:16 PM	SiCl4 pre valve closed
4/6/2012	3:42:16 PM	SiCl4 post valve closed
4/6/2012	3:42:16 PM	Bypass valve closed
4/6/2012	3:42:16 PM	Bubbler valve closed
4/6/2012	3:42:16 PM	Main Vac valve opened
4/6/2012	3:42:16 PM	Helium MFC set to  0.000000
4/6/2012	3:42:16 PM	H2 MFC set to  0.000000
4/6/2012	3:42:16 PM	BCl3 MFC set to  0.000000
4/6/2012	3:42:16 PM	PH3 MFC set to  0.000000
4/6/2012	3:42:16 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:42:16 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:42:16 PM	Tube furnace set to 0
4/6/2012	3:42:46 PM	H2 valve closed
4/6/2012	3:42:46 PM	BCl3 valve closed
4/6/2012	3:42:46 PM	PH3 valve closed
4/6/2012	3:42:46 PM	SiCl4 pre valve closed
4/6/2012	3:42:46 PM	SiCl4 post valve closed
4/6/2012	3:42:46 PM	Bypass valve closed
4/6/2012	3:42:46 PM	Bubbler valve closed
4/6/2012	3:42:46 PM	Helium valve opened
4/6/2012	3:42:46 PM	Main Vac valve opened
4/6/2012	3:42:46 PM	Helium MFC set to  20.000000
4/6/2012	3:42:46 PM	H2 MFC set to  0.000000
4/6/2012	3:42:46 PM	BCl3 MFC set to  0.000000
4/6/2012	3:42:46 PM	PH3 MFC set to  0.000000
4/6/2012	3:42:46 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:42:46 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:42:47 PM	Tube furnace set to 0
4/6/2012	3:43:17 PM	Helium valve closed
4/6/2012	3:43:17 PM	H2 valve closed
4/6/2012	3:43:17 PM	BCl3 valve closed
4/6/2012	3:43:17 PM	PH3 valve closed
4/6/2012	3:43:17 PM	SiCl4 pre valve closed
4/6/2012	3:43:17 PM	SiCl4 post valve closed
4/6/2012	3:43:17 PM	Bypass valve closed
4/6/2012	3:43:17 PM	Bubbler valve closed
4/6/2012	3:43:17 PM	Main Vac valve opened
4/6/2012	3:43:17 PM	Helium MFC set to  0.000000
4/6/2012	3:43:17 PM	H2 MFC set to  0.000000
4/6/2012	3:43:17 PM	BCl3 MFC set to  0.000000
4/6/2012	3:43:17 PM	PH3 MFC set to  0.000000
4/6/2012	3:43:17 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:43:17 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:43:17 PM	Tube furnace set to 0
4/6/2012	3:43:47 PM	H2 valve closed
4/6/2012	3:43:47 PM	BCl3 valve closed
4/6/2012	3:43:47 PM	PH3 valve closed
4/6/2012	3:43:47 PM	SiCl4 pre valve closed
4/6/2012	3:43:47 PM	SiCl4 post valve closed
4/6/2012	3:43:47 PM	Bypass valve closed
4/6/2012	3:43:47 PM	Bubbler valve closed
4/6/2012	3:43:47 PM	Helium valve opened
4/6/2012	3:43:47 PM	Main Vac valve opened
4/6/2012	3:43:47 PM	Helium MFC set to  20.000000
4/6/2012	3:43:47 PM	H2 MFC set to  0.000000
4/6/2012	3:43:47 PM	BCl3 MFC set to  0.000000
4/6/2012	3:43:47 PM	PH3 MFC set to  0.000000
4/6/2012	3:43:47 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:43:47 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:43:47 PM	Tube furnace set to 0
4/6/2012	3:44:17 PM	Helium valve closed
4/6/2012	3:44:17 PM	H2 valve closed
4/6/2012	3:44:17 PM	BCl3 valve closed
4/6/2012	3:44:17 PM	PH3 valve closed
4/6/2012	3:44:17 PM	SiCl4 pre valve closed
4/6/2012	3:44:17 PM	SiCl4 post valve closed
4/6/2012	3:44:17 PM	Bypass valve closed
4/6/2012	3:44:17 PM	Bubbler valve closed
4/6/2012	3:44:17 PM	Main Vac valve opened
4/6/2012	3:44:17 PM	Helium MFC set to  0.000000
4/6/2012	3:44:17 PM	H2 MFC set to  0.000000
4/6/2012	3:44:17 PM	BCl3 MFC set to  0.000000
4/6/2012	3:44:17 PM	PH3 MFC set to  0.000000
4/6/2012	3:44:17 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:44:17 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:44:17 PM	Tube furnace set to 0
4/6/2012	3:44:47 PM	H2 valve closed
4/6/2012	3:44:47 PM	BCl3 valve closed
4/6/2012	3:44:47 PM	PH3 valve closed
4/6/2012	3:44:47 PM	SiCl4 pre valve closed
4/6/2012	3:44:47 PM	SiCl4 post valve closed
4/6/2012	3:44:47 PM	Bypass valve closed
4/6/2012	3:44:47 PM	Bubbler valve closed
4/6/2012	3:44:47 PM	Helium valve opened
4/6/2012	3:44:47 PM	Main Vac valve opened
4/6/2012	3:44:47 PM	Helium MFC set to  20.000000
4/6/2012	3:44:47 PM	H2 MFC set to  0.000000
4/6/2012	3:44:47 PM	BCl3 MFC set to  0.000000
4/6/2012	3:44:47 PM	PH3 MFC set to  0.000000
4/6/2012	3:44:47 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:44:47 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:44:48 PM	Tube furnace set to 0
4/6/2012	3:45:18 PM	Helium valve closed
4/6/2012	3:45:18 PM	H2 valve closed
4/6/2012	3:45:18 PM	BCl3 valve closed
4/6/2012	3:45:18 PM	PH3 valve closed
4/6/2012	3:45:18 PM	SiCl4 pre valve closed
4/6/2012	3:45:18 PM	SiCl4 post valve closed
4/6/2012	3:45:18 PM	Bypass valve closed
4/6/2012	3:45:18 PM	Bubbler valve closed
4/6/2012	3:45:18 PM	Main Vac valve opened
4/6/2012	3:45:18 PM	Helium MFC set to  0.000000
4/6/2012	3:45:18 PM	H2 MFC set to  0.000000
4/6/2012	3:45:18 PM	BCl3 MFC set to  0.000000
4/6/2012	3:45:18 PM	PH3 MFC set to  0.000000
4/6/2012	3:45:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:45:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:45:18 PM	Tube furnace set to 200
4/6/2012	3:45:48 PM	H2 valve closed
4/6/2012	3:45:48 PM	BCl3 valve closed
4/6/2012	3:45:48 PM	PH3 valve closed
4/6/2012	3:45:48 PM	SiCl4 pre valve closed
4/6/2012	3:45:48 PM	SiCl4 post valve closed
4/6/2012	3:45:48 PM	Bypass valve closed
4/6/2012	3:45:48 PM	Bubbler valve closed
4/6/2012	3:45:48 PM	Helium valve opened
4/6/2012	3:45:48 PM	Main Vac valve opened
4/6/2012	3:45:48 PM	Helium MFC set to  20.000000
4/6/2012	3:45:48 PM	H2 MFC set to  0.000000
4/6/2012	3:45:48 PM	BCl3 MFC set to  0.000000
4/6/2012	3:45:48 PM	PH3 MFC set to  0.000000
4/6/2012	3:45:48 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:45:48 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:45:48 PM	Tube furnace set to 200
4/6/2012	3:46:18 PM	Helium valve closed
4/6/2012	3:46:18 PM	H2 valve closed
4/6/2012	3:46:18 PM	BCl3 valve closed
4/6/2012	3:46:18 PM	PH3 valve closed
4/6/2012	3:46:18 PM	SiCl4 pre valve closed
4/6/2012	3:46:18 PM	SiCl4 post valve closed
4/6/2012	3:46:18 PM	Bypass valve closed
4/6/2012	3:46:18 PM	Bubbler valve closed
4/6/2012	3:46:18 PM	Main Vac valve opened
4/6/2012	3:46:18 PM	Helium MFC set to  0.000000
4/6/2012	3:46:18 PM	H2 MFC set to  0.000000
4/6/2012	3:46:18 PM	BCl3 MFC set to  0.000000
4/6/2012	3:46:18 PM	PH3 MFC set to  0.000000
4/6/2012	3:46:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:46:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:46:18 PM	Tube furnace set to 200
4/6/2012	3:46:48 PM	H2 valve closed
4/6/2012	3:46:48 PM	BCl3 valve closed
4/6/2012	3:46:48 PM	PH3 valve closed
4/6/2012	3:46:48 PM	SiCl4 pre valve closed
4/6/2012	3:46:48 PM	SiCl4 post valve closed
4/6/2012	3:46:48 PM	Bypass valve closed
4/6/2012	3:46:48 PM	Bubbler valve closed
4/6/2012	3:46:48 PM	Helium valve opened
4/6/2012	3:46:48 PM	Main Vac valve opened
4/6/2012	3:46:48 PM	Helium MFC set to  20.000000
4/6/2012	3:46:48 PM	H2 MFC set to  0.000000
4/6/2012	3:46:48 PM	BCl3 MFC set to  0.000000
4/6/2012	3:46:48 PM	PH3 MFC set to  0.000000
4/6/2012	3:46:48 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:46:48 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:46:49 PM	Tube furnace set to 200
4/6/2012	3:47:19 PM	Helium valve closed
4/6/2012	3:47:19 PM	H2 valve closed
4/6/2012	3:47:19 PM	BCl3 valve closed
4/6/2012	3:47:19 PM	PH3 valve closed
4/6/2012	3:47:19 PM	SiCl4 pre valve closed
4/6/2012	3:47:19 PM	SiCl4 post valve closed
4/6/2012	3:47:19 PM	Bypass valve closed
4/6/2012	3:47:19 PM	Bubbler valve closed
4/6/2012	3:47:19 PM	Main Vac valve opened
4/6/2012	3:47:19 PM	Helium MFC set to  0.000000
4/6/2012	3:47:19 PM	H2 MFC set to  0.000000
4/6/2012	3:47:19 PM	BCl3 MFC set to  0.000000
4/6/2012	3:47:19 PM	PH3 MFC set to  0.000000
4/6/2012	3:47:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:47:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:47:19 PM	Tube furnace set to 200
4/6/2012	3:47:49 PM	H2 valve closed
4/6/2012	3:47:49 PM	BCl3 valve closed
4/6/2012	3:47:49 PM	PH3 valve closed
4/6/2012	3:47:49 PM	SiCl4 pre valve closed
4/6/2012	3:47:49 PM	SiCl4 post valve closed
4/6/2012	3:47:49 PM	Bypass valve closed
4/6/2012	3:47:49 PM	Bubbler valve closed
4/6/2012	3:47:49 PM	Helium valve opened
4/6/2012	3:47:49 PM	Main Vac valve opened
4/6/2012	3:47:49 PM	Helium MFC set to  20.000000
4/6/2012	3:47:49 PM	H2 MFC set to  0.000000
4/6/2012	3:47:49 PM	BCl3 MFC set to  0.000000
4/6/2012	3:47:49 PM	PH3 MFC set to  0.000000
4/6/2012	3:47:49 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:47:49 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:47:49 PM	Tube furnace set to 200
4/6/2012	3:48:19 PM	Helium valve closed
4/6/2012	3:48:19 PM	H2 valve closed
4/6/2012	3:48:19 PM	BCl3 valve closed
4/6/2012	3:48:19 PM	PH3 valve closed
4/6/2012	3:48:19 PM	SiCl4 pre valve closed
4/6/2012	3:48:19 PM	SiCl4 post valve closed
4/6/2012	3:48:19 PM	Bypass valve closed
4/6/2012	3:48:19 PM	Bubbler valve closed
4/6/2012	3:48:19 PM	Main Vac valve opened
4/6/2012	3:48:19 PM	Helium MFC set to  0.000000
4/6/2012	3:48:19 PM	H2 MFC set to  0.000000
4/6/2012	3:48:19 PM	BCl3 MFC set to  0.000000
4/6/2012	3:48:19 PM	PH3 MFC set to  0.000000
4/6/2012	3:48:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:48:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:48:19 PM	Tube furnace set to 200
4/6/2012	3:48:49 PM	H2 valve closed
4/6/2012	3:48:49 PM	BCl3 valve closed
4/6/2012	3:48:49 PM	PH3 valve closed
4/6/2012	3:48:49 PM	SiCl4 pre valve closed
4/6/2012	3:48:49 PM	SiCl4 post valve closed
4/6/2012	3:48:49 PM	Bypass valve closed
4/6/2012	3:48:49 PM	Bubbler valve closed
4/6/2012	3:48:49 PM	Helium valve opened
4/6/2012	3:48:49 PM	Main Vac valve opened
4/6/2012	3:48:49 PM	Helium MFC set to  20.000000
4/6/2012	3:48:49 PM	H2 MFC set to  0.000000
4/6/2012	3:48:49 PM	BCl3 MFC set to  0.000000
4/6/2012	3:48:49 PM	PH3 MFC set to  0.000000
4/6/2012	3:48:49 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:48:49 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:48:49 PM	Tube furnace set to 200
4/6/2012	3:49:19 PM	Helium valve closed
4/6/2012	3:49:19 PM	H2 valve closed
4/6/2012	3:49:19 PM	BCl3 valve closed
4/6/2012	3:49:19 PM	PH3 valve closed
4/6/2012	3:49:19 PM	SiCl4 pre valve closed
4/6/2012	3:49:19 PM	SiCl4 post valve closed
4/6/2012	3:49:20 PM	Bypass valve closed
4/6/2012	3:49:20 PM	Bubbler valve closed
4/6/2012	3:49:20 PM	Main Vac valve opened
4/6/2012	3:49:20 PM	Helium MFC set to  0.000000
4/6/2012	3:49:20 PM	H2 MFC set to  0.000000
4/6/2012	3:49:20 PM	BCl3 MFC set to  0.000000
4/6/2012	3:49:20 PM	PH3 MFC set to  0.000000
4/6/2012	3:49:20 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:49:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:49:20 PM	Tube furnace set to 200
4/6/2012	3:49:50 PM	H2 valve closed
4/6/2012	3:49:50 PM	BCl3 valve closed
4/6/2012	3:49:50 PM	PH3 valve closed
4/6/2012	3:49:50 PM	SiCl4 pre valve closed
4/6/2012	3:49:50 PM	SiCl4 post valve closed
4/6/2012	3:49:50 PM	Bypass valve closed
4/6/2012	3:49:50 PM	Bubbler valve closed
4/6/2012	3:49:50 PM	Helium valve opened
4/6/2012	3:49:50 PM	Main Vac valve opened
4/6/2012	3:49:50 PM	Helium MFC set to  20.000000
4/6/2012	3:49:50 PM	H2 MFC set to  0.000000
4/6/2012	3:49:50 PM	BCl3 MFC set to  0.000000
4/6/2012	3:49:50 PM	PH3 MFC set to  0.000000
4/6/2012	3:49:50 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:49:50 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:49:50 PM	Tube furnace set to 200
4/6/2012	3:50:20 PM	Helium valve closed
4/6/2012	3:50:20 PM	H2 valve closed
4/6/2012	3:50:20 PM	BCl3 valve closed
4/6/2012	3:50:20 PM	PH3 valve closed
4/6/2012	3:50:20 PM	SiCl4 pre valve closed
4/6/2012	3:50:20 PM	SiCl4 post valve closed
4/6/2012	3:50:20 PM	Bypass valve closed
4/6/2012	3:50:20 PM	Bubbler valve closed
4/6/2012	3:50:20 PM	Main Vac valve opened
4/6/2012	3:50:20 PM	Helium MFC set to  0.000000
4/6/2012	3:50:20 PM	H2 MFC set to  0.000000
4/6/2012	3:50:20 PM	BCl3 MFC set to  0.000000
4/6/2012	3:50:20 PM	PH3 MFC set to  0.000000
4/6/2012	3:50:20 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:50:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:50:20 PM	Tube furnace set to 200
4/6/2012	3:50:50 PM	H2 valve closed
4/6/2012	3:50:50 PM	BCl3 valve closed
4/6/2012	3:50:50 PM	PH3 valve closed
4/6/2012	3:50:50 PM	SiCl4 pre valve closed
4/6/2012	3:50:50 PM	SiCl4 post valve closed
4/6/2012	3:50:50 PM	Bypass valve closed
4/6/2012	3:50:50 PM	Bubbler valve closed
4/6/2012	3:50:50 PM	Helium valve opened
4/6/2012	3:50:50 PM	Main Vac valve opened
4/6/2012	3:50:50 PM	Helium MFC set to  20.000000
4/6/2012	3:50:50 PM	H2 MFC set to  0.000000
4/6/2012	3:50:50 PM	BCl3 MFC set to  0.000000
4/6/2012	3:50:50 PM	PH3 MFC set to  0.000000
4/6/2012	3:50:50 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:50:50 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:50:50 PM	Tube furnace set to 200
4/6/2012	3:51:18 PM	Helium valve closed
4/6/2012	3:51:18 PM	H2 valve closed
4/6/2012	3:51:18 PM	BCl3 valve closed
4/6/2012	3:51:18 PM	PH3 valve closed
4/6/2012	3:51:18 PM	SiCl4 pre valve closed
4/6/2012	3:51:18 PM	SiCl4 post valve closed
4/6/2012	3:51:18 PM	Bypass valve closed
4/6/2012	3:51:18 PM	Bubbler valve closed
4/6/2012	3:51:18 PM	Main Vac valve opened
4/6/2012	3:51:18 PM	Helium MFC set to  0.000000
4/6/2012	3:51:18 PM	H2 MFC set to  0.000000
4/6/2012	3:51:18 PM	BCl3 MFC set to  0.000000
4/6/2012	3:51:18 PM	PH3 MFC set to  0.000000
4/6/2012	3:51:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	3:51:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	3:51:19 PM	Tube furnace set to 0
4/6/2012	3:51:20 PM	Run finished at 3:51 PM
4/6/2012	3:52:16 PM	Main Vac valve closed
4/6/2012	3:52:23 PM	Main Vac valve opened
4/6/2012	4:20:46 PM	Main Vac valve closed
4/6/2012	4:20:56 PM	Main Vac valve opened
4/6/2012	4:21:03 PM	Recipe started at 4:21 PM
4/6/2012	4:21:03 PM	Helium valve closed
4/6/2012	4:21:03 PM	H2 valve closed
4/6/2012	4:21:03 PM	BCl3 valve closed
4/6/2012	4:21:03 PM	PH3 valve closed
4/6/2012	4:21:03 PM	SiCl4 pre valve closed
4/6/2012	4:21:03 PM	SiCl4 post valve closed
4/6/2012	4:21:03 PM	Main Vac valve closed
4/6/2012	4:21:03 PM	Bypass valve closed
4/6/2012	4:21:03 PM	Bubbler valve closed
4/6/2012	4:21:03 PM	Helium MFC set to  0.000000
4/6/2012	4:21:03 PM	H2 MFC set to  0.000000
4/6/2012	4:21:03 PM	BCl3 MFC set to  0.000000
4/6/2012	4:21:03 PM	PH3 MFC set to  0.000000
4/6/2012	4:21:03 PM	SiCl4 MFC set to  0.000000
4/6/2012	4:21:03 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	4:21:04 PM	Tube furnace set to 0
4/6/2012	4:21:07 PM	Helium valve closed
4/6/2012	4:21:07 PM	BCl3 valve closed
4/6/2012	4:21:07 PM	PH3 valve closed
4/6/2012	4:21:07 PM	SiCl4 pre valve closed
4/6/2012	4:21:07 PM	SiCl4 post valve closed
4/6/2012	4:21:07 PM	Main Vac valve closed
4/6/2012	4:21:07 PM	Bypass valve closed
4/6/2012	4:21:07 PM	Bubbler valve closed
4/6/2012	4:21:07 PM	H2 valve opened
4/6/2012	4:21:07 PM	Helium MFC set to  0.000000
4/6/2012	4:21:07 PM	H2 MFC set to  500.000000
4/6/2012	4:21:07 PM	BCl3 MFC set to  0.000000
4/6/2012	4:21:07 PM	PH3 MFC set to  0.000000
4/6/2012	4:21:07 PM	SiCl4 MFC set to  0.000000
4/6/2012	4:21:07 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	4:21:07 PM	Tube furnace set to 0
4/6/2012	4:22:12 PM	Helium valve closed
4/6/2012	4:22:12 PM	BCl3 valve closed
4/6/2012	4:22:12 PM	PH3 valve closed
4/6/2012	4:22:12 PM	SiCl4 pre valve closed
4/6/2012	4:22:12 PM	SiCl4 post valve closed
4/6/2012	4:22:12 PM	Main Vac valve closed
4/6/2012	4:22:12 PM	Bypass valve closed
4/6/2012	4:22:12 PM	H2 valve opened
4/6/2012	4:22:12 PM	Bubbler valve opened
4/6/2012	4:22:12 PM	Helium MFC set to  0.000000
4/6/2012	4:22:12 PM	H2 MFC set to  500.000000
4/6/2012	4:22:12 PM	BCl3 MFC set to  0.000000
4/6/2012	4:22:12 PM	PH3 MFC set to  0.000000
4/6/2012	4:22:12 PM	SiCl4 MFC set to  0.000000
4/6/2012	4:22:12 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	4:22:12 PM	Tube furnace set to 0
4/6/2012	4:22:13 PM	Helium valve closed
4/6/2012	4:22:13 PM	BCl3 valve closed
4/6/2012	4:22:13 PM	PH3 valve closed
4/6/2012	4:22:13 PM	SiCl4 pre valve closed
4/6/2012	4:22:13 PM	SiCl4 post valve closed
4/6/2012	4:22:13 PM	Main Vac valve closed
4/6/2012	4:22:13 PM	Bypass valve closed
4/6/2012	4:22:13 PM	H2 valve opened
4/6/2012	4:22:13 PM	Bubbler valve opened
4/6/2012	4:22:13 PM	Helium MFC set to  0.000000
4/6/2012	4:22:13 PM	H2 MFC set to  500.000000
4/6/2012	4:22:13 PM	BCl3 MFC set to  0.000000
4/6/2012	4:22:13 PM	PH3 MFC set to  0.000000
4/6/2012	4:22:13 PM	SiCl4 MFC set to  0.000000
4/6/2012	4:22:13 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	4:22:13 PM	Tube furnace set to 1000
4/6/2012	4:42:13 PM	Helium valve closed
4/6/2012	4:42:13 PM	PH3 valve closed
4/6/2012	4:42:13 PM	Main Vac valve closed
4/6/2012	4:42:13 PM	Bypass valve closed
4/6/2012	4:42:13 PM	H2 valve opened
4/6/2012	4:42:13 PM	BCl3 valve opened
4/6/2012	4:42:13 PM	SiCl4 pre valve opened
4/6/2012	4:42:13 PM	SiCl4 post valve opened
4/6/2012	4:42:13 PM	Bubbler valve opened
4/6/2012	4:42:13 PM	Helium MFC set to  0.000000
4/6/2012	4:42:13 PM	H2 MFC set to  450.000000
4/6/2012	4:42:13 PM	BCl3 MFC set to  1.500000
4/6/2012	4:42:13 PM	PH3 MFC set to  0.000000
4/6/2012	4:42:13 PM	SiCl4 MFC set to  50.000000
4/6/2012	4:42:13 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	4:42:13 PM	Tube furnace set to 1000
4/6/2012	5:03:13 PM	Helium valve closed
4/6/2012	5:03:13 PM	BCl3 valve closed
4/6/2012	5:03:13 PM	PH3 valve closed
4/6/2012	5:03:13 PM	SiCl4 pre valve closed
4/6/2012	5:03:13 PM	SiCl4 post valve closed
4/6/2012	5:03:13 PM	Main Vac valve closed
4/6/2012	5:03:13 PM	Bypass valve closed
4/6/2012	5:03:13 PM	H2 valve opened
4/6/2012	5:03:13 PM	Bubbler valve opened
4/6/2012	5:03:13 PM	Helium MFC set to  0.000000
4/6/2012	5:03:13 PM	H2 MFC set to  500.000000
4/6/2012	5:03:13 PM	BCl3 MFC set to  0.000000
4/6/2012	5:03:13 PM	PH3 MFC set to  0.000000
4/6/2012	5:03:13 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:03:13 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:03:14 PM	Tube furnace set to 950
4/6/2012	5:05:14 PM	Helium valve closed
4/6/2012	5:05:14 PM	BCl3 valve closed
4/6/2012	5:05:14 PM	PH3 valve closed
4/6/2012	5:05:14 PM	SiCl4 pre valve closed
4/6/2012	5:05:14 PM	SiCl4 post valve closed
4/6/2012	5:05:14 PM	Main Vac valve closed
4/6/2012	5:05:14 PM	Bypass valve closed
4/6/2012	5:05:14 PM	H2 valve opened
4/6/2012	5:05:14 PM	Bubbler valve opened
4/6/2012	5:05:14 PM	Helium MFC set to  0.000000
4/6/2012	5:05:14 PM	H2 MFC set to  500.000000
4/6/2012	5:05:14 PM	BCl3 MFC set to  0.000000
4/6/2012	5:05:14 PM	PH3 MFC set to  0.000000
4/6/2012	5:05:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:05:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:05:14 PM	Tube furnace set to 900
4/6/2012	5:07:14 PM	Helium valve closed
4/6/2012	5:07:14 PM	BCl3 valve closed
4/6/2012	5:07:14 PM	PH3 valve closed
4/6/2012	5:07:14 PM	SiCl4 pre valve closed
4/6/2012	5:07:14 PM	SiCl4 post valve closed
4/6/2012	5:07:14 PM	Main Vac valve closed
4/6/2012	5:07:14 PM	Bypass valve closed
4/6/2012	5:07:14 PM	H2 valve opened
4/6/2012	5:07:14 PM	Bubbler valve opened
4/6/2012	5:07:14 PM	Helium MFC set to  0.000000
4/6/2012	5:07:14 PM	H2 MFC set to  500.000000
4/6/2012	5:07:14 PM	BCl3 MFC set to  0.000000
4/6/2012	5:07:14 PM	PH3 MFC set to  0.000000
4/6/2012	5:07:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:07:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:07:14 PM	Tube furnace set to 850
4/6/2012	5:09:14 PM	H2 valve closed
4/6/2012	5:09:14 PM	BCl3 valve closed
4/6/2012	5:09:14 PM	PH3 valve closed
4/6/2012	5:09:14 PM	SiCl4 pre valve closed
4/6/2012	5:09:14 PM	SiCl4 post valve closed
4/6/2012	5:09:14 PM	Main Vac valve closed
4/6/2012	5:09:14 PM	Bypass valve closed
4/6/2012	5:09:14 PM	Helium valve opened
4/6/2012	5:09:14 PM	Bubbler valve opened
4/6/2012	5:09:14 PM	Helium MFC set to  500.000000
4/6/2012	5:09:14 PM	H2 MFC set to  0.000000
4/6/2012	5:09:14 PM	BCl3 MFC set to  0.000000
4/6/2012	5:09:14 PM	PH3 MFC set to  0.000000
4/6/2012	5:09:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:09:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:09:14 PM	Tube furnace set to 800
4/6/2012	5:11:14 PM	H2 valve closed
4/6/2012	5:11:14 PM	BCl3 valve closed
4/6/2012	5:11:14 PM	PH3 valve closed
4/6/2012	5:11:14 PM	SiCl4 pre valve closed
4/6/2012	5:11:14 PM	SiCl4 post valve closed
4/6/2012	5:11:14 PM	Main Vac valve closed
4/6/2012	5:11:14 PM	Bypass valve closed
4/6/2012	5:11:14 PM	Helium valve opened
4/6/2012	5:11:14 PM	Bubbler valve opened
4/6/2012	5:11:14 PM	Helium MFC set to  500.000000
4/6/2012	5:11:14 PM	H2 MFC set to  0.000000
4/6/2012	5:11:14 PM	BCl3 MFC set to  0.000000
4/6/2012	5:11:14 PM	PH3 MFC set to  0.000000
4/6/2012	5:11:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:11:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:11:14 PM	Tube furnace set to 750
4/6/2012	5:13:14 PM	H2 valve closed
4/6/2012	5:13:14 PM	BCl3 valve closed
4/6/2012	5:13:14 PM	PH3 valve closed
4/6/2012	5:13:14 PM	SiCl4 pre valve closed
4/6/2012	5:13:14 PM	SiCl4 post valve closed
4/6/2012	5:13:14 PM	Main Vac valve closed
4/6/2012	5:13:14 PM	Bypass valve closed
4/6/2012	5:13:14 PM	Helium valve opened
4/6/2012	5:13:14 PM	Bubbler valve opened
4/6/2012	5:13:14 PM	Helium MFC set to  500.000000
4/6/2012	5:13:14 PM	H2 MFC set to  0.000000
4/6/2012	5:13:14 PM	BCl3 MFC set to  0.000000
4/6/2012	5:13:14 PM	PH3 MFC set to  0.000000
4/6/2012	5:13:14 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:13:14 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:13:15 PM	Tube furnace set to 0
4/6/2012	5:33:15 PM	Helium valve closed
4/6/2012	5:33:15 PM	H2 valve closed
4/6/2012	5:33:15 PM	BCl3 valve closed
4/6/2012	5:33:15 PM	PH3 valve closed
4/6/2012	5:33:15 PM	SiCl4 pre valve closed
4/6/2012	5:33:15 PM	SiCl4 post valve closed
4/6/2012	5:33:15 PM	Main Vac valve closed
4/6/2012	5:33:15 PM	Bypass valve closed
4/6/2012	5:33:15 PM	Bubbler valve closed
4/6/2012	5:33:15 PM	Helium MFC set to  0.000000
4/6/2012	5:33:15 PM	H2 MFC set to  0.000000
4/6/2012	5:33:15 PM	BCl3 MFC set to  0.000000
4/6/2012	5:33:15 PM	PH3 MFC set to  0.000000
4/6/2012	5:33:15 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:33:15 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:33:15 PM	Tube furnace set to 0
4/6/2012	5:33:16 PM	Run finished at 5:33 PM
4/6/2012	5:49:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	5:49:39 PM	Recipe started at 5:49 PM
4/6/2012	5:49:39 PM	Helium valve closed
4/6/2012	5:49:39 PM	H2 valve closed
4/6/2012	5:49:39 PM	BCl3 valve closed
4/6/2012	5:49:39 PM	PH3 valve closed
4/6/2012	5:49:39 PM	SiCl4 pre valve closed
4/6/2012	5:49:39 PM	SiCl4 post valve closed
4/6/2012	5:49:39 PM	Main Vac valve closed
4/6/2012	5:49:39 PM	Bypass valve closed
4/6/2012	5:49:39 PM	Bubbler valve closed
4/6/2012	5:49:39 PM	Helium MFC set to  0.000000
4/6/2012	5:49:39 PM	H2 MFC set to  0.000000
4/6/2012	5:49:39 PM	BCl3 MFC set to  0.000000
4/6/2012	5:49:39 PM	PH3 MFC set to  0.000000
4/6/2012	5:49:39 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:49:39 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:49:39 PM	Tube furnace set to 0
4/6/2012	5:49:42 PM	H2 valve closed
4/6/2012	5:49:42 PM	BCl3 valve closed
4/6/2012	5:49:42 PM	PH3 valve closed
4/6/2012	5:49:42 PM	SiCl4 pre valve closed
4/6/2012	5:49:42 PM	SiCl4 post valve closed
4/6/2012	5:49:42 PM	Main Vac valve closed
4/6/2012	5:49:42 PM	Bypass valve closed
4/6/2012	5:49:42 PM	Bubbler valve closed
4/6/2012	5:49:42 PM	Helium valve opened
4/6/2012	5:49:42 PM	Helium MFC set to  500.000000
4/6/2012	5:49:42 PM	H2 MFC set to  0.000000
4/6/2012	5:49:42 PM	BCl3 MFC set to  0.000000
4/6/2012	5:49:42 PM	PH3 MFC set to  0.000000
4/6/2012	5:49:42 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:49:42 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:49:42 PM	Tube furnace set to 0
4/6/2012	5:49:49 PM	Helium valve closed
4/6/2012	5:49:49 PM	H2 valve closed
4/6/2012	5:49:49 PM	BCl3 valve closed
4/6/2012	5:49:49 PM	PH3 valve closed
4/6/2012	5:49:49 PM	SiCl4 pre valve closed
4/6/2012	5:49:49 PM	SiCl4 post valve closed
4/6/2012	5:49:49 PM	Main Vac valve closed
4/6/2012	5:49:49 PM	Bypass valve closed
4/6/2012	5:49:49 PM	Bubbler valve closed
4/6/2012	5:49:49 PM	Helium MFC set to  0.000000
4/6/2012	5:49:49 PM	H2 MFC set to  0.000000
4/6/2012	5:49:49 PM	BCl3 MFC set to  0.000000
4/6/2012	5:49:49 PM	PH3 MFC set to  0.000000
4/6/2012	5:49:49 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:49:49 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:49:49 PM	Tube furnace set to 0
4/6/2012	5:49:50 PM	Run finished at 5:49 PM
4/6/2012	5:49:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	5:52:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	5:52:38 PM	Recipe started at 5:52 PM
4/6/2012	5:52:38 PM	Helium valve closed
4/6/2012	5:52:38 PM	H2 valve closed
4/6/2012	5:52:38 PM	BCl3 valve closed
4/6/2012	5:52:38 PM	PH3 valve closed
4/6/2012	5:52:38 PM	SiCl4 pre valve closed
4/6/2012	5:52:38 PM	SiCl4 post valve closed
4/6/2012	5:52:38 PM	Main Vac valve closed
4/6/2012	5:52:38 PM	Bubbler valve closed
4/6/2012	5:52:38 PM	Bypass valve opened
4/6/2012	5:52:38 PM	Helium MFC set to  0.000000
4/6/2012	5:52:38 PM	H2 MFC set to  0.000000
4/6/2012	5:52:38 PM	BCl3 MFC set to  0.000000
4/6/2012	5:52:38 PM	PH3 MFC set to  0.000000
4/6/2012	5:52:38 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:52:38 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:52:38 PM	Tube furnace set to 0
4/6/2012	5:53:38 PM	Helium valve closed
4/6/2012	5:53:38 PM	H2 valve closed
4/6/2012	5:53:38 PM	BCl3 valve closed
4/6/2012	5:53:38 PM	PH3 valve closed
4/6/2012	5:53:38 PM	SiCl4 pre valve closed
4/6/2012	5:53:38 PM	SiCl4 post valve closed
4/6/2012	5:53:38 PM	Main Vac valve closed
4/6/2012	5:53:38 PM	Bubbler valve closed
4/6/2012	5:53:38 PM	Bypass valve opened
4/6/2012	5:53:38 PM	Helium MFC set to  0.000000
4/6/2012	5:53:38 PM	H2 MFC set to  0.000000
4/6/2012	5:53:38 PM	BCl3 MFC set to  0.000000
4/6/2012	5:53:38 PM	PH3 MFC set to  0.000000
4/6/2012	5:53:38 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:53:38 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:53:38 PM	Tube furnace set to 0
4/6/2012	5:54:38 PM	Helium valve closed
4/6/2012	5:54:38 PM	H2 valve closed
4/6/2012	5:54:38 PM	BCl3 valve closed
4/6/2012	5:54:38 PM	PH3 valve closed
4/6/2012	5:54:38 PM	SiCl4 pre valve closed
4/6/2012	5:54:38 PM	SiCl4 post valve closed
4/6/2012	5:54:38 PM	Bypass valve closed
4/6/2012	5:54:38 PM	Bubbler valve closed
4/6/2012	5:54:38 PM	Main Vac valve opened
4/6/2012	5:54:38 PM	Helium MFC set to  0.000000
4/6/2012	5:54:38 PM	H2 MFC set to  0.000000
4/6/2012	5:54:38 PM	BCl3 MFC set to  0.000000
4/6/2012	5:54:38 PM	PH3 MFC set to  0.000000
4/6/2012	5:54:38 PM	SiCl4 MFC set to  0.000000
4/6/2012	5:54:38 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	5:54:38 PM	Tube furnace set to 0
4/6/2012	5:54:39 PM	Run finished at 5:54 PM
4/6/2012	5:54:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	6:04:21 PM	Recipe started at 6:04 PM
4/6/2012	6:04:21 PM	Helium valve closed
4/6/2012	6:04:21 PM	H2 valve closed
4/6/2012	6:04:21 PM	BCl3 valve closed
4/6/2012	6:04:21 PM	PH3 valve closed
4/6/2012	6:04:21 PM	SiCl4 pre valve closed
4/6/2012	6:04:21 PM	SiCl4 post valve closed
4/6/2012	6:04:21 PM	Bypass valve closed
4/6/2012	6:04:21 PM	Bubbler valve closed
4/6/2012	6:04:21 PM	Main Vac valve opened
4/6/2012	6:04:21 PM	Helium MFC set to  0.000000
4/6/2012	6:04:21 PM	H2 MFC set to  0.000000
4/6/2012	6:04:21 PM	BCl3 MFC set to  0.000000
4/6/2012	6:04:21 PM	PH3 MFC set to  0.000000
4/6/2012	6:04:21 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:04:21 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:04:21 PM	Tube furnace set to 0
4/6/2012	6:04:51 PM	H2 valve closed
4/6/2012	6:04:51 PM	BCl3 valve closed
4/6/2012	6:04:51 PM	PH3 valve closed
4/6/2012	6:04:51 PM	SiCl4 pre valve closed
4/6/2012	6:04:51 PM	SiCl4 post valve closed
4/6/2012	6:04:51 PM	Bypass valve closed
4/6/2012	6:04:51 PM	Bubbler valve closed
4/6/2012	6:04:51 PM	Helium valve opened
4/6/2012	6:04:52 PM	Main Vac valve opened
4/6/2012	6:04:52 PM	Helium MFC set to  20.000000
4/6/2012	6:04:52 PM	H2 MFC set to  0.000000
4/6/2012	6:04:52 PM	BCl3 MFC set to  0.000000
4/6/2012	6:04:52 PM	PH3 MFC set to  0.000000
4/6/2012	6:04:52 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:04:52 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:04:52 PM	Tube furnace set to 0
4/6/2012	6:05:22 PM	Helium valve closed
4/6/2012	6:05:22 PM	H2 valve closed
4/6/2012	6:05:22 PM	BCl3 valve closed
4/6/2012	6:05:22 PM	PH3 valve closed
4/6/2012	6:05:22 PM	SiCl4 pre valve closed
4/6/2012	6:05:22 PM	SiCl4 post valve closed
4/6/2012	6:05:22 PM	Bypass valve closed
4/6/2012	6:05:22 PM	Bubbler valve closed
4/6/2012	6:05:22 PM	Main Vac valve opened
4/6/2012	6:05:22 PM	Helium MFC set to  0.000000
4/6/2012	6:05:22 PM	H2 MFC set to  0.000000
4/6/2012	6:05:22 PM	BCl3 MFC set to  0.000000
4/6/2012	6:05:22 PM	PH3 MFC set to  0.000000
4/6/2012	6:05:22 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:05:22 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:05:22 PM	Tube furnace set to 0
4/6/2012	6:05:52 PM	H2 valve closed
4/6/2012	6:05:52 PM	BCl3 valve closed
4/6/2012	6:05:52 PM	PH3 valve closed
4/6/2012	6:05:52 PM	SiCl4 pre valve closed
4/6/2012	6:05:52 PM	SiCl4 post valve closed
4/6/2012	6:05:52 PM	Bypass valve closed
4/6/2012	6:05:52 PM	Bubbler valve closed
4/6/2012	6:05:52 PM	Helium valve opened
4/6/2012	6:05:52 PM	Main Vac valve opened
4/6/2012	6:05:52 PM	Helium MFC set to  20.000000
4/6/2012	6:05:52 PM	H2 MFC set to  0.000000
4/6/2012	6:05:52 PM	BCl3 MFC set to  0.000000
4/6/2012	6:05:52 PM	PH3 MFC set to  0.000000
4/6/2012	6:05:52 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:05:52 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:05:52 PM	Tube furnace set to 0
4/6/2012	6:06:22 PM	Helium valve closed
4/6/2012	6:06:22 PM	H2 valve closed
4/6/2012	6:06:22 PM	BCl3 valve closed
4/6/2012	6:06:22 PM	PH3 valve closed
4/6/2012	6:06:22 PM	SiCl4 pre valve closed
4/6/2012	6:06:22 PM	SiCl4 post valve closed
4/6/2012	6:06:22 PM	Bypass valve closed
4/6/2012	6:06:22 PM	Bubbler valve closed
4/6/2012	6:06:22 PM	Main Vac valve opened
4/6/2012	6:06:22 PM	Helium MFC set to  0.000000
4/6/2012	6:06:22 PM	H2 MFC set to  0.000000
4/6/2012	6:06:22 PM	BCl3 MFC set to  0.000000
4/6/2012	6:06:22 PM	PH3 MFC set to  0.000000
4/6/2012	6:06:22 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:06:22 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:06:22 PM	Tube furnace set to 0
4/6/2012	6:06:52 PM	H2 valve closed
4/6/2012	6:06:52 PM	BCl3 valve closed
4/6/2012	6:06:52 PM	PH3 valve closed
4/6/2012	6:06:52 PM	SiCl4 pre valve closed
4/6/2012	6:06:52 PM	SiCl4 post valve closed
4/6/2012	6:06:52 PM	Bypass valve closed
4/6/2012	6:06:52 PM	Bubbler valve closed
4/6/2012	6:06:52 PM	Helium valve opened
4/6/2012	6:06:52 PM	Main Vac valve opened
4/6/2012	6:06:52 PM	Helium MFC set to  20.000000
4/6/2012	6:06:52 PM	H2 MFC set to  0.000000
4/6/2012	6:06:52 PM	BCl3 MFC set to  0.000000
4/6/2012	6:06:52 PM	PH3 MFC set to  0.000000
4/6/2012	6:06:52 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:06:52 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:06:53 PM	Tube furnace set to 0
4/6/2012	6:07:23 PM	Helium valve closed
4/6/2012	6:07:23 PM	H2 valve closed
4/6/2012	6:07:23 PM	BCl3 valve closed
4/6/2012	6:07:23 PM	PH3 valve closed
4/6/2012	6:07:23 PM	SiCl4 pre valve closed
4/6/2012	6:07:23 PM	SiCl4 post valve closed
4/6/2012	6:07:23 PM	Bypass valve closed
4/6/2012	6:07:23 PM	Bubbler valve closed
4/6/2012	6:07:23 PM	Main Vac valve opened
4/6/2012	6:07:23 PM	Helium MFC set to  0.000000
4/6/2012	6:07:23 PM	H2 MFC set to  0.000000
4/6/2012	6:07:23 PM	BCl3 MFC set to  0.000000
4/6/2012	6:07:23 PM	PH3 MFC set to  0.000000
4/6/2012	6:07:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:07:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:07:23 PM	Tube furnace set to 0
4/6/2012	6:07:53 PM	H2 valve closed
4/6/2012	6:07:53 PM	BCl3 valve closed
4/6/2012	6:07:53 PM	PH3 valve closed
4/6/2012	6:07:53 PM	SiCl4 pre valve closed
4/6/2012	6:07:53 PM	SiCl4 post valve closed
4/6/2012	6:07:53 PM	Bypass valve closed
4/6/2012	6:07:53 PM	Bubbler valve closed
4/6/2012	6:07:53 PM	Helium valve opened
4/6/2012	6:07:53 PM	Main Vac valve opened
4/6/2012	6:07:53 PM	Helium MFC set to  20.000000
4/6/2012	6:07:53 PM	H2 MFC set to  0.000000
4/6/2012	6:07:53 PM	BCl3 MFC set to  0.000000
4/6/2012	6:07:53 PM	PH3 MFC set to  0.000000
4/6/2012	6:07:53 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:07:53 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:07:53 PM	Tube furnace set to 0
4/6/2012	6:08:23 PM	Helium valve closed
4/6/2012	6:08:23 PM	H2 valve closed
4/6/2012	6:08:23 PM	BCl3 valve closed
4/6/2012	6:08:23 PM	PH3 valve closed
4/6/2012	6:08:23 PM	SiCl4 pre valve closed
4/6/2012	6:08:23 PM	SiCl4 post valve closed
4/6/2012	6:08:23 PM	Bypass valve closed
4/6/2012	6:08:23 PM	Bubbler valve closed
4/6/2012	6:08:23 PM	Main Vac valve opened
4/6/2012	6:08:23 PM	Helium MFC set to  0.000000
4/6/2012	6:08:23 PM	H2 MFC set to  0.000000
4/6/2012	6:08:23 PM	BCl3 MFC set to  0.000000
4/6/2012	6:08:23 PM	PH3 MFC set to  0.000000
4/6/2012	6:08:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:08:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:08:23 PM	Tube furnace set to 0
4/6/2012	6:08:53 PM	H2 valve closed
4/6/2012	6:08:53 PM	BCl3 valve closed
4/6/2012	6:08:53 PM	PH3 valve closed
4/6/2012	6:08:53 PM	SiCl4 pre valve closed
4/6/2012	6:08:53 PM	SiCl4 post valve closed
4/6/2012	6:08:53 PM	Bypass valve closed
4/6/2012	6:08:53 PM	Bubbler valve closed
4/6/2012	6:08:53 PM	Helium valve opened
4/6/2012	6:08:53 PM	Main Vac valve opened
4/6/2012	6:08:53 PM	Helium MFC set to  20.000000
4/6/2012	6:08:53 PM	H2 MFC set to  0.000000
4/6/2012	6:08:53 PM	BCl3 MFC set to  0.000000
4/6/2012	6:08:53 PM	PH3 MFC set to  0.000000
4/6/2012	6:08:53 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:08:53 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:08:54 PM	Tube furnace set to 0
4/6/2012	6:09:24 PM	Helium valve closed
4/6/2012	6:09:24 PM	H2 valve closed
4/6/2012	6:09:24 PM	BCl3 valve closed
4/6/2012	6:09:24 PM	PH3 valve closed
4/6/2012	6:09:24 PM	SiCl4 pre valve closed
4/6/2012	6:09:24 PM	SiCl4 post valve closed
4/6/2012	6:09:24 PM	Bypass valve closed
4/6/2012	6:09:24 PM	Bubbler valve closed
4/6/2012	6:09:24 PM	Main Vac valve opened
4/6/2012	6:09:24 PM	Helium MFC set to  0.000000
4/6/2012	6:09:24 PM	H2 MFC set to  0.000000
4/6/2012	6:09:24 PM	BCl3 MFC set to  0.000000
4/6/2012	6:09:24 PM	PH3 MFC set to  0.000000
4/6/2012	6:09:24 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:09:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:09:24 PM	Tube furnace set to 0
4/6/2012	6:09:54 PM	H2 valve closed
4/6/2012	6:09:54 PM	BCl3 valve closed
4/6/2012	6:09:54 PM	PH3 valve closed
4/6/2012	6:09:54 PM	SiCl4 pre valve closed
4/6/2012	6:09:54 PM	SiCl4 post valve closed
4/6/2012	6:09:54 PM	Bypass valve closed
4/6/2012	6:09:54 PM	Bubbler valve closed
4/6/2012	6:09:54 PM	Helium valve opened
4/6/2012	6:09:54 PM	Main Vac valve opened
4/6/2012	6:09:54 PM	Helium MFC set to  20.000000
4/6/2012	6:09:54 PM	H2 MFC set to  0.000000
4/6/2012	6:09:54 PM	BCl3 MFC set to  0.000000
4/6/2012	6:09:54 PM	PH3 MFC set to  0.000000
4/6/2012	6:09:54 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:09:54 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:09:54 PM	Tube furnace set to 0
4/6/2012	6:10:24 PM	Helium valve closed
4/6/2012	6:10:24 PM	H2 valve closed
4/6/2012	6:10:24 PM	BCl3 valve closed
4/6/2012	6:10:24 PM	PH3 valve closed
4/6/2012	6:10:24 PM	SiCl4 pre valve closed
4/6/2012	6:10:24 PM	SiCl4 post valve closed
4/6/2012	6:10:24 PM	Bypass valve closed
4/6/2012	6:10:24 PM	Bubbler valve closed
4/6/2012	6:10:24 PM	Main Vac valve opened
4/6/2012	6:10:24 PM	Helium MFC set to  0.000000
4/6/2012	6:10:24 PM	H2 MFC set to  0.000000
4/6/2012	6:10:24 PM	BCl3 MFC set to  0.000000
4/6/2012	6:10:24 PM	PH3 MFC set to  0.000000
4/6/2012	6:10:24 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:10:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:10:24 PM	Tube furnace set to 0
4/6/2012	6:10:54 PM	H2 valve closed
4/6/2012	6:10:54 PM	BCl3 valve closed
4/6/2012	6:10:54 PM	PH3 valve closed
4/6/2012	6:10:54 PM	SiCl4 pre valve closed
4/6/2012	6:10:54 PM	SiCl4 post valve closed
4/6/2012	6:10:54 PM	Bypass valve closed
4/6/2012	6:10:54 PM	Bubbler valve closed
4/6/2012	6:10:54 PM	Helium valve opened
4/6/2012	6:10:54 PM	Main Vac valve opened
4/6/2012	6:10:54 PM	Helium MFC set to  20.000000
4/6/2012	6:10:54 PM	H2 MFC set to  0.000000
4/6/2012	6:10:54 PM	BCl3 MFC set to  0.000000
4/6/2012	6:10:54 PM	PH3 MFC set to  0.000000
4/6/2012	6:10:54 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:10:54 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:10:54 PM	Tube furnace set to 0
4/6/2012	6:11:25 PM	Helium valve closed
4/6/2012	6:11:25 PM	H2 valve closed
4/6/2012	6:11:25 PM	BCl3 valve closed
4/6/2012	6:11:25 PM	PH3 valve closed
4/6/2012	6:11:25 PM	SiCl4 pre valve closed
4/6/2012	6:11:25 PM	SiCl4 post valve closed
4/6/2012	6:11:25 PM	Bypass valve closed
4/6/2012	6:11:25 PM	Bubbler valve closed
4/6/2012	6:11:25 PM	Main Vac valve opened
4/6/2012	6:11:25 PM	Helium MFC set to  0.000000
4/6/2012	6:11:25 PM	H2 MFC set to  0.000000
4/6/2012	6:11:25 PM	BCl3 MFC set to  0.000000
4/6/2012	6:11:25 PM	PH3 MFC set to  0.000000
4/6/2012	6:11:25 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:11:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:11:25 PM	Tube furnace set to 0
4/6/2012	6:11:55 PM	H2 valve closed
4/6/2012	6:11:55 PM	BCl3 valve closed
4/6/2012	6:11:55 PM	PH3 valve closed
4/6/2012	6:11:55 PM	SiCl4 pre valve closed
4/6/2012	6:11:55 PM	SiCl4 post valve closed
4/6/2012	6:11:55 PM	Bypass valve closed
4/6/2012	6:11:55 PM	Bubbler valve closed
4/6/2012	6:11:55 PM	Helium valve opened
4/6/2012	6:11:55 PM	Main Vac valve opened
4/6/2012	6:11:55 PM	Helium MFC set to  20.000000
4/6/2012	6:11:55 PM	H2 MFC set to  0.000000
4/6/2012	6:11:55 PM	BCl3 MFC set to  0.000000
4/6/2012	6:11:55 PM	PH3 MFC set to  0.000000
4/6/2012	6:11:55 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:11:55 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:11:55 PM	Tube furnace set to 0
4/6/2012	6:12:25 PM	Helium valve closed
4/6/2012	6:12:25 PM	H2 valve closed
4/6/2012	6:12:25 PM	BCl3 valve closed
4/6/2012	6:12:25 PM	PH3 valve closed
4/6/2012	6:12:25 PM	SiCl4 pre valve closed
4/6/2012	6:12:25 PM	SiCl4 post valve closed
4/6/2012	6:12:25 PM	Bypass valve closed
4/6/2012	6:12:25 PM	Bubbler valve closed
4/6/2012	6:12:25 PM	Main Vac valve opened
4/6/2012	6:12:25 PM	Helium MFC set to  0.000000
4/6/2012	6:12:25 PM	H2 MFC set to  0.000000
4/6/2012	6:12:25 PM	BCl3 MFC set to  0.000000
4/6/2012	6:12:25 PM	PH3 MFC set to  0.000000
4/6/2012	6:12:25 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:12:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:12:25 PM	Tube furnace set to 0
4/6/2012	6:12:55 PM	H2 valve closed
4/6/2012	6:12:55 PM	BCl3 valve closed
4/6/2012	6:12:55 PM	PH3 valve closed
4/6/2012	6:12:55 PM	SiCl4 pre valve closed
4/6/2012	6:12:55 PM	SiCl4 post valve closed
4/6/2012	6:12:55 PM	Bypass valve closed
4/6/2012	6:12:55 PM	Bubbler valve closed
4/6/2012	6:12:55 PM	Helium valve opened
4/6/2012	6:12:55 PM	Main Vac valve opened
4/6/2012	6:12:55 PM	Helium MFC set to  20.000000
4/6/2012	6:12:55 PM	H2 MFC set to  0.000000
4/6/2012	6:12:55 PM	BCl3 MFC set to  0.000000
4/6/2012	6:12:55 PM	PH3 MFC set to  0.000000
4/6/2012	6:12:55 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:12:55 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:12:55 PM	Tube furnace set to 0
4/6/2012	6:13:25 PM	Helium valve closed
4/6/2012	6:13:25 PM	H2 valve closed
4/6/2012	6:13:25 PM	BCl3 valve closed
4/6/2012	6:13:25 PM	PH3 valve closed
4/6/2012	6:13:25 PM	SiCl4 pre valve closed
4/6/2012	6:13:25 PM	SiCl4 post valve closed
4/6/2012	6:13:25 PM	Bypass valve closed
4/6/2012	6:13:25 PM	Bubbler valve closed
4/6/2012	6:13:25 PM	Main Vac valve opened
4/6/2012	6:13:25 PM	Helium MFC set to  0.000000
4/6/2012	6:13:25 PM	H2 MFC set to  0.000000
4/6/2012	6:13:25 PM	BCl3 MFC set to  0.000000
4/6/2012	6:13:25 PM	PH3 MFC set to  0.000000
4/6/2012	6:13:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:13:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:13:26 PM	Tube furnace set to 200
4/6/2012	6:13:56 PM	H2 valve closed
4/6/2012	6:13:56 PM	BCl3 valve closed
4/6/2012	6:13:56 PM	PH3 valve closed
4/6/2012	6:13:56 PM	SiCl4 pre valve closed
4/6/2012	6:13:56 PM	SiCl4 post valve closed
4/6/2012	6:13:56 PM	Bypass valve closed
4/6/2012	6:13:56 PM	Bubbler valve closed
4/6/2012	6:13:56 PM	Helium valve opened
4/6/2012	6:13:56 PM	Main Vac valve opened
4/6/2012	6:13:56 PM	Helium MFC set to  20.000000
4/6/2012	6:13:56 PM	H2 MFC set to  0.000000
4/6/2012	6:13:56 PM	BCl3 MFC set to  0.000000
4/6/2012	6:13:56 PM	PH3 MFC set to  0.000000
4/6/2012	6:13:56 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:13:56 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:13:56 PM	Tube furnace set to 200
4/6/2012	6:14:26 PM	Helium valve closed
4/6/2012	6:14:26 PM	H2 valve closed
4/6/2012	6:14:26 PM	BCl3 valve closed
4/6/2012	6:14:26 PM	PH3 valve closed
4/6/2012	6:14:26 PM	SiCl4 pre valve closed
4/6/2012	6:14:26 PM	SiCl4 post valve closed
4/6/2012	6:14:26 PM	Bypass valve closed
4/6/2012	6:14:26 PM	Bubbler valve closed
4/6/2012	6:14:26 PM	Main Vac valve opened
4/6/2012	6:14:26 PM	Helium MFC set to  0.000000
4/6/2012	6:14:26 PM	H2 MFC set to  0.000000
4/6/2012	6:14:26 PM	BCl3 MFC set to  0.000000
4/6/2012	6:14:26 PM	PH3 MFC set to  0.000000
4/6/2012	6:14:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:14:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:14:26 PM	Tube furnace set to 200
4/6/2012	6:14:56 PM	H2 valve closed
4/6/2012	6:14:56 PM	BCl3 valve closed
4/6/2012	6:14:56 PM	PH3 valve closed
4/6/2012	6:14:56 PM	SiCl4 pre valve closed
4/6/2012	6:14:56 PM	SiCl4 post valve closed
4/6/2012	6:14:56 PM	Bypass valve closed
4/6/2012	6:14:56 PM	Bubbler valve closed
4/6/2012	6:14:56 PM	Helium valve opened
4/6/2012	6:14:56 PM	Main Vac valve opened
4/6/2012	6:14:56 PM	Helium MFC set to  20.000000
4/6/2012	6:14:56 PM	H2 MFC set to  0.000000
4/6/2012	6:14:56 PM	BCl3 MFC set to  0.000000
4/6/2012	6:14:56 PM	PH3 MFC set to  0.000000
4/6/2012	6:14:56 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:14:56 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:14:56 PM	Tube furnace set to 200
4/6/2012	6:15:26 PM	Helium valve closed
4/6/2012	6:15:26 PM	H2 valve closed
4/6/2012	6:15:26 PM	BCl3 valve closed
4/6/2012	6:15:26 PM	PH3 valve closed
4/6/2012	6:15:26 PM	SiCl4 pre valve closed
4/6/2012	6:15:26 PM	SiCl4 post valve closed
4/6/2012	6:15:26 PM	Bypass valve closed
4/6/2012	6:15:26 PM	Bubbler valve closed
4/6/2012	6:15:26 PM	Main Vac valve opened
4/6/2012	6:15:26 PM	Helium MFC set to  0.000000
4/6/2012	6:15:26 PM	H2 MFC set to  0.000000
4/6/2012	6:15:26 PM	BCl3 MFC set to  0.000000
4/6/2012	6:15:26 PM	PH3 MFC set to  0.000000
4/6/2012	6:15:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:15:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:15:27 PM	Tube furnace set to 200
4/6/2012	6:15:57 PM	H2 valve closed
4/6/2012	6:15:57 PM	BCl3 valve closed
4/6/2012	6:15:57 PM	PH3 valve closed
4/6/2012	6:15:57 PM	SiCl4 pre valve closed
4/6/2012	6:15:57 PM	SiCl4 post valve closed
4/6/2012	6:15:57 PM	Bypass valve closed
4/6/2012	6:15:57 PM	Bubbler valve closed
4/6/2012	6:15:57 PM	Helium valve opened
4/6/2012	6:15:57 PM	Main Vac valve opened
4/6/2012	6:15:57 PM	Helium MFC set to  20.000000
4/6/2012	6:15:57 PM	H2 MFC set to  0.000000
4/6/2012	6:15:57 PM	BCl3 MFC set to  0.000000
4/6/2012	6:15:57 PM	PH3 MFC set to  0.000000
4/6/2012	6:15:57 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:15:57 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:15:57 PM	Tube furnace set to 200
4/6/2012	6:16:27 PM	Helium valve closed
4/6/2012	6:16:27 PM	H2 valve closed
4/6/2012	6:16:27 PM	BCl3 valve closed
4/6/2012	6:16:27 PM	PH3 valve closed
4/6/2012	6:16:27 PM	SiCl4 pre valve closed
4/6/2012	6:16:27 PM	SiCl4 post valve closed
4/6/2012	6:16:27 PM	Bypass valve closed
4/6/2012	6:16:27 PM	Bubbler valve closed
4/6/2012	6:16:27 PM	Main Vac valve opened
4/6/2012	6:16:27 PM	Helium MFC set to  0.000000
4/6/2012	6:16:27 PM	H2 MFC set to  0.000000
4/6/2012	6:16:27 PM	BCl3 MFC set to  0.000000
4/6/2012	6:16:27 PM	PH3 MFC set to  0.000000
4/6/2012	6:16:27 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:16:27 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:16:27 PM	Tube furnace set to 200
4/6/2012	6:16:57 PM	H2 valve closed
4/6/2012	6:16:57 PM	BCl3 valve closed
4/6/2012	6:16:57 PM	PH3 valve closed
4/6/2012	6:16:57 PM	SiCl4 pre valve closed
4/6/2012	6:16:57 PM	SiCl4 post valve closed
4/6/2012	6:16:57 PM	Bypass valve closed
4/6/2012	6:16:57 PM	Bubbler valve closed
4/6/2012	6:16:57 PM	Helium valve opened
4/6/2012	6:16:57 PM	Main Vac valve opened
4/6/2012	6:16:57 PM	Helium MFC set to  20.000000
4/6/2012	6:16:57 PM	H2 MFC set to  0.000000
4/6/2012	6:16:57 PM	BCl3 MFC set to  0.000000
4/6/2012	6:16:57 PM	PH3 MFC set to  0.000000
4/6/2012	6:16:57 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:16:57 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:16:57 PM	Tube furnace set to 200
4/6/2012	6:17:27 PM	Helium valve closed
4/6/2012	6:17:27 PM	H2 valve closed
4/6/2012	6:17:27 PM	BCl3 valve closed
4/6/2012	6:17:27 PM	PH3 valve closed
4/6/2012	6:17:27 PM	SiCl4 pre valve closed
4/6/2012	6:17:27 PM	SiCl4 post valve closed
4/6/2012	6:17:27 PM	Bypass valve closed
4/6/2012	6:17:27 PM	Bubbler valve closed
4/6/2012	6:17:27 PM	Main Vac valve opened
4/6/2012	6:17:27 PM	Helium MFC set to  0.000000
4/6/2012	6:17:27 PM	H2 MFC set to  0.000000
4/6/2012	6:17:27 PM	BCl3 MFC set to  0.000000
4/6/2012	6:17:27 PM	PH3 MFC set to  0.000000
4/6/2012	6:17:27 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:17:27 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:17:28 PM	Tube furnace set to 200
4/6/2012	6:17:58 PM	H2 valve closed
4/6/2012	6:17:58 PM	BCl3 valve closed
4/6/2012	6:17:58 PM	PH3 valve closed
4/6/2012	6:17:58 PM	SiCl4 pre valve closed
4/6/2012	6:17:58 PM	SiCl4 post valve closed
4/6/2012	6:17:58 PM	Bypass valve closed
4/6/2012	6:17:58 PM	Bubbler valve closed
4/6/2012	6:17:58 PM	Helium valve opened
4/6/2012	6:17:58 PM	Main Vac valve opened
4/6/2012	6:17:58 PM	Helium MFC set to  20.000000
4/6/2012	6:17:58 PM	H2 MFC set to  0.000000
4/6/2012	6:17:58 PM	BCl3 MFC set to  0.000000
4/6/2012	6:17:58 PM	PH3 MFC set to  0.000000
4/6/2012	6:17:58 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:17:58 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:17:58 PM	Tube furnace set to 200
4/6/2012	6:18:28 PM	Helium valve closed
4/6/2012	6:18:28 PM	H2 valve closed
4/6/2012	6:18:28 PM	BCl3 valve closed
4/6/2012	6:18:28 PM	PH3 valve closed
4/6/2012	6:18:28 PM	SiCl4 pre valve closed
4/6/2012	6:18:28 PM	SiCl4 post valve closed
4/6/2012	6:18:28 PM	Bypass valve closed
4/6/2012	6:18:28 PM	Bubbler valve closed
4/6/2012	6:18:28 PM	Main Vac valve opened
4/6/2012	6:18:28 PM	Helium MFC set to  0.000000
4/6/2012	6:18:28 PM	H2 MFC set to  0.000000
4/6/2012	6:18:28 PM	BCl3 MFC set to  0.000000
4/6/2012	6:18:28 PM	PH3 MFC set to  0.000000
4/6/2012	6:18:28 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:18:28 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:18:28 PM	Tube furnace set to 200
4/6/2012	6:18:58 PM	H2 valve closed
4/6/2012	6:18:58 PM	BCl3 valve closed
4/6/2012	6:18:58 PM	PH3 valve closed
4/6/2012	6:18:58 PM	SiCl4 pre valve closed
4/6/2012	6:18:58 PM	SiCl4 post valve closed
4/6/2012	6:18:58 PM	Bypass valve closed
4/6/2012	6:18:58 PM	Bubbler valve closed
4/6/2012	6:18:58 PM	Helium valve opened
4/6/2012	6:18:58 PM	Main Vac valve opened
4/6/2012	6:18:58 PM	Helium MFC set to  20.000000
4/6/2012	6:18:58 PM	H2 MFC set to  0.000000
4/6/2012	6:18:58 PM	BCl3 MFC set to  0.000000
4/6/2012	6:18:58 PM	PH3 MFC set to  0.000000
4/6/2012	6:18:58 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:18:58 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:18:58 PM	Tube furnace set to 200
4/6/2012	6:19:28 PM	Helium valve closed
4/6/2012	6:19:28 PM	H2 valve closed
4/6/2012	6:19:28 PM	BCl3 valve closed
4/6/2012	6:19:28 PM	PH3 valve closed
4/6/2012	6:19:28 PM	SiCl4 pre valve closed
4/6/2012	6:19:28 PM	SiCl4 post valve closed
4/6/2012	6:19:28 PM	Bypass valve closed
4/6/2012	6:19:28 PM	Bubbler valve closed
4/6/2012	6:19:28 PM	Main Vac valve opened
4/6/2012	6:19:28 PM	Helium MFC set to  0.000000
4/6/2012	6:19:28 PM	H2 MFC set to  0.000000
4/6/2012	6:19:28 PM	BCl3 MFC set to  0.000000
4/6/2012	6:19:28 PM	PH3 MFC set to  0.000000
4/6/2012	6:19:28 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:19:28 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:19:28 PM	Tube furnace set to 0
4/6/2012	6:19:29 PM	Run finished at 6:19 PM
4/6/2012	6:36:59 PM	Recipe started at 6:36 PM
4/6/2012	6:37:00 PM	Helium valve closed
4/6/2012	6:37:00 PM	H2 valve closed
4/6/2012	6:37:00 PM	BCl3 valve closed
4/6/2012	6:37:00 PM	PH3 valve closed
4/6/2012	6:37:00 PM	SiCl4 pre valve closed
4/6/2012	6:37:00 PM	SiCl4 post valve closed
4/6/2012	6:37:00 PM	Bypass valve closed
4/6/2012	6:37:00 PM	Bubbler valve closed
4/6/2012	6:37:00 PM	Main Vac valve opened
4/6/2012	6:37:00 PM	Helium MFC set to  0.000000
4/6/2012	6:37:00 PM	H2 MFC set to  0.000000
4/6/2012	6:37:00 PM	BCl3 MFC set to  0.000000
4/6/2012	6:37:00 PM	PH3 MFC set to  0.000000
4/6/2012	6:37:00 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:37:00 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:37:00 PM	Tube furnace set to 0
4/6/2012	6:37:01 PM	H2 valve closed
4/6/2012	6:37:01 PM	BCl3 valve closed
4/6/2012	6:37:01 PM	PH3 valve closed
4/6/2012	6:37:01 PM	SiCl4 pre valve closed
4/6/2012	6:37:01 PM	SiCl4 post valve closed
4/6/2012	6:37:01 PM	Bypass valve closed
4/6/2012	6:37:01 PM	Bubbler valve closed
4/6/2012	6:37:01 PM	Helium valve opened
4/6/2012	6:37:01 PM	Main Vac valve opened
4/6/2012	6:37:01 PM	Helium MFC set to  20.000000
4/6/2012	6:37:01 PM	H2 MFC set to  0.000000
4/6/2012	6:37:01 PM	BCl3 MFC set to  0.000000
4/6/2012	6:37:01 PM	PH3 MFC set to  0.000000
4/6/2012	6:37:01 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:37:01 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:37:01 PM	Tube furnace set to 0
4/6/2012	6:37:02 PM	Helium valve closed
4/6/2012	6:37:02 PM	H2 valve closed
4/6/2012	6:37:02 PM	BCl3 valve closed
4/6/2012	6:37:02 PM	PH3 valve closed
4/6/2012	6:37:02 PM	SiCl4 pre valve closed
4/6/2012	6:37:02 PM	SiCl4 post valve closed
4/6/2012	6:37:02 PM	Bypass valve closed
4/6/2012	6:37:02 PM	Bubbler valve closed
4/6/2012	6:37:02 PM	Main Vac valve opened
4/6/2012	6:37:02 PM	Helium MFC set to  0.000000
4/6/2012	6:37:02 PM	H2 MFC set to  0.000000
4/6/2012	6:37:02 PM	BCl3 MFC set to  0.000000
4/6/2012	6:37:02 PM	PH3 MFC set to  0.000000
4/6/2012	6:37:02 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:37:02 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:37:02 PM	Tube furnace set to 0
4/6/2012	6:37:03 PM	H2 valve closed
4/6/2012	6:37:03 PM	BCl3 valve closed
4/6/2012	6:37:03 PM	PH3 valve closed
4/6/2012	6:37:03 PM	SiCl4 pre valve closed
4/6/2012	6:37:03 PM	SiCl4 post valve closed
4/6/2012	6:37:03 PM	Bypass valve closed
4/6/2012	6:37:03 PM	Bubbler valve closed
4/6/2012	6:37:03 PM	Helium valve opened
4/6/2012	6:37:03 PM	Main Vac valve opened
4/6/2012	6:37:03 PM	Helium MFC set to  20.000000
4/6/2012	6:37:03 PM	H2 MFC set to  0.000000
4/6/2012	6:37:03 PM	BCl3 MFC set to  0.000000
4/6/2012	6:37:03 PM	PH3 MFC set to  0.000000
4/6/2012	6:37:03 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:37:03 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:37:03 PM	Tube furnace set to 0
4/6/2012	6:37:04 PM	Helium valve closed
4/6/2012	6:37:04 PM	H2 valve closed
4/6/2012	6:37:04 PM	BCl3 valve closed
4/6/2012	6:37:04 PM	PH3 valve closed
4/6/2012	6:37:04 PM	SiCl4 pre valve closed
4/6/2012	6:37:04 PM	SiCl4 post valve closed
4/6/2012	6:37:04 PM	Bypass valve closed
4/6/2012	6:37:04 PM	Bubbler valve closed
4/6/2012	6:37:04 PM	Main Vac valve opened
4/6/2012	6:37:04 PM	Helium MFC set to  0.000000
4/6/2012	6:37:04 PM	H2 MFC set to  0.000000
4/6/2012	6:37:04 PM	BCl3 MFC set to  0.000000
4/6/2012	6:37:04 PM	PH3 MFC set to  0.000000
4/6/2012	6:37:04 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:37:04 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:37:04 PM	Tube furnace set to 0
4/6/2012	6:37:06 PM	H2 valve closed
4/6/2012	6:37:06 PM	BCl3 valve closed
4/6/2012	6:37:06 PM	PH3 valve closed
4/6/2012	6:37:06 PM	SiCl4 pre valve closed
4/6/2012	6:37:06 PM	SiCl4 post valve closed
4/6/2012	6:37:06 PM	Bypass valve closed
4/6/2012	6:37:06 PM	Bubbler valve closed
4/6/2012	6:37:06 PM	Helium valve opened
4/6/2012	6:37:06 PM	Main Vac valve opened
4/6/2012	6:37:06 PM	Helium MFC set to  20.000000
4/6/2012	6:37:06 PM	H2 MFC set to  0.000000
4/6/2012	6:37:06 PM	BCl3 MFC set to  0.000000
4/6/2012	6:37:06 PM	PH3 MFC set to  0.000000
4/6/2012	6:37:06 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:37:06 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:37:06 PM	Tube furnace set to 0
4/6/2012	6:37:36 PM	Helium valve closed
4/6/2012	6:37:36 PM	H2 valve closed
4/6/2012	6:37:36 PM	BCl3 valve closed
4/6/2012	6:37:36 PM	PH3 valve closed
4/6/2012	6:37:36 PM	SiCl4 pre valve closed
4/6/2012	6:37:36 PM	SiCl4 post valve closed
4/6/2012	6:37:36 PM	Bypass valve closed
4/6/2012	6:37:36 PM	Bubbler valve closed
4/6/2012	6:37:36 PM	Main Vac valve opened
4/6/2012	6:37:36 PM	Helium MFC set to  0.000000
4/6/2012	6:37:36 PM	H2 MFC set to  0.000000
4/6/2012	6:37:36 PM	BCl3 MFC set to  0.000000
4/6/2012	6:37:36 PM	PH3 MFC set to  0.000000
4/6/2012	6:37:36 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:37:36 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:37:37 PM	Tube furnace set to 0
4/6/2012	6:38:07 PM	H2 valve closed
4/6/2012	6:38:07 PM	BCl3 valve closed
4/6/2012	6:38:07 PM	PH3 valve closed
4/6/2012	6:38:07 PM	SiCl4 pre valve closed
4/6/2012	6:38:07 PM	SiCl4 post valve closed
4/6/2012	6:38:07 PM	Bypass valve closed
4/6/2012	6:38:07 PM	Bubbler valve closed
4/6/2012	6:38:07 PM	Helium valve opened
4/6/2012	6:38:07 PM	Main Vac valve opened
4/6/2012	6:38:07 PM	Helium MFC set to  20.000000
4/6/2012	6:38:07 PM	H2 MFC set to  0.000000
4/6/2012	6:38:07 PM	BCl3 MFC set to  0.000000
4/6/2012	6:38:07 PM	PH3 MFC set to  0.000000
4/6/2012	6:38:07 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:38:07 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:38:07 PM	Tube furnace set to 0
4/6/2012	6:38:37 PM	Helium valve closed
4/6/2012	6:38:37 PM	H2 valve closed
4/6/2012	6:38:37 PM	BCl3 valve closed
4/6/2012	6:38:37 PM	PH3 valve closed
4/6/2012	6:38:37 PM	SiCl4 pre valve closed
4/6/2012	6:38:37 PM	SiCl4 post valve closed
4/6/2012	6:38:37 PM	Bypass valve closed
4/6/2012	6:38:37 PM	Bubbler valve closed
4/6/2012	6:38:37 PM	Main Vac valve opened
4/6/2012	6:38:37 PM	Helium MFC set to  0.000000
4/6/2012	6:38:37 PM	H2 MFC set to  0.000000
4/6/2012	6:38:37 PM	BCl3 MFC set to  0.000000
4/6/2012	6:38:37 PM	PH3 MFC set to  0.000000
4/6/2012	6:38:37 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:38:37 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:38:37 PM	Tube furnace set to 0
4/6/2012	6:39:07 PM	H2 valve closed
4/6/2012	6:39:07 PM	BCl3 valve closed
4/6/2012	6:39:07 PM	PH3 valve closed
4/6/2012	6:39:07 PM	SiCl4 pre valve closed
4/6/2012	6:39:07 PM	SiCl4 post valve closed
4/6/2012	6:39:07 PM	Bypass valve closed
4/6/2012	6:39:07 PM	Bubbler valve closed
4/6/2012	6:39:07 PM	Helium valve opened
4/6/2012	6:39:07 PM	Main Vac valve opened
4/6/2012	6:39:07 PM	Helium MFC set to  20.000000
4/6/2012	6:39:07 PM	H2 MFC set to  0.000000
4/6/2012	6:39:07 PM	BCl3 MFC set to  0.000000
4/6/2012	6:39:07 PM	PH3 MFC set to  0.000000
4/6/2012	6:39:07 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:39:07 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:39:07 PM	Tube furnace set to 0
4/6/2012	6:39:37 PM	Helium valve closed
4/6/2012	6:39:37 PM	H2 valve closed
4/6/2012	6:39:37 PM	BCl3 valve closed
4/6/2012	6:39:37 PM	PH3 valve closed
4/6/2012	6:39:37 PM	SiCl4 pre valve closed
4/6/2012	6:39:37 PM	SiCl4 post valve closed
4/6/2012	6:39:37 PM	Bypass valve closed
4/6/2012	6:39:37 PM	Bubbler valve closed
4/6/2012	6:39:37 PM	Main Vac valve opened
4/6/2012	6:39:37 PM	Helium MFC set to  0.000000
4/6/2012	6:39:37 PM	H2 MFC set to  0.000000
4/6/2012	6:39:37 PM	BCl3 MFC set to  0.000000
4/6/2012	6:39:37 PM	PH3 MFC set to  0.000000
4/6/2012	6:39:37 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:39:37 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:39:38 PM	Tube furnace set to 0
4/6/2012	6:40:08 PM	H2 valve closed
4/6/2012	6:40:08 PM	BCl3 valve closed
4/6/2012	6:40:08 PM	PH3 valve closed
4/6/2012	6:40:08 PM	SiCl4 pre valve closed
4/6/2012	6:40:08 PM	SiCl4 post valve closed
4/6/2012	6:40:08 PM	Bypass valve closed
4/6/2012	6:40:08 PM	Bubbler valve closed
4/6/2012	6:40:08 PM	Helium valve opened
4/6/2012	6:40:08 PM	Main Vac valve opened
4/6/2012	6:40:08 PM	Helium MFC set to  20.000000
4/6/2012	6:40:08 PM	H2 MFC set to  0.000000
4/6/2012	6:40:08 PM	BCl3 MFC set to  0.000000
4/6/2012	6:40:08 PM	PH3 MFC set to  0.000000
4/6/2012	6:40:08 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:40:08 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:40:08 PM	Tube furnace set to 0
4/6/2012	6:40:38 PM	Helium valve closed
4/6/2012	6:40:38 PM	H2 valve closed
4/6/2012	6:40:38 PM	BCl3 valve closed
4/6/2012	6:40:38 PM	PH3 valve closed
4/6/2012	6:40:38 PM	SiCl4 pre valve closed
4/6/2012	6:40:38 PM	SiCl4 post valve closed
4/6/2012	6:40:38 PM	Bypass valve closed
4/6/2012	6:40:38 PM	Bubbler valve closed
4/6/2012	6:40:38 PM	Main Vac valve opened
4/6/2012	6:40:38 PM	Helium MFC set to  0.000000
4/6/2012	6:40:38 PM	H2 MFC set to  0.000000
4/6/2012	6:40:38 PM	BCl3 MFC set to  0.000000
4/6/2012	6:40:38 PM	PH3 MFC set to  0.000000
4/6/2012	6:40:38 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:40:38 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:40:38 PM	Tube furnace set to 0
4/6/2012	6:41:08 PM	H2 valve closed
4/6/2012	6:41:08 PM	BCl3 valve closed
4/6/2012	6:41:08 PM	PH3 valve closed
4/6/2012	6:41:08 PM	SiCl4 pre valve closed
4/6/2012	6:41:08 PM	SiCl4 post valve closed
4/6/2012	6:41:08 PM	Bypass valve closed
4/6/2012	6:41:08 PM	Bubbler valve closed
4/6/2012	6:41:08 PM	Helium valve opened
4/6/2012	6:41:08 PM	Main Vac valve opened
4/6/2012	6:41:08 PM	Helium MFC set to  20.000000
4/6/2012	6:41:08 PM	H2 MFC set to  0.000000
4/6/2012	6:41:08 PM	BCl3 MFC set to  0.000000
4/6/2012	6:41:08 PM	PH3 MFC set to  0.000000
4/6/2012	6:41:08 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:41:08 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:41:08 PM	Tube furnace set to 0
4/6/2012	6:41:38 PM	Helium valve closed
4/6/2012	6:41:38 PM	H2 valve closed
4/6/2012	6:41:38 PM	BCl3 valve closed
4/6/2012	6:41:38 PM	PH3 valve closed
4/6/2012	6:41:38 PM	SiCl4 pre valve closed
4/6/2012	6:41:38 PM	SiCl4 post valve closed
4/6/2012	6:41:38 PM	Bypass valve closed
4/6/2012	6:41:38 PM	Bubbler valve closed
4/6/2012	6:41:38 PM	Main Vac valve opened
4/6/2012	6:41:38 PM	Helium MFC set to  0.000000
4/6/2012	6:41:38 PM	H2 MFC set to  0.000000
4/6/2012	6:41:38 PM	BCl3 MFC set to  0.000000
4/6/2012	6:41:38 PM	PH3 MFC set to  0.000000
4/6/2012	6:41:38 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:41:38 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:41:38 PM	Tube furnace set to 0
4/6/2012	6:42:09 PM	H2 valve closed
4/6/2012	6:42:09 PM	BCl3 valve closed
4/6/2012	6:42:09 PM	PH3 valve closed
4/6/2012	6:42:09 PM	SiCl4 pre valve closed
4/6/2012	6:42:09 PM	SiCl4 post valve closed
4/6/2012	6:42:09 PM	Bypass valve closed
4/6/2012	6:42:09 PM	Bubbler valve closed
4/6/2012	6:42:09 PM	Helium valve opened
4/6/2012	6:42:09 PM	Main Vac valve opened
4/6/2012	6:42:09 PM	Helium MFC set to  20.000000
4/6/2012	6:42:09 PM	H2 MFC set to  0.000000
4/6/2012	6:42:09 PM	BCl3 MFC set to  0.000000
4/6/2012	6:42:09 PM	PH3 MFC set to  0.000000
4/6/2012	6:42:09 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:42:09 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:42:09 PM	Tube furnace set to 0
4/6/2012	6:42:39 PM	Helium valve closed
4/6/2012	6:42:39 PM	H2 valve closed
4/6/2012	6:42:39 PM	BCl3 valve closed
4/6/2012	6:42:39 PM	PH3 valve closed
4/6/2012	6:42:39 PM	SiCl4 pre valve closed
4/6/2012	6:42:39 PM	SiCl4 post valve closed
4/6/2012	6:42:39 PM	Bypass valve closed
4/6/2012	6:42:39 PM	Bubbler valve closed
4/6/2012	6:42:39 PM	Main Vac valve opened
4/6/2012	6:42:39 PM	Helium MFC set to  0.000000
4/6/2012	6:42:39 PM	H2 MFC set to  0.000000
4/6/2012	6:42:39 PM	BCl3 MFC set to  0.000000
4/6/2012	6:42:39 PM	PH3 MFC set to  0.000000
4/6/2012	6:42:39 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:42:39 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:42:39 PM	Tube furnace set to 0
4/6/2012	6:43:09 PM	H2 valve closed
4/6/2012	6:43:09 PM	BCl3 valve closed
4/6/2012	6:43:09 PM	PH3 valve closed
4/6/2012	6:43:09 PM	SiCl4 pre valve closed
4/6/2012	6:43:09 PM	SiCl4 post valve closed
4/6/2012	6:43:09 PM	Bypass valve closed
4/6/2012	6:43:09 PM	Bubbler valve closed
4/6/2012	6:43:09 PM	Helium valve opened
4/6/2012	6:43:09 PM	Main Vac valve opened
4/6/2012	6:43:09 PM	Helium MFC set to  20.000000
4/6/2012	6:43:09 PM	H2 MFC set to  0.000000
4/6/2012	6:43:09 PM	BCl3 MFC set to  0.000000
4/6/2012	6:43:09 PM	PH3 MFC set to  0.000000
4/6/2012	6:43:09 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:43:09 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:43:09 PM	Tube furnace set to 0
4/6/2012	6:43:39 PM	Helium valve closed
4/6/2012	6:43:39 PM	H2 valve closed
4/6/2012	6:43:39 PM	BCl3 valve closed
4/6/2012	6:43:39 PM	PH3 valve closed
4/6/2012	6:43:39 PM	SiCl4 pre valve closed
4/6/2012	6:43:39 PM	SiCl4 post valve closed
4/6/2012	6:43:39 PM	Bypass valve closed
4/6/2012	6:43:39 PM	Bubbler valve closed
4/6/2012	6:43:39 PM	Main Vac valve opened
4/6/2012	6:43:39 PM	Helium MFC set to  0.000000
4/6/2012	6:43:39 PM	H2 MFC set to  0.000000
4/6/2012	6:43:39 PM	BCl3 MFC set to  0.000000
4/6/2012	6:43:39 PM	PH3 MFC set to  0.000000
4/6/2012	6:43:39 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:43:39 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:43:39 PM	Tube furnace set to 200
4/6/2012	6:44:09 PM	H2 valve closed
4/6/2012	6:44:09 PM	BCl3 valve closed
4/6/2012	6:44:09 PM	PH3 valve closed
4/6/2012	6:44:09 PM	SiCl4 pre valve closed
4/6/2012	6:44:09 PM	SiCl4 post valve closed
4/6/2012	6:44:09 PM	Bypass valve closed
4/6/2012	6:44:09 PM	Bubbler valve closed
4/6/2012	6:44:09 PM	Helium valve opened
4/6/2012	6:44:09 PM	Main Vac valve opened
4/6/2012	6:44:10 PM	Helium MFC set to  20.000000
4/6/2012	6:44:10 PM	H2 MFC set to  0.000000
4/6/2012	6:44:10 PM	BCl3 MFC set to  0.000000
4/6/2012	6:44:10 PM	PH3 MFC set to  0.000000
4/6/2012	6:44:10 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:44:10 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:44:10 PM	Tube furnace set to 200
4/6/2012	6:44:40 PM	Helium valve closed
4/6/2012	6:44:40 PM	H2 valve closed
4/6/2012	6:44:40 PM	BCl3 valve closed
4/6/2012	6:44:40 PM	PH3 valve closed
4/6/2012	6:44:40 PM	SiCl4 pre valve closed
4/6/2012	6:44:40 PM	SiCl4 post valve closed
4/6/2012	6:44:40 PM	Bypass valve closed
4/6/2012	6:44:40 PM	Bubbler valve closed
4/6/2012	6:44:40 PM	Main Vac valve opened
4/6/2012	6:44:40 PM	Helium MFC set to  0.000000
4/6/2012	6:44:40 PM	H2 MFC set to  0.000000
4/6/2012	6:44:40 PM	BCl3 MFC set to  0.000000
4/6/2012	6:44:40 PM	PH3 MFC set to  0.000000
4/6/2012	6:44:40 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:44:40 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:44:40 PM	Tube furnace set to 200
4/6/2012	6:45:10 PM	H2 valve closed
4/6/2012	6:45:10 PM	BCl3 valve closed
4/6/2012	6:45:10 PM	PH3 valve closed
4/6/2012	6:45:10 PM	SiCl4 pre valve closed
4/6/2012	6:45:10 PM	SiCl4 post valve closed
4/6/2012	6:45:10 PM	Bypass valve closed
4/6/2012	6:45:10 PM	Bubbler valve closed
4/6/2012	6:45:10 PM	Helium valve opened
4/6/2012	6:45:10 PM	Main Vac valve opened
4/6/2012	6:45:10 PM	Helium MFC set to  20.000000
4/6/2012	6:45:10 PM	H2 MFC set to  0.000000
4/6/2012	6:45:10 PM	BCl3 MFC set to  0.000000
4/6/2012	6:45:10 PM	PH3 MFC set to  0.000000
4/6/2012	6:45:10 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:45:10 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:45:10 PM	Tube furnace set to 200
4/6/2012	6:45:40 PM	Helium valve closed
4/6/2012	6:45:40 PM	H2 valve closed
4/6/2012	6:45:40 PM	BCl3 valve closed
4/6/2012	6:45:40 PM	PH3 valve closed
4/6/2012	6:45:40 PM	SiCl4 pre valve closed
4/6/2012	6:45:40 PM	SiCl4 post valve closed
4/6/2012	6:45:40 PM	Bypass valve closed
4/6/2012	6:45:40 PM	Bubbler valve closed
4/6/2012	6:45:40 PM	Main Vac valve opened
4/6/2012	6:45:40 PM	Helium MFC set to  0.000000
4/6/2012	6:45:40 PM	H2 MFC set to  0.000000
4/6/2012	6:45:40 PM	BCl3 MFC set to  0.000000
4/6/2012	6:45:40 PM	PH3 MFC set to  0.000000
4/6/2012	6:45:40 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:45:40 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:45:40 PM	Tube furnace set to 200
4/6/2012	6:46:10 PM	H2 valve closed
4/6/2012	6:46:10 PM	BCl3 valve closed
4/6/2012	6:46:10 PM	PH3 valve closed
4/6/2012	6:46:10 PM	SiCl4 pre valve closed
4/6/2012	6:46:10 PM	SiCl4 post valve closed
4/6/2012	6:46:10 PM	Bypass valve closed
4/6/2012	6:46:10 PM	Bubbler valve closed
4/6/2012	6:46:10 PM	Helium valve opened
4/6/2012	6:46:10 PM	Main Vac valve opened
4/6/2012	6:46:10 PM	Helium MFC set to  20.000000
4/6/2012	6:46:10 PM	H2 MFC set to  0.000000
4/6/2012	6:46:10 PM	BCl3 MFC set to  0.000000
4/6/2012	6:46:10 PM	PH3 MFC set to  0.000000
4/6/2012	6:46:10 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:46:10 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:46:11 PM	Tube furnace set to 200
4/6/2012	6:46:41 PM	Helium valve closed
4/6/2012	6:46:41 PM	H2 valve closed
4/6/2012	6:46:41 PM	BCl3 valve closed
4/6/2012	6:46:41 PM	PH3 valve closed
4/6/2012	6:46:41 PM	SiCl4 pre valve closed
4/6/2012	6:46:41 PM	SiCl4 post valve closed
4/6/2012	6:46:41 PM	Bypass valve closed
4/6/2012	6:46:41 PM	Bubbler valve closed
4/6/2012	6:46:41 PM	Main Vac valve opened
4/6/2012	6:46:41 PM	Helium MFC set to  0.000000
4/6/2012	6:46:41 PM	H2 MFC set to  0.000000
4/6/2012	6:46:41 PM	BCl3 MFC set to  0.000000
4/6/2012	6:46:41 PM	PH3 MFC set to  0.000000
4/6/2012	6:46:41 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:46:41 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:46:41 PM	Tube furnace set to 200
4/6/2012	6:47:11 PM	H2 valve closed
4/6/2012	6:47:11 PM	BCl3 valve closed
4/6/2012	6:47:11 PM	PH3 valve closed
4/6/2012	6:47:11 PM	SiCl4 pre valve closed
4/6/2012	6:47:11 PM	SiCl4 post valve closed
4/6/2012	6:47:11 PM	Bypass valve closed
4/6/2012	6:47:11 PM	Bubbler valve closed
4/6/2012	6:47:11 PM	Helium valve opened
4/6/2012	6:47:11 PM	Main Vac valve opened
4/6/2012	6:47:11 PM	Helium MFC set to  20.000000
4/6/2012	6:47:11 PM	H2 MFC set to  0.000000
4/6/2012	6:47:11 PM	BCl3 MFC set to  0.000000
4/6/2012	6:47:11 PM	PH3 MFC set to  0.000000
4/6/2012	6:47:11 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:47:11 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:47:11 PM	Tube furnace set to 200
4/6/2012	6:47:41 PM	Helium valve closed
4/6/2012	6:47:41 PM	H2 valve closed
4/6/2012	6:47:41 PM	BCl3 valve closed
4/6/2012	6:47:41 PM	PH3 valve closed
4/6/2012	6:47:41 PM	SiCl4 pre valve closed
4/6/2012	6:47:41 PM	SiCl4 post valve closed
4/6/2012	6:47:41 PM	Bypass valve closed
4/6/2012	6:47:41 PM	Bubbler valve closed
4/6/2012	6:47:41 PM	Main Vac valve opened
4/6/2012	6:47:41 PM	Helium MFC set to  0.000000
4/6/2012	6:47:41 PM	H2 MFC set to  0.000000
4/6/2012	6:47:41 PM	BCl3 MFC set to  0.000000
4/6/2012	6:47:41 PM	PH3 MFC set to  0.000000
4/6/2012	6:47:41 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:47:41 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:47:41 PM	Tube furnace set to 200
4/6/2012	6:48:11 PM	H2 valve closed
4/6/2012	6:48:11 PM	BCl3 valve closed
4/6/2012	6:48:11 PM	PH3 valve closed
4/6/2012	6:48:11 PM	SiCl4 pre valve closed
4/6/2012	6:48:11 PM	SiCl4 post valve closed
4/6/2012	6:48:11 PM	Bypass valve closed
4/6/2012	6:48:11 PM	Bubbler valve closed
4/6/2012	6:48:11 PM	Helium valve opened
4/6/2012	6:48:11 PM	Main Vac valve opened
4/6/2012	6:48:11 PM	Helium MFC set to  20.000000
4/6/2012	6:48:11 PM	H2 MFC set to  0.000000
4/6/2012	6:48:11 PM	BCl3 MFC set to  0.000000
4/6/2012	6:48:11 PM	PH3 MFC set to  0.000000
4/6/2012	6:48:11 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:48:11 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:48:12 PM	Tube furnace set to 200
4/6/2012	6:48:42 PM	Helium valve closed
4/6/2012	6:48:42 PM	H2 valve closed
4/6/2012	6:48:42 PM	BCl3 valve closed
4/6/2012	6:48:42 PM	PH3 valve closed
4/6/2012	6:48:42 PM	SiCl4 pre valve closed
4/6/2012	6:48:42 PM	SiCl4 post valve closed
4/6/2012	6:48:42 PM	Bypass valve closed
4/6/2012	6:48:42 PM	Bubbler valve closed
4/6/2012	6:48:42 PM	Main Vac valve opened
4/6/2012	6:48:42 PM	Helium MFC set to  0.000000
4/6/2012	6:48:42 PM	H2 MFC set to  0.000000
4/6/2012	6:48:42 PM	BCl3 MFC set to  0.000000
4/6/2012	6:48:42 PM	PH3 MFC set to  0.000000
4/6/2012	6:48:42 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:48:42 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:48:42 PM	Tube furnace set to 200
4/6/2012	6:49:12 PM	H2 valve closed
4/6/2012	6:49:12 PM	BCl3 valve closed
4/6/2012	6:49:12 PM	PH3 valve closed
4/6/2012	6:49:12 PM	SiCl4 pre valve closed
4/6/2012	6:49:12 PM	SiCl4 post valve closed
4/6/2012	6:49:12 PM	Bypass valve closed
4/6/2012	6:49:12 PM	Bubbler valve closed
4/6/2012	6:49:12 PM	Helium valve opened
4/6/2012	6:49:12 PM	Main Vac valve opened
4/6/2012	6:49:12 PM	Helium MFC set to  20.000000
4/6/2012	6:49:12 PM	H2 MFC set to  0.000000
4/6/2012	6:49:12 PM	BCl3 MFC set to  0.000000
4/6/2012	6:49:12 PM	PH3 MFC set to  0.000000
4/6/2012	6:49:12 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:49:12 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:49:12 PM	Tube furnace set to 200
4/6/2012	6:49:42 PM	Helium valve closed
4/6/2012	6:49:42 PM	H2 valve closed
4/6/2012	6:49:42 PM	BCl3 valve closed
4/6/2012	6:49:42 PM	PH3 valve closed
4/6/2012	6:49:42 PM	SiCl4 pre valve closed
4/6/2012	6:49:42 PM	SiCl4 post valve closed
4/6/2012	6:49:42 PM	Bypass valve closed
4/6/2012	6:49:42 PM	Bubbler valve closed
4/6/2012	6:49:42 PM	Main Vac valve opened
4/6/2012	6:49:42 PM	Helium MFC set to  0.000000
4/6/2012	6:49:42 PM	H2 MFC set to  0.000000
4/6/2012	6:49:42 PM	BCl3 MFC set to  0.000000
4/6/2012	6:49:42 PM	PH3 MFC set to  0.000000
4/6/2012	6:49:42 PM	SiCl4 MFC set to  0.000000
4/6/2012	6:49:42 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	6:49:42 PM	Tube furnace set to 0
4/6/2012	6:49:43 PM	Run finished at 6:49 PM
4/6/2012	7:27:34 PM	Main Vac valve closed
4/6/2012	7:27:47 PM	Main Vac valve opened
4/6/2012	7:28:07 PM	Recipe started at 7:28 PM
4/6/2012	7:28:07 PM	Helium valve closed
4/6/2012	7:28:07 PM	H2 valve closed
4/6/2012	7:28:07 PM	BCl3 valve closed
4/6/2012	7:28:07 PM	PH3 valve closed
4/6/2012	7:28:07 PM	SiCl4 pre valve closed
4/6/2012	7:28:07 PM	SiCl4 post valve closed
4/6/2012	7:28:07 PM	Main Vac valve closed
4/6/2012	7:28:07 PM	Bypass valve closed
4/6/2012	7:28:07 PM	Bubbler valve closed
4/6/2012	7:28:07 PM	Helium MFC set to  0.000000
4/6/2012	7:28:07 PM	H2 MFC set to  0.000000
4/6/2012	7:28:07 PM	BCl3 MFC set to  0.000000
4/6/2012	7:28:07 PM	PH3 MFC set to  0.000000
4/6/2012	7:28:07 PM	SiCl4 MFC set to  0.000000
4/6/2012	7:28:07 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	7:28:08 PM	Tube furnace set to 0
4/6/2012	7:28:11 PM	Helium valve closed
4/6/2012	7:28:11 PM	BCl3 valve closed
4/6/2012	7:28:11 PM	PH3 valve closed
4/6/2012	7:28:11 PM	SiCl4 pre valve closed
4/6/2012	7:28:11 PM	SiCl4 post valve closed
4/6/2012	7:28:11 PM	Main Vac valve closed
4/6/2012	7:28:11 PM	Bypass valve closed
4/6/2012	7:28:11 PM	Bubbler valve closed
4/6/2012	7:28:11 PM	H2 valve opened
4/6/2012	7:28:11 PM	Helium MFC set to  0.000000
4/6/2012	7:28:11 PM	H2 MFC set to  500.000000
4/6/2012	7:28:11 PM	BCl3 MFC set to  0.000000
4/6/2012	7:28:11 PM	PH3 MFC set to  0.000000
4/6/2012	7:28:11 PM	SiCl4 MFC set to  0.000000
4/6/2012	7:28:11 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	7:28:11 PM	Tube furnace set to 0
4/6/2012	7:29:16 PM	Helium valve closed
4/6/2012	7:29:16 PM	BCl3 valve closed
4/6/2012	7:29:16 PM	PH3 valve closed
4/6/2012	7:29:16 PM	SiCl4 pre valve closed
4/6/2012	7:29:16 PM	SiCl4 post valve closed
4/6/2012	7:29:16 PM	Main Vac valve closed
4/6/2012	7:29:16 PM	Bypass valve closed
4/6/2012	7:29:16 PM	H2 valve opened
4/6/2012	7:29:16 PM	Bubbler valve opened
4/6/2012	7:29:16 PM	Helium MFC set to  0.000000
4/6/2012	7:29:16 PM	H2 MFC set to  500.000000
4/6/2012	7:29:16 PM	BCl3 MFC set to  0.000000
4/6/2012	7:29:16 PM	PH3 MFC set to  0.000000
4/6/2012	7:29:16 PM	SiCl4 MFC set to  0.000000
4/6/2012	7:29:16 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	7:29:16 PM	Tube furnace set to 0
4/6/2012	7:29:17 PM	Helium valve closed
4/6/2012	7:29:17 PM	BCl3 valve closed
4/6/2012	7:29:17 PM	PH3 valve closed
4/6/2012	7:29:17 PM	SiCl4 pre valve closed
4/6/2012	7:29:17 PM	SiCl4 post valve closed
4/6/2012	7:29:17 PM	Main Vac valve closed
4/6/2012	7:29:17 PM	Bypass valve closed
4/6/2012	7:29:17 PM	H2 valve opened
4/6/2012	7:29:17 PM	Bubbler valve opened
4/6/2012	7:29:17 PM	Helium MFC set to  0.000000
4/6/2012	7:29:17 PM	H2 MFC set to  500.000000
4/6/2012	7:29:17 PM	BCl3 MFC set to  0.000000
4/6/2012	7:29:17 PM	PH3 MFC set to  0.000000
4/6/2012	7:29:17 PM	SiCl4 MFC set to  0.000000
4/6/2012	7:29:17 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	7:29:17 PM	Tube furnace set to 1000
4/6/2012	7:49:17 PM	Helium valve closed
4/6/2012	7:49:17 PM	PH3 valve closed
4/6/2012	7:49:17 PM	Main Vac valve closed
4/6/2012	7:49:17 PM	Bypass valve closed
4/6/2012	7:49:17 PM	H2 valve opened
4/6/2012	7:49:17 PM	BCl3 valve opened
4/6/2012	7:49:17 PM	SiCl4 pre valve opened
4/6/2012	7:49:17 PM	SiCl4 post valve opened
4/6/2012	7:49:17 PM	Bubbler valve opened
4/6/2012	7:49:17 PM	Helium MFC set to  0.000000
4/6/2012	7:49:17 PM	H2 MFC set to  450.000000
4/6/2012	7:49:17 PM	BCl3 MFC set to  1.500000
4/6/2012	7:49:17 PM	PH3 MFC set to  0.000000
4/6/2012	7:49:17 PM	SiCl4 MFC set to  50.000000
4/6/2012	7:49:17 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	7:49:17 PM	Tube furnace set to 1000
4/6/2012	8:14:17 PM	Helium valve closed
4/6/2012	8:14:17 PM	BCl3 valve closed
4/6/2012	8:14:17 PM	PH3 valve closed
4/6/2012	8:14:17 PM	SiCl4 pre valve closed
4/6/2012	8:14:17 PM	SiCl4 post valve closed
4/6/2012	8:14:17 PM	Main Vac valve closed
4/6/2012	8:14:17 PM	Bypass valve closed
4/6/2012	8:14:17 PM	H2 valve opened
4/6/2012	8:14:17 PM	Bubbler valve opened
4/6/2012	8:14:17 PM	Helium MFC set to  0.000000
4/6/2012	8:14:17 PM	H2 MFC set to  500.000000
4/6/2012	8:14:17 PM	BCl3 MFC set to  0.000000
4/6/2012	8:14:17 PM	PH3 MFC set to  0.000000
4/6/2012	8:14:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	8:14:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	8:14:18 PM	Tube furnace set to 950
4/6/2012	8:16:18 PM	Helium valve closed
4/6/2012	8:16:18 PM	BCl3 valve closed
4/6/2012	8:16:18 PM	PH3 valve closed
4/6/2012	8:16:18 PM	SiCl4 pre valve closed
4/6/2012	8:16:18 PM	SiCl4 post valve closed
4/6/2012	8:16:18 PM	Main Vac valve closed
4/6/2012	8:16:18 PM	Bypass valve closed
4/6/2012	8:16:18 PM	H2 valve opened
4/6/2012	8:16:18 PM	Bubbler valve opened
4/6/2012	8:16:18 PM	Helium MFC set to  0.000000
4/6/2012	8:16:18 PM	H2 MFC set to  500.000000
4/6/2012	8:16:18 PM	BCl3 MFC set to  0.000000
4/6/2012	8:16:18 PM	PH3 MFC set to  0.000000
4/6/2012	8:16:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	8:16:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	8:16:18 PM	Tube furnace set to 900
4/6/2012	8:18:18 PM	Helium valve closed
4/6/2012	8:18:18 PM	BCl3 valve closed
4/6/2012	8:18:18 PM	PH3 valve closed
4/6/2012	8:18:18 PM	SiCl4 pre valve closed
4/6/2012	8:18:18 PM	SiCl4 post valve closed
4/6/2012	8:18:18 PM	Main Vac valve closed
4/6/2012	8:18:18 PM	Bypass valve closed
4/6/2012	8:18:18 PM	H2 valve opened
4/6/2012	8:18:18 PM	Bubbler valve opened
4/6/2012	8:18:18 PM	Helium MFC set to  0.000000
4/6/2012	8:18:18 PM	H2 MFC set to  500.000000
4/6/2012	8:18:18 PM	BCl3 MFC set to  0.000000
4/6/2012	8:18:18 PM	PH3 MFC set to  0.000000
4/6/2012	8:18:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	8:18:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	8:18:18 PM	Tube furnace set to 850
4/6/2012	8:20:18 PM	H2 valve closed
4/6/2012	8:20:18 PM	BCl3 valve closed
4/6/2012	8:20:18 PM	PH3 valve closed
4/6/2012	8:20:18 PM	SiCl4 pre valve closed
4/6/2012	8:20:18 PM	SiCl4 post valve closed
4/6/2012	8:20:18 PM	Main Vac valve closed
4/6/2012	8:20:18 PM	Bypass valve closed
4/6/2012	8:20:18 PM	Helium valve opened
4/6/2012	8:20:18 PM	Bubbler valve opened
4/6/2012	8:20:18 PM	Helium MFC set to  500.000000
4/6/2012	8:20:18 PM	H2 MFC set to  0.000000
4/6/2012	8:20:18 PM	BCl3 MFC set to  0.000000
4/6/2012	8:20:18 PM	PH3 MFC set to  0.000000
4/6/2012	8:20:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	8:20:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	8:20:18 PM	Tube furnace set to 800
4/6/2012	8:22:18 PM	H2 valve closed
4/6/2012	8:22:18 PM	BCl3 valve closed
4/6/2012	8:22:18 PM	PH3 valve closed
4/6/2012	8:22:18 PM	SiCl4 pre valve closed
4/6/2012	8:22:18 PM	SiCl4 post valve closed
4/6/2012	8:22:18 PM	Main Vac valve closed
4/6/2012	8:22:18 PM	Bypass valve closed
4/6/2012	8:22:18 PM	Helium valve opened
4/6/2012	8:22:18 PM	Bubbler valve opened
4/6/2012	8:22:18 PM	Helium MFC set to  500.000000
4/6/2012	8:22:18 PM	H2 MFC set to  0.000000
4/6/2012	8:22:18 PM	BCl3 MFC set to  0.000000
4/6/2012	8:22:18 PM	PH3 MFC set to  0.000000
4/6/2012	8:22:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	8:22:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	8:22:19 PM	Tube furnace set to 750
4/6/2012	8:24:19 PM	H2 valve closed
4/6/2012	8:24:19 PM	BCl3 valve closed
4/6/2012	8:24:19 PM	PH3 valve closed
4/6/2012	8:24:19 PM	SiCl4 pre valve closed
4/6/2012	8:24:19 PM	SiCl4 post valve closed
4/6/2012	8:24:19 PM	Main Vac valve closed
4/6/2012	8:24:19 PM	Bypass valve closed
4/6/2012	8:24:19 PM	Helium valve opened
4/6/2012	8:24:19 PM	Bubbler valve opened
4/6/2012	8:24:19 PM	Helium MFC set to  500.000000
4/6/2012	8:24:19 PM	H2 MFC set to  0.000000
4/6/2012	8:24:19 PM	BCl3 MFC set to  0.000000
4/6/2012	8:24:19 PM	PH3 MFC set to  0.000000
4/6/2012	8:24:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	8:24:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	8:24:19 PM	Tube furnace set to 0
4/6/2012	8:44:19 PM	Helium valve closed
4/6/2012	8:44:19 PM	H2 valve closed
4/6/2012	8:44:19 PM	BCl3 valve closed
4/6/2012	8:44:19 PM	PH3 valve closed
4/6/2012	8:44:19 PM	SiCl4 pre valve closed
4/6/2012	8:44:19 PM	SiCl4 post valve closed
4/6/2012	8:44:19 PM	Main Vac valve closed
4/6/2012	8:44:19 PM	Bypass valve closed
4/6/2012	8:44:19 PM	Bubbler valve closed
4/6/2012	8:44:19 PM	Helium MFC set to  0.000000
4/6/2012	8:44:19 PM	H2 MFC set to  0.000000
4/6/2012	8:44:19 PM	BCl3 MFC set to  0.000000
4/6/2012	8:44:19 PM	PH3 MFC set to  0.000000
4/6/2012	8:44:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	8:44:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	8:44:19 PM	Tube furnace set to 0
4/6/2012	8:44:20 PM	Run finished at 8:44 PM
4/6/2012	9:26:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	9:26:34 PM	Recipe started at 9:26 PM
4/6/2012	9:26:34 PM	Helium valve closed
4/6/2012	9:26:34 PM	H2 valve closed
4/6/2012	9:26:34 PM	BCl3 valve closed
4/6/2012	9:26:34 PM	PH3 valve closed
4/6/2012	9:26:34 PM	SiCl4 pre valve closed
4/6/2012	9:26:34 PM	SiCl4 post valve closed
4/6/2012	9:26:34 PM	Main Vac valve closed
4/6/2012	9:26:34 PM	Bypass valve closed
4/6/2012	9:26:34 PM	Bubbler valve closed
4/6/2012	9:26:34 PM	Helium MFC set to  0.000000
4/6/2012	9:26:34 PM	H2 MFC set to  0.000000
4/6/2012	9:26:34 PM	BCl3 MFC set to  0.000000
4/6/2012	9:26:34 PM	PH3 MFC set to  0.000000
4/6/2012	9:26:34 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:26:34 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:26:34 PM	Tube furnace set to 0
4/6/2012	9:26:37 PM	H2 valve closed
4/6/2012	9:26:37 PM	BCl3 valve closed
4/6/2012	9:26:37 PM	PH3 valve closed
4/6/2012	9:26:37 PM	SiCl4 pre valve closed
4/6/2012	9:26:37 PM	SiCl4 post valve closed
4/6/2012	9:26:37 PM	Main Vac valve closed
4/6/2012	9:26:37 PM	Bypass valve closed
4/6/2012	9:26:37 PM	Bubbler valve closed
4/6/2012	9:26:37 PM	Helium valve opened
4/6/2012	9:26:37 PM	Helium MFC set to  500.000000
4/6/2012	9:26:37 PM	H2 MFC set to  0.000000
4/6/2012	9:26:37 PM	BCl3 MFC set to  0.000000
4/6/2012	9:26:37 PM	PH3 MFC set to  0.000000
4/6/2012	9:26:37 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:26:37 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:26:37 PM	Tube furnace set to 0
4/6/2012	9:26:43 PM	Helium valve closed
4/6/2012	9:26:43 PM	H2 valve closed
4/6/2012	9:26:43 PM	BCl3 valve closed
4/6/2012	9:26:43 PM	PH3 valve closed
4/6/2012	9:26:43 PM	SiCl4 pre valve closed
4/6/2012	9:26:43 PM	SiCl4 post valve closed
4/6/2012	9:26:43 PM	Main Vac valve closed
4/6/2012	9:26:43 PM	Bypass valve closed
4/6/2012	9:26:43 PM	Bubbler valve closed
4/6/2012	9:26:43 PM	Helium MFC set to  0.000000
4/6/2012	9:26:43 PM	H2 MFC set to  0.000000
4/6/2012	9:26:43 PM	BCl3 MFC set to  0.000000
4/6/2012	9:26:43 PM	PH3 MFC set to  0.000000
4/6/2012	9:26:43 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:26:43 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:26:43 PM	Tube furnace set to 0
4/6/2012	9:26:44 PM	Run finished at 9:26 PM
4/6/2012	9:26:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	9:28:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	9:28:59 PM	Recipe started at 9:28 PM
4/6/2012	9:28:59 PM	Helium valve closed
4/6/2012	9:28:59 PM	H2 valve closed
4/6/2012	9:28:59 PM	BCl3 valve closed
4/6/2012	9:28:59 PM	PH3 valve closed
4/6/2012	9:28:59 PM	SiCl4 pre valve closed
4/6/2012	9:28:59 PM	SiCl4 post valve closed
4/6/2012	9:28:59 PM	Main Vac valve closed
4/6/2012	9:28:59 PM	Bubbler valve closed
4/6/2012	9:28:59 PM	Bypass valve opened
4/6/2012	9:28:59 PM	Helium MFC set to  0.000000
4/6/2012	9:28:59 PM	H2 MFC set to  0.000000
4/6/2012	9:28:59 PM	BCl3 MFC set to  0.000000
4/6/2012	9:28:59 PM	PH3 MFC set to  0.000000
4/6/2012	9:28:59 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:28:59 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:28:59 PM	Tube furnace set to 0
4/6/2012	9:29:57 PM	Helium valve closed
4/6/2012	9:29:57 PM	H2 valve closed
4/6/2012	9:29:57 PM	BCl3 valve closed
4/6/2012	9:29:57 PM	PH3 valve closed
4/6/2012	9:29:57 PM	SiCl4 pre valve closed
4/6/2012	9:29:57 PM	SiCl4 post valve closed
4/6/2012	9:29:57 PM	Main Vac valve closed
4/6/2012	9:29:57 PM	Bubbler valve closed
4/6/2012	9:29:57 PM	Bypass valve opened
4/6/2012	9:29:57 PM	Helium MFC set to  0.000000
4/6/2012	9:29:57 PM	H2 MFC set to  0.000000
4/6/2012	9:29:57 PM	BCl3 MFC set to  0.000000
4/6/2012	9:29:57 PM	PH3 MFC set to  0.000000
4/6/2012	9:29:57 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:29:57 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:29:57 PM	Tube furnace set to 0
4/6/2012	9:30:57 PM	Helium valve closed
4/6/2012	9:30:57 PM	H2 valve closed
4/6/2012	9:30:57 PM	BCl3 valve closed
4/6/2012	9:30:57 PM	PH3 valve closed
4/6/2012	9:30:57 PM	SiCl4 pre valve closed
4/6/2012	9:30:57 PM	SiCl4 post valve closed
4/6/2012	9:30:57 PM	Bypass valve closed
4/6/2012	9:30:57 PM	Bubbler valve closed
4/6/2012	9:30:57 PM	Main Vac valve opened
4/6/2012	9:30:57 PM	Helium MFC set to  0.000000
4/6/2012	9:30:57 PM	H2 MFC set to  0.000000
4/6/2012	9:30:57 PM	BCl3 MFC set to  0.000000
4/6/2012	9:30:57 PM	PH3 MFC set to  0.000000
4/6/2012	9:30:57 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:30:57 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:30:57 PM	Tube furnace set to 0
4/6/2012	9:30:58 PM	Run finished at 9:30 PM
4/6/2012	9:30:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	9:32:18 PM	Recipe started at 9:32 PM
4/6/2012	9:32:18 PM	Helium valve closed
4/6/2012	9:32:18 PM	H2 valve closed
4/6/2012	9:32:18 PM	BCl3 valve closed
4/6/2012	9:32:18 PM	PH3 valve closed
4/6/2012	9:32:18 PM	SiCl4 pre valve closed
4/6/2012	9:32:18 PM	SiCl4 post valve closed
4/6/2012	9:32:18 PM	Bypass valve closed
4/6/2012	9:32:18 PM	Bubbler valve closed
4/6/2012	9:32:18 PM	Main Vac valve opened
4/6/2012	9:32:18 PM	Helium MFC set to  0.000000
4/6/2012	9:32:18 PM	H2 MFC set to  0.000000
4/6/2012	9:32:18 PM	BCl3 MFC set to  0.000000
4/6/2012	9:32:18 PM	PH3 MFC set to  0.000000
4/6/2012	9:32:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:32:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:32:18 PM	Tube furnace set to 0
4/6/2012	9:32:48 PM	H2 valve closed
4/6/2012	9:32:48 PM	BCl3 valve closed
4/6/2012	9:32:48 PM	PH3 valve closed
4/6/2012	9:32:49 PM	SiCl4 pre valve closed
4/6/2012	9:32:49 PM	SiCl4 post valve closed
4/6/2012	9:32:49 PM	Bypass valve closed
4/6/2012	9:32:49 PM	Bubbler valve closed
4/6/2012	9:32:49 PM	Helium valve opened
4/6/2012	9:32:49 PM	Main Vac valve opened
4/6/2012	9:32:49 PM	Helium MFC set to  20.000000
4/6/2012	9:32:49 PM	H2 MFC set to  0.000000
4/6/2012	9:32:49 PM	BCl3 MFC set to  0.000000
4/6/2012	9:32:49 PM	PH3 MFC set to  0.000000
4/6/2012	9:32:49 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:32:49 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:32:49 PM	Tube furnace set to 0
4/6/2012	9:33:19 PM	Helium valve closed
4/6/2012	9:33:19 PM	H2 valve closed
4/6/2012	9:33:19 PM	BCl3 valve closed
4/6/2012	9:33:19 PM	PH3 valve closed
4/6/2012	9:33:19 PM	SiCl4 pre valve closed
4/6/2012	9:33:19 PM	SiCl4 post valve closed
4/6/2012	9:33:19 PM	Bypass valve closed
4/6/2012	9:33:19 PM	Bubbler valve closed
4/6/2012	9:33:19 PM	Main Vac valve opened
4/6/2012	9:33:19 PM	Helium MFC set to  0.000000
4/6/2012	9:33:19 PM	H2 MFC set to  0.000000
4/6/2012	9:33:19 PM	BCl3 MFC set to  0.000000
4/6/2012	9:33:19 PM	PH3 MFC set to  0.000000
4/6/2012	9:33:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:33:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:33:19 PM	Tube furnace set to 0
4/6/2012	9:33:49 PM	H2 valve closed
4/6/2012	9:33:49 PM	BCl3 valve closed
4/6/2012	9:33:49 PM	PH3 valve closed
4/6/2012	9:33:49 PM	SiCl4 pre valve closed
4/6/2012	9:33:49 PM	SiCl4 post valve closed
4/6/2012	9:33:49 PM	Bypass valve closed
4/6/2012	9:33:49 PM	Bubbler valve closed
4/6/2012	9:33:49 PM	Helium valve opened
4/6/2012	9:33:49 PM	Main Vac valve opened
4/6/2012	9:33:49 PM	Helium MFC set to  20.000000
4/6/2012	9:33:49 PM	H2 MFC set to  0.000000
4/6/2012	9:33:49 PM	BCl3 MFC set to  0.000000
4/6/2012	9:33:49 PM	PH3 MFC set to  0.000000
4/6/2012	9:33:49 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:33:49 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:33:49 PM	Tube furnace set to 0
4/6/2012	9:34:19 PM	Helium valve closed
4/6/2012	9:34:19 PM	H2 valve closed
4/6/2012	9:34:19 PM	BCl3 valve closed
4/6/2012	9:34:19 PM	PH3 valve closed
4/6/2012	9:34:19 PM	SiCl4 pre valve closed
4/6/2012	9:34:19 PM	SiCl4 post valve closed
4/6/2012	9:34:19 PM	Bypass valve closed
4/6/2012	9:34:19 PM	Bubbler valve closed
4/6/2012	9:34:19 PM	Main Vac valve opened
4/6/2012	9:34:19 PM	Helium MFC set to  0.000000
4/6/2012	9:34:19 PM	H2 MFC set to  0.000000
4/6/2012	9:34:19 PM	BCl3 MFC set to  0.000000
4/6/2012	9:34:19 PM	PH3 MFC set to  0.000000
4/6/2012	9:34:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:34:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:34:19 PM	Tube furnace set to 0
4/6/2012	9:34:49 PM	H2 valve closed
4/6/2012	9:34:49 PM	BCl3 valve closed
4/6/2012	9:34:49 PM	PH3 valve closed
4/6/2012	9:34:49 PM	SiCl4 pre valve closed
4/6/2012	9:34:49 PM	SiCl4 post valve closed
4/6/2012	9:34:49 PM	Bypass valve closed
4/6/2012	9:34:49 PM	Bubbler valve closed
4/6/2012	9:34:49 PM	Helium valve opened
4/6/2012	9:34:49 PM	Main Vac valve opened
4/6/2012	9:34:49 PM	Helium MFC set to  20.000000
4/6/2012	9:34:49 PM	H2 MFC set to  0.000000
4/6/2012	9:34:49 PM	BCl3 MFC set to  0.000000
4/6/2012	9:34:49 PM	PH3 MFC set to  0.000000
4/6/2012	9:34:49 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:34:49 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:34:50 PM	Tube furnace set to 0
4/6/2012	9:35:20 PM	Helium valve closed
4/6/2012	9:35:20 PM	H2 valve closed
4/6/2012	9:35:20 PM	BCl3 valve closed
4/6/2012	9:35:20 PM	PH3 valve closed
4/6/2012	9:35:20 PM	SiCl4 pre valve closed
4/6/2012	9:35:20 PM	SiCl4 post valve closed
4/6/2012	9:35:20 PM	Bypass valve closed
4/6/2012	9:35:20 PM	Bubbler valve closed
4/6/2012	9:35:20 PM	Main Vac valve opened
4/6/2012	9:35:20 PM	Helium MFC set to  0.000000
4/6/2012	9:35:20 PM	H2 MFC set to  0.000000
4/6/2012	9:35:20 PM	BCl3 MFC set to  0.000000
4/6/2012	9:35:20 PM	PH3 MFC set to  0.000000
4/6/2012	9:35:20 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:35:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:35:20 PM	Tube furnace set to 0
4/6/2012	9:35:50 PM	H2 valve closed
4/6/2012	9:35:50 PM	BCl3 valve closed
4/6/2012	9:35:50 PM	PH3 valve closed
4/6/2012	9:35:50 PM	SiCl4 pre valve closed
4/6/2012	9:35:50 PM	SiCl4 post valve closed
4/6/2012	9:35:50 PM	Bypass valve closed
4/6/2012	9:35:50 PM	Bubbler valve closed
4/6/2012	9:35:50 PM	Helium valve opened
4/6/2012	9:35:50 PM	Main Vac valve opened
4/6/2012	9:35:50 PM	Helium MFC set to  20.000000
4/6/2012	9:35:50 PM	H2 MFC set to  0.000000
4/6/2012	9:35:50 PM	BCl3 MFC set to  0.000000
4/6/2012	9:35:50 PM	PH3 MFC set to  0.000000
4/6/2012	9:35:50 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:35:50 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:35:50 PM	Tube furnace set to 0
4/6/2012	9:36:20 PM	Helium valve closed
4/6/2012	9:36:20 PM	H2 valve closed
4/6/2012	9:36:20 PM	BCl3 valve closed
4/6/2012	9:36:20 PM	PH3 valve closed
4/6/2012	9:36:20 PM	SiCl4 pre valve closed
4/6/2012	9:36:20 PM	SiCl4 post valve closed
4/6/2012	9:36:20 PM	Bypass valve closed
4/6/2012	9:36:20 PM	Bubbler valve closed
4/6/2012	9:36:20 PM	Main Vac valve opened
4/6/2012	9:36:20 PM	Helium MFC set to  0.000000
4/6/2012	9:36:20 PM	H2 MFC set to  0.000000
4/6/2012	9:36:20 PM	BCl3 MFC set to  0.000000
4/6/2012	9:36:20 PM	PH3 MFC set to  0.000000
4/6/2012	9:36:20 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:36:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:36:20 PM	Tube furnace set to 0
4/6/2012	9:36:50 PM	H2 valve closed
4/6/2012	9:36:50 PM	BCl3 valve closed
4/6/2012	9:36:50 PM	PH3 valve closed
4/6/2012	9:36:50 PM	SiCl4 pre valve closed
4/6/2012	9:36:50 PM	SiCl4 post valve closed
4/6/2012	9:36:50 PM	Bypass valve closed
4/6/2012	9:36:50 PM	Bubbler valve closed
4/6/2012	9:36:50 PM	Helium valve opened
4/6/2012	9:36:50 PM	Main Vac valve opened
4/6/2012	9:36:50 PM	Helium MFC set to  20.000000
4/6/2012	9:36:50 PM	H2 MFC set to  0.000000
4/6/2012	9:36:50 PM	BCl3 MFC set to  0.000000
4/6/2012	9:36:50 PM	PH3 MFC set to  0.000000
4/6/2012	9:36:50 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:36:50 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:36:51 PM	Tube furnace set to 0
4/6/2012	9:37:21 PM	Helium valve closed
4/6/2012	9:37:21 PM	H2 valve closed
4/6/2012	9:37:21 PM	BCl3 valve closed
4/6/2012	9:37:21 PM	PH3 valve closed
4/6/2012	9:37:21 PM	SiCl4 pre valve closed
4/6/2012	9:37:21 PM	SiCl4 post valve closed
4/6/2012	9:37:21 PM	Bypass valve closed
4/6/2012	9:37:21 PM	Bubbler valve closed
4/6/2012	9:37:21 PM	Main Vac valve opened
4/6/2012	9:37:21 PM	Helium MFC set to  0.000000
4/6/2012	9:37:21 PM	H2 MFC set to  0.000000
4/6/2012	9:37:21 PM	BCl3 MFC set to  0.000000
4/6/2012	9:37:21 PM	PH3 MFC set to  0.000000
4/6/2012	9:37:21 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:37:21 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:37:21 PM	Tube furnace set to 0
4/6/2012	9:37:51 PM	H2 valve closed
4/6/2012	9:37:51 PM	BCl3 valve closed
4/6/2012	9:37:51 PM	PH3 valve closed
4/6/2012	9:37:51 PM	SiCl4 pre valve closed
4/6/2012	9:37:51 PM	SiCl4 post valve closed
4/6/2012	9:37:51 PM	Bypass valve closed
4/6/2012	9:37:51 PM	Bubbler valve closed
4/6/2012	9:37:51 PM	Helium valve opened
4/6/2012	9:37:51 PM	Main Vac valve opened
4/6/2012	9:37:51 PM	Helium MFC set to  20.000000
4/6/2012	9:37:51 PM	H2 MFC set to  0.000000
4/6/2012	9:37:51 PM	BCl3 MFC set to  0.000000
4/6/2012	9:37:51 PM	PH3 MFC set to  0.000000
4/6/2012	9:37:51 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:37:51 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:37:51 PM	Tube furnace set to 0
4/6/2012	9:38:21 PM	Helium valve closed
4/6/2012	9:38:21 PM	H2 valve closed
4/6/2012	9:38:21 PM	BCl3 valve closed
4/6/2012	9:38:21 PM	PH3 valve closed
4/6/2012	9:38:21 PM	SiCl4 pre valve closed
4/6/2012	9:38:21 PM	SiCl4 post valve closed
4/6/2012	9:38:21 PM	Bypass valve closed
4/6/2012	9:38:21 PM	Bubbler valve closed
4/6/2012	9:38:21 PM	Main Vac valve opened
4/6/2012	9:38:21 PM	Helium MFC set to  0.000000
4/6/2012	9:38:21 PM	H2 MFC set to  0.000000
4/6/2012	9:38:21 PM	BCl3 MFC set to  0.000000
4/6/2012	9:38:21 PM	PH3 MFC set to  0.000000
4/6/2012	9:38:21 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:38:21 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:38:21 PM	Tube furnace set to 0
4/6/2012	9:38:51 PM	H2 valve closed
4/6/2012	9:38:51 PM	BCl3 valve closed
4/6/2012	9:38:51 PM	PH3 valve closed
4/6/2012	9:38:51 PM	SiCl4 pre valve closed
4/6/2012	9:38:51 PM	SiCl4 post valve closed
4/6/2012	9:38:51 PM	Bypass valve closed
4/6/2012	9:38:51 PM	Bubbler valve closed
4/6/2012	9:38:51 PM	Helium valve opened
4/6/2012	9:38:51 PM	Main Vac valve opened
4/6/2012	9:38:51 PM	Helium MFC set to  20.000000
4/6/2012	9:38:51 PM	H2 MFC set to  0.000000
4/6/2012	9:38:51 PM	BCl3 MFC set to  0.000000
4/6/2012	9:38:51 PM	PH3 MFC set to  0.000000
4/6/2012	9:38:51 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:38:51 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:38:52 PM	Tube furnace set to 0
4/6/2012	9:39:22 PM	Helium valve closed
4/6/2012	9:39:22 PM	H2 valve closed
4/6/2012	9:39:22 PM	BCl3 valve closed
4/6/2012	9:39:22 PM	PH3 valve closed
4/6/2012	9:39:22 PM	SiCl4 pre valve closed
4/6/2012	9:39:22 PM	SiCl4 post valve closed
4/6/2012	9:39:22 PM	Bypass valve closed
4/6/2012	9:39:22 PM	Bubbler valve closed
4/6/2012	9:39:22 PM	Main Vac valve opened
4/6/2012	9:39:22 PM	Helium MFC set to  0.000000
4/6/2012	9:39:22 PM	H2 MFC set to  0.000000
4/6/2012	9:39:22 PM	BCl3 MFC set to  0.000000
4/6/2012	9:39:22 PM	PH3 MFC set to  0.000000
4/6/2012	9:39:22 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:39:22 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:39:22 PM	Tube furnace set to 0
4/6/2012	9:39:52 PM	H2 valve closed
4/6/2012	9:39:52 PM	BCl3 valve closed
4/6/2012	9:39:52 PM	PH3 valve closed
4/6/2012	9:39:52 PM	SiCl4 pre valve closed
4/6/2012	9:39:52 PM	SiCl4 post valve closed
4/6/2012	9:39:52 PM	Bypass valve closed
4/6/2012	9:39:52 PM	Bubbler valve closed
4/6/2012	9:39:52 PM	Helium valve opened
4/6/2012	9:39:52 PM	Main Vac valve opened
4/6/2012	9:39:52 PM	Helium MFC set to  20.000000
4/6/2012	9:39:52 PM	H2 MFC set to  0.000000
4/6/2012	9:39:52 PM	BCl3 MFC set to  0.000000
4/6/2012	9:39:52 PM	PH3 MFC set to  0.000000
4/6/2012	9:39:52 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:39:52 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:39:52 PM	Tube furnace set to 0
4/6/2012	9:40:22 PM	Helium valve closed
4/6/2012	9:40:22 PM	H2 valve closed
4/6/2012	9:40:22 PM	BCl3 valve closed
4/6/2012	9:40:22 PM	PH3 valve closed
4/6/2012	9:40:22 PM	SiCl4 pre valve closed
4/6/2012	9:40:22 PM	SiCl4 post valve closed
4/6/2012	9:40:22 PM	Bypass valve closed
4/6/2012	9:40:22 PM	Bubbler valve closed
4/6/2012	9:40:22 PM	Main Vac valve opened
4/6/2012	9:40:22 PM	Helium MFC set to  0.000000
4/6/2012	9:40:22 PM	H2 MFC set to  0.000000
4/6/2012	9:40:22 PM	BCl3 MFC set to  0.000000
4/6/2012	9:40:22 PM	PH3 MFC set to  0.000000
4/6/2012	9:40:22 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:40:22 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:40:22 PM	Tube furnace set to 0
4/6/2012	9:40:52 PM	H2 valve closed
4/6/2012	9:40:52 PM	BCl3 valve closed
4/6/2012	9:40:52 PM	PH3 valve closed
4/6/2012	9:40:52 PM	SiCl4 pre valve closed
4/6/2012	9:40:52 PM	SiCl4 post valve closed
4/6/2012	9:40:52 PM	Bypass valve closed
4/6/2012	9:40:52 PM	Bubbler valve closed
4/6/2012	9:40:52 PM	Helium valve opened
4/6/2012	9:40:52 PM	Main Vac valve opened
4/6/2012	9:40:52 PM	Helium MFC set to  20.000000
4/6/2012	9:40:52 PM	H2 MFC set to  0.000000
4/6/2012	9:40:52 PM	BCl3 MFC set to  0.000000
4/6/2012	9:40:52 PM	PH3 MFC set to  0.000000
4/6/2012	9:40:52 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:40:52 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:40:52 PM	Tube furnace set to 0
4/6/2012	9:41:22 PM	Helium valve closed
4/6/2012	9:41:22 PM	H2 valve closed
4/6/2012	9:41:22 PM	BCl3 valve closed
4/6/2012	9:41:22 PM	PH3 valve closed
4/6/2012	9:41:22 PM	SiCl4 pre valve closed
4/6/2012	9:41:22 PM	SiCl4 post valve closed
4/6/2012	9:41:22 PM	Bypass valve closed
4/6/2012	9:41:22 PM	Bubbler valve closed
4/6/2012	9:41:22 PM	Main Vac valve opened
4/6/2012	9:41:23 PM	Helium MFC set to  0.000000
4/6/2012	9:41:23 PM	H2 MFC set to  0.000000
4/6/2012	9:41:23 PM	BCl3 MFC set to  0.000000
4/6/2012	9:41:23 PM	PH3 MFC set to  0.000000
4/6/2012	9:41:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:41:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:41:23 PM	Tube furnace set to 200
4/6/2012	9:41:53 PM	H2 valve closed
4/6/2012	9:41:53 PM	BCl3 valve closed
4/6/2012	9:41:53 PM	PH3 valve closed
4/6/2012	9:41:53 PM	SiCl4 pre valve closed
4/6/2012	9:41:53 PM	SiCl4 post valve closed
4/6/2012	9:41:53 PM	Bypass valve closed
4/6/2012	9:41:53 PM	Bubbler valve closed
4/6/2012	9:41:53 PM	Helium valve opened
4/6/2012	9:41:53 PM	Main Vac valve opened
4/6/2012	9:41:53 PM	Helium MFC set to  20.000000
4/6/2012	9:41:53 PM	H2 MFC set to  0.000000
4/6/2012	9:41:53 PM	BCl3 MFC set to  0.000000
4/6/2012	9:41:53 PM	PH3 MFC set to  0.000000
4/6/2012	9:41:53 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:41:53 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:41:53 PM	Tube furnace set to 200
4/6/2012	9:42:23 PM	Helium valve closed
4/6/2012	9:42:23 PM	H2 valve closed
4/6/2012	9:42:23 PM	BCl3 valve closed
4/6/2012	9:42:23 PM	PH3 valve closed
4/6/2012	9:42:23 PM	SiCl4 pre valve closed
4/6/2012	9:42:23 PM	SiCl4 post valve closed
4/6/2012	9:42:23 PM	Bypass valve closed
4/6/2012	9:42:23 PM	Bubbler valve closed
4/6/2012	9:42:23 PM	Main Vac valve opened
4/6/2012	9:42:23 PM	Helium MFC set to  0.000000
4/6/2012	9:42:23 PM	H2 MFC set to  0.000000
4/6/2012	9:42:23 PM	BCl3 MFC set to  0.000000
4/6/2012	9:42:23 PM	PH3 MFC set to  0.000000
4/6/2012	9:42:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:42:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:42:23 PM	Tube furnace set to 200
4/6/2012	9:42:53 PM	H2 valve closed
4/6/2012	9:42:53 PM	BCl3 valve closed
4/6/2012	9:42:53 PM	PH3 valve closed
4/6/2012	9:42:53 PM	SiCl4 pre valve closed
4/6/2012	9:42:53 PM	SiCl4 post valve closed
4/6/2012	9:42:53 PM	Bypass valve closed
4/6/2012	9:42:53 PM	Bubbler valve closed
4/6/2012	9:42:53 PM	Helium valve opened
4/6/2012	9:42:53 PM	Main Vac valve opened
4/6/2012	9:42:53 PM	Helium MFC set to  20.000000
4/6/2012	9:42:53 PM	H2 MFC set to  0.000000
4/6/2012	9:42:53 PM	BCl3 MFC set to  0.000000
4/6/2012	9:42:53 PM	PH3 MFC set to  0.000000
4/6/2012	9:42:53 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:42:53 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:42:53 PM	Tube furnace set to 200
4/6/2012	9:43:23 PM	Helium valve closed
4/6/2012	9:43:23 PM	H2 valve closed
4/6/2012	9:43:23 PM	BCl3 valve closed
4/6/2012	9:43:23 PM	PH3 valve closed
4/6/2012	9:43:23 PM	SiCl4 pre valve closed
4/6/2012	9:43:23 PM	SiCl4 post valve closed
4/6/2012	9:43:23 PM	Bypass valve closed
4/6/2012	9:43:23 PM	Bubbler valve closed
4/6/2012	9:43:23 PM	Main Vac valve opened
4/6/2012	9:43:23 PM	Helium MFC set to  0.000000
4/6/2012	9:43:23 PM	H2 MFC set to  0.000000
4/6/2012	9:43:23 PM	BCl3 MFC set to  0.000000
4/6/2012	9:43:23 PM	PH3 MFC set to  0.000000
4/6/2012	9:43:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:43:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:43:24 PM	Tube furnace set to 200
4/6/2012	9:43:54 PM	H2 valve closed
4/6/2012	9:43:54 PM	BCl3 valve closed
4/6/2012	9:43:54 PM	PH3 valve closed
4/6/2012	9:43:54 PM	SiCl4 pre valve closed
4/6/2012	9:43:54 PM	SiCl4 post valve closed
4/6/2012	9:43:54 PM	Bypass valve closed
4/6/2012	9:43:54 PM	Bubbler valve closed
4/6/2012	9:43:54 PM	Helium valve opened
4/6/2012	9:43:54 PM	Main Vac valve opened
4/6/2012	9:43:54 PM	Helium MFC set to  20.000000
4/6/2012	9:43:54 PM	H2 MFC set to  0.000000
4/6/2012	9:43:54 PM	BCl3 MFC set to  0.000000
4/6/2012	9:43:54 PM	PH3 MFC set to  0.000000
4/6/2012	9:43:54 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:43:54 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:43:54 PM	Tube furnace set to 200
4/6/2012	9:44:24 PM	Helium valve closed
4/6/2012	9:44:24 PM	H2 valve closed
4/6/2012	9:44:24 PM	BCl3 valve closed
4/6/2012	9:44:24 PM	PH3 valve closed
4/6/2012	9:44:24 PM	SiCl4 pre valve closed
4/6/2012	9:44:24 PM	SiCl4 post valve closed
4/6/2012	9:44:24 PM	Bypass valve closed
4/6/2012	9:44:24 PM	Bubbler valve closed
4/6/2012	9:44:24 PM	Main Vac valve opened
4/6/2012	9:44:24 PM	Helium MFC set to  0.000000
4/6/2012	9:44:24 PM	H2 MFC set to  0.000000
4/6/2012	9:44:24 PM	BCl3 MFC set to  0.000000
4/6/2012	9:44:24 PM	PH3 MFC set to  0.000000
4/6/2012	9:44:24 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:44:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:44:24 PM	Tube furnace set to 200
4/6/2012	9:44:54 PM	H2 valve closed
4/6/2012	9:44:54 PM	BCl3 valve closed
4/6/2012	9:44:54 PM	PH3 valve closed
4/6/2012	9:44:54 PM	SiCl4 pre valve closed
4/6/2012	9:44:54 PM	SiCl4 post valve closed
4/6/2012	9:44:54 PM	Bypass valve closed
4/6/2012	9:44:54 PM	Bubbler valve closed
4/6/2012	9:44:54 PM	Helium valve opened
4/6/2012	9:44:54 PM	Main Vac valve opened
4/6/2012	9:44:54 PM	Helium MFC set to  20.000000
4/6/2012	9:44:54 PM	H2 MFC set to  0.000000
4/6/2012	9:44:54 PM	BCl3 MFC set to  0.000000
4/6/2012	9:44:54 PM	PH3 MFC set to  0.000000
4/6/2012	9:44:54 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:44:54 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:44:54 PM	Tube furnace set to 200
4/6/2012	9:45:24 PM	Helium valve closed
4/6/2012	9:45:24 PM	H2 valve closed
4/6/2012	9:45:24 PM	BCl3 valve closed
4/6/2012	9:45:24 PM	PH3 valve closed
4/6/2012	9:45:24 PM	SiCl4 pre valve closed
4/6/2012	9:45:24 PM	SiCl4 post valve closed
4/6/2012	9:45:24 PM	Bypass valve closed
4/6/2012	9:45:24 PM	Bubbler valve closed
4/6/2012	9:45:24 PM	Main Vac valve opened
4/6/2012	9:45:24 PM	Helium MFC set to  0.000000
4/6/2012	9:45:24 PM	H2 MFC set to  0.000000
4/6/2012	9:45:24 PM	BCl3 MFC set to  0.000000
4/6/2012	9:45:24 PM	PH3 MFC set to  0.000000
4/6/2012	9:45:24 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:45:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:45:25 PM	Tube furnace set to 200
4/6/2012	9:45:55 PM	H2 valve closed
4/6/2012	9:45:55 PM	BCl3 valve closed
4/6/2012	9:45:55 PM	PH3 valve closed
4/6/2012	9:45:55 PM	SiCl4 pre valve closed
4/6/2012	9:45:55 PM	SiCl4 post valve closed
4/6/2012	9:45:55 PM	Bypass valve closed
4/6/2012	9:45:55 PM	Bubbler valve closed
4/6/2012	9:45:55 PM	Helium valve opened
4/6/2012	9:45:55 PM	Main Vac valve opened
4/6/2012	9:45:55 PM	Helium MFC set to  20.000000
4/6/2012	9:45:55 PM	H2 MFC set to  0.000000
4/6/2012	9:45:55 PM	BCl3 MFC set to  0.000000
4/6/2012	9:45:55 PM	PH3 MFC set to  0.000000
4/6/2012	9:45:55 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:45:55 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:45:55 PM	Tube furnace set to 200
4/6/2012	9:46:25 PM	Helium valve closed
4/6/2012	9:46:25 PM	H2 valve closed
4/6/2012	9:46:25 PM	BCl3 valve closed
4/6/2012	9:46:25 PM	PH3 valve closed
4/6/2012	9:46:25 PM	SiCl4 pre valve closed
4/6/2012	9:46:25 PM	SiCl4 post valve closed
4/6/2012	9:46:25 PM	Bypass valve closed
4/6/2012	9:46:25 PM	Bubbler valve closed
4/6/2012	9:46:25 PM	Main Vac valve opened
4/6/2012	9:46:25 PM	Helium MFC set to  0.000000
4/6/2012	9:46:25 PM	H2 MFC set to  0.000000
4/6/2012	9:46:25 PM	BCl3 MFC set to  0.000000
4/6/2012	9:46:25 PM	PH3 MFC set to  0.000000
4/6/2012	9:46:25 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:46:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:46:25 PM	Tube furnace set to 200
4/6/2012	9:46:55 PM	H2 valve closed
4/6/2012	9:46:55 PM	BCl3 valve closed
4/6/2012	9:46:55 PM	PH3 valve closed
4/6/2012	9:46:55 PM	SiCl4 pre valve closed
4/6/2012	9:46:55 PM	SiCl4 post valve closed
4/6/2012	9:46:55 PM	Bypass valve closed
4/6/2012	9:46:55 PM	Bubbler valve closed
4/6/2012	9:46:55 PM	Helium valve opened
4/6/2012	9:46:55 PM	Main Vac valve opened
4/6/2012	9:46:55 PM	Helium MFC set to  20.000000
4/6/2012	9:46:55 PM	H2 MFC set to  0.000000
4/6/2012	9:46:55 PM	BCl3 MFC set to  0.000000
4/6/2012	9:46:55 PM	PH3 MFC set to  0.000000
4/6/2012	9:46:55 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:46:55 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:46:55 PM	Tube furnace set to 200
4/6/2012	9:47:25 PM	Helium valve closed
4/6/2012	9:47:25 PM	H2 valve closed
4/6/2012	9:47:25 PM	BCl3 valve closed
4/6/2012	9:47:25 PM	PH3 valve closed
4/6/2012	9:47:25 PM	SiCl4 pre valve closed
4/6/2012	9:47:25 PM	SiCl4 post valve closed
4/6/2012	9:47:25 PM	Bypass valve closed
4/6/2012	9:47:25 PM	Bubbler valve closed
4/6/2012	9:47:25 PM	Main Vac valve opened
4/6/2012	9:47:25 PM	Helium MFC set to  0.000000
4/6/2012	9:47:25 PM	H2 MFC set to  0.000000
4/6/2012	9:47:25 PM	BCl3 MFC set to  0.000000
4/6/2012	9:47:25 PM	PH3 MFC set to  0.000000
4/6/2012	9:47:25 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:47:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:47:25 PM	Tube furnace set to 0
4/6/2012	9:47:26 PM	Run finished at 9:47 PM
4/6/2012	9:55:48 PM	Recipe started at 9:55 PM
4/6/2012	9:55:48 PM	Helium valve closed
4/6/2012	9:55:48 PM	H2 valve closed
4/6/2012	9:55:48 PM	BCl3 valve closed
4/6/2012	9:55:48 PM	PH3 valve closed
4/6/2012	9:55:48 PM	SiCl4 pre valve closed
4/6/2012	9:55:48 PM	SiCl4 post valve closed
4/6/2012	9:55:48 PM	Bypass valve closed
4/6/2012	9:55:48 PM	Bubbler valve closed
4/6/2012	9:55:48 PM	Main Vac valve opened
4/6/2012	9:55:48 PM	Helium MFC set to  0.000000
4/6/2012	9:55:48 PM	H2 MFC set to  0.000000
4/6/2012	9:55:48 PM	BCl3 MFC set to  0.000000
4/6/2012	9:55:48 PM	PH3 MFC set to  0.000000
4/6/2012	9:55:48 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:55:48 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:55:48 PM	Tube furnace set to 0
4/6/2012	9:56:18 PM	H2 valve closed
4/6/2012	9:56:18 PM	BCl3 valve closed
4/6/2012	9:56:18 PM	PH3 valve closed
4/6/2012	9:56:18 PM	SiCl4 pre valve closed
4/6/2012	9:56:18 PM	SiCl4 post valve closed
4/6/2012	9:56:18 PM	Bypass valve closed
4/6/2012	9:56:18 PM	Bubbler valve closed
4/6/2012	9:56:18 PM	Helium valve opened
4/6/2012	9:56:18 PM	Main Vac valve opened
4/6/2012	9:56:18 PM	Helium MFC set to  20.000000
4/6/2012	9:56:18 PM	H2 MFC set to  0.000000
4/6/2012	9:56:18 PM	BCl3 MFC set to  0.000000
4/6/2012	9:56:18 PM	PH3 MFC set to  0.000000
4/6/2012	9:56:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:56:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:56:18 PM	Tube furnace set to 0
4/6/2012	9:56:48 PM	Helium valve closed
4/6/2012	9:56:48 PM	H2 valve closed
4/6/2012	9:56:48 PM	BCl3 valve closed
4/6/2012	9:56:48 PM	PH3 valve closed
4/6/2012	9:56:48 PM	SiCl4 pre valve closed
4/6/2012	9:56:48 PM	SiCl4 post valve closed
4/6/2012	9:56:48 PM	Bypass valve closed
4/6/2012	9:56:48 PM	Bubbler valve closed
4/6/2012	9:56:48 PM	Main Vac valve opened
4/6/2012	9:56:48 PM	Helium MFC set to  0.000000
4/6/2012	9:56:48 PM	H2 MFC set to  0.000000
4/6/2012	9:56:48 PM	BCl3 MFC set to  0.000000
4/6/2012	9:56:48 PM	PH3 MFC set to  0.000000
4/6/2012	9:56:48 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:56:48 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:56:48 PM	Tube furnace set to 0
4/6/2012	9:57:19 PM	H2 valve closed
4/6/2012	9:57:19 PM	BCl3 valve closed
4/6/2012	9:57:19 PM	PH3 valve closed
4/6/2012	9:57:19 PM	SiCl4 pre valve closed
4/6/2012	9:57:19 PM	SiCl4 post valve closed
4/6/2012	9:57:19 PM	Bypass valve closed
4/6/2012	9:57:19 PM	Bubbler valve closed
4/6/2012	9:57:19 PM	Helium valve opened
4/6/2012	9:57:19 PM	Main Vac valve opened
4/6/2012	9:57:19 PM	Helium MFC set to  20.000000
4/6/2012	9:57:19 PM	H2 MFC set to  0.000000
4/6/2012	9:57:19 PM	BCl3 MFC set to  0.000000
4/6/2012	9:57:19 PM	PH3 MFC set to  0.000000
4/6/2012	9:57:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:57:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:57:19 PM	Tube furnace set to 0
4/6/2012	9:57:49 PM	Helium valve closed
4/6/2012	9:57:49 PM	H2 valve closed
4/6/2012	9:57:49 PM	BCl3 valve closed
4/6/2012	9:57:49 PM	PH3 valve closed
4/6/2012	9:57:49 PM	SiCl4 pre valve closed
4/6/2012	9:57:49 PM	SiCl4 post valve closed
4/6/2012	9:57:49 PM	Bypass valve closed
4/6/2012	9:57:49 PM	Bubbler valve closed
4/6/2012	9:57:49 PM	Main Vac valve opened
4/6/2012	9:57:49 PM	Helium MFC set to  0.000000
4/6/2012	9:57:49 PM	H2 MFC set to  0.000000
4/6/2012	9:57:49 PM	BCl3 MFC set to  0.000000
4/6/2012	9:57:49 PM	PH3 MFC set to  0.000000
4/6/2012	9:57:49 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:57:49 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:57:49 PM	Tube furnace set to 0
4/6/2012	9:58:19 PM	H2 valve closed
4/6/2012	9:58:19 PM	BCl3 valve closed
4/6/2012	9:58:19 PM	PH3 valve closed
4/6/2012	9:58:19 PM	SiCl4 pre valve closed
4/6/2012	9:58:19 PM	SiCl4 post valve closed
4/6/2012	9:58:19 PM	Bypass valve closed
4/6/2012	9:58:19 PM	Bubbler valve closed
4/6/2012	9:58:19 PM	Helium valve opened
4/6/2012	9:58:19 PM	Main Vac valve opened
4/6/2012	9:58:19 PM	Helium MFC set to  20.000000
4/6/2012	9:58:19 PM	H2 MFC set to  0.000000
4/6/2012	9:58:19 PM	BCl3 MFC set to  0.000000
4/6/2012	9:58:19 PM	PH3 MFC set to  0.000000
4/6/2012	9:58:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:58:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:58:19 PM	Tube furnace set to 0
4/6/2012	9:58:49 PM	Helium valve closed
4/6/2012	9:58:49 PM	H2 valve closed
4/6/2012	9:58:49 PM	BCl3 valve closed
4/6/2012	9:58:49 PM	PH3 valve closed
4/6/2012	9:58:49 PM	SiCl4 pre valve closed
4/6/2012	9:58:49 PM	SiCl4 post valve closed
4/6/2012	9:58:49 PM	Bypass valve closed
4/6/2012	9:58:49 PM	Bubbler valve closed
4/6/2012	9:58:49 PM	Main Vac valve opened
4/6/2012	9:58:49 PM	Helium MFC set to  0.000000
4/6/2012	9:58:49 PM	H2 MFC set to  0.000000
4/6/2012	9:58:49 PM	BCl3 MFC set to  0.000000
4/6/2012	9:58:49 PM	PH3 MFC set to  0.000000
4/6/2012	9:58:49 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:58:49 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:58:49 PM	Tube furnace set to 0
4/6/2012	9:59:19 PM	H2 valve closed
4/6/2012	9:59:19 PM	BCl3 valve closed
4/6/2012	9:59:19 PM	PH3 valve closed
4/6/2012	9:59:19 PM	SiCl4 pre valve closed
4/6/2012	9:59:19 PM	SiCl4 post valve closed
4/6/2012	9:59:19 PM	Bypass valve closed
4/6/2012	9:59:19 PM	Bubbler valve closed
4/6/2012	9:59:19 PM	Helium valve opened
4/6/2012	9:59:19 PM	Main Vac valve opened
4/6/2012	9:59:19 PM	Helium MFC set to  20.000000
4/6/2012	9:59:19 PM	H2 MFC set to  0.000000
4/6/2012	9:59:19 PM	BCl3 MFC set to  0.000000
4/6/2012	9:59:19 PM	PH3 MFC set to  0.000000
4/6/2012	9:59:20 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:59:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:59:20 PM	Tube furnace set to 0
4/6/2012	9:59:50 PM	Helium valve closed
4/6/2012	9:59:50 PM	H2 valve closed
4/6/2012	9:59:50 PM	BCl3 valve closed
4/6/2012	9:59:50 PM	PH3 valve closed
4/6/2012	9:59:50 PM	SiCl4 pre valve closed
4/6/2012	9:59:50 PM	SiCl4 post valve closed
4/6/2012	9:59:50 PM	Bypass valve closed
4/6/2012	9:59:50 PM	Bubbler valve closed
4/6/2012	9:59:50 PM	Main Vac valve opened
4/6/2012	9:59:50 PM	Helium MFC set to  0.000000
4/6/2012	9:59:50 PM	H2 MFC set to  0.000000
4/6/2012	9:59:50 PM	BCl3 MFC set to  0.000000
4/6/2012	9:59:50 PM	PH3 MFC set to  0.000000
4/6/2012	9:59:50 PM	SiCl4 MFC set to  0.000000
4/6/2012	9:59:50 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	9:59:50 PM	Tube furnace set to 0
4/6/2012	10:00:20 PM	H2 valve closed
4/6/2012	10:00:20 PM	BCl3 valve closed
4/6/2012	10:00:20 PM	PH3 valve closed
4/6/2012	10:00:20 PM	SiCl4 pre valve closed
4/6/2012	10:00:20 PM	SiCl4 post valve closed
4/6/2012	10:00:20 PM	Bypass valve closed
4/6/2012	10:00:20 PM	Bubbler valve closed
4/6/2012	10:00:20 PM	Helium valve opened
4/6/2012	10:00:20 PM	Main Vac valve opened
4/6/2012	10:00:20 PM	Helium MFC set to  20.000000
4/6/2012	10:00:20 PM	H2 MFC set to  0.000000
4/6/2012	10:00:20 PM	BCl3 MFC set to  0.000000
4/6/2012	10:00:20 PM	PH3 MFC set to  0.000000
4/6/2012	10:00:20 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:00:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:00:20 PM	Tube furnace set to 0
4/6/2012	10:00:50 PM	Helium valve closed
4/6/2012	10:00:50 PM	H2 valve closed
4/6/2012	10:00:50 PM	BCl3 valve closed
4/6/2012	10:00:50 PM	PH3 valve closed
4/6/2012	10:00:50 PM	SiCl4 pre valve closed
4/6/2012	10:00:50 PM	SiCl4 post valve closed
4/6/2012	10:00:50 PM	Bypass valve closed
4/6/2012	10:00:50 PM	Bubbler valve closed
4/6/2012	10:00:50 PM	Main Vac valve opened
4/6/2012	10:00:50 PM	Helium MFC set to  0.000000
4/6/2012	10:00:50 PM	H2 MFC set to  0.000000
4/6/2012	10:00:50 PM	BCl3 MFC set to  0.000000
4/6/2012	10:00:50 PM	PH3 MFC set to  0.000000
4/6/2012	10:00:50 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:00:50 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:00:50 PM	Tube furnace set to 0
4/6/2012	10:01:20 PM	H2 valve closed
4/6/2012	10:01:20 PM	BCl3 valve closed
4/6/2012	10:01:20 PM	PH3 valve closed
4/6/2012	10:01:20 PM	SiCl4 pre valve closed
4/6/2012	10:01:20 PM	SiCl4 post valve closed
4/6/2012	10:01:20 PM	Bypass valve closed
4/6/2012	10:01:20 PM	Bubbler valve closed
4/6/2012	10:01:20 PM	Helium valve opened
4/6/2012	10:01:20 PM	Main Vac valve opened
4/6/2012	10:01:20 PM	Helium MFC set to  20.000000
4/6/2012	10:01:20 PM	H2 MFC set to  0.000000
4/6/2012	10:01:20 PM	BCl3 MFC set to  0.000000
4/6/2012	10:01:20 PM	PH3 MFC set to  0.000000
4/6/2012	10:01:20 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:01:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:01:21 PM	Tube furnace set to 0
4/6/2012	10:01:51 PM	Helium valve closed
4/6/2012	10:01:51 PM	H2 valve closed
4/6/2012	10:01:51 PM	BCl3 valve closed
4/6/2012	10:01:51 PM	PH3 valve closed
4/6/2012	10:01:51 PM	SiCl4 pre valve closed
4/6/2012	10:01:51 PM	SiCl4 post valve closed
4/6/2012	10:01:51 PM	Bypass valve closed
4/6/2012	10:01:51 PM	Bubbler valve closed
4/6/2012	10:01:51 PM	Main Vac valve opened
4/6/2012	10:01:51 PM	Helium MFC set to  0.000000
4/6/2012	10:01:51 PM	H2 MFC set to  0.000000
4/6/2012	10:01:51 PM	BCl3 MFC set to  0.000000
4/6/2012	10:01:51 PM	PH3 MFC set to  0.000000
4/6/2012	10:01:51 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:01:51 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:01:51 PM	Tube furnace set to 0
4/6/2012	10:02:21 PM	H2 valve closed
4/6/2012	10:02:21 PM	BCl3 valve closed
4/6/2012	10:02:21 PM	PH3 valve closed
4/6/2012	10:02:21 PM	SiCl4 pre valve closed
4/6/2012	10:02:21 PM	SiCl4 post valve closed
4/6/2012	10:02:21 PM	Bypass valve closed
4/6/2012	10:02:21 PM	Bubbler valve closed
4/6/2012	10:02:21 PM	Helium valve opened
4/6/2012	10:02:21 PM	Main Vac valve opened
4/6/2012	10:02:21 PM	Helium MFC set to  20.000000
4/6/2012	10:02:21 PM	H2 MFC set to  0.000000
4/6/2012	10:02:21 PM	BCl3 MFC set to  0.000000
4/6/2012	10:02:21 PM	PH3 MFC set to  0.000000
4/6/2012	10:02:21 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:02:21 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:02:21 PM	Tube furnace set to 0
4/6/2012	10:02:51 PM	Helium valve closed
4/6/2012	10:02:51 PM	H2 valve closed
4/6/2012	10:02:51 PM	BCl3 valve closed
4/6/2012	10:02:51 PM	PH3 valve closed
4/6/2012	10:02:51 PM	SiCl4 pre valve closed
4/6/2012	10:02:51 PM	SiCl4 post valve closed
4/6/2012	10:02:51 PM	Bypass valve closed
4/6/2012	10:02:51 PM	Bubbler valve closed
4/6/2012	10:02:51 PM	Main Vac valve opened
4/6/2012	10:02:51 PM	Helium MFC set to  0.000000
4/6/2012	10:02:51 PM	H2 MFC set to  0.000000
4/6/2012	10:02:51 PM	BCl3 MFC set to  0.000000
4/6/2012	10:02:51 PM	PH3 MFC set to  0.000000
4/6/2012	10:02:51 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:02:51 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:02:51 PM	Tube furnace set to 0
4/6/2012	10:03:21 PM	H2 valve closed
4/6/2012	10:03:21 PM	BCl3 valve closed
4/6/2012	10:03:21 PM	PH3 valve closed
4/6/2012	10:03:21 PM	SiCl4 pre valve closed
4/6/2012	10:03:21 PM	SiCl4 post valve closed
4/6/2012	10:03:21 PM	Bypass valve closed
4/6/2012	10:03:21 PM	Bubbler valve closed
4/6/2012	10:03:21 PM	Helium valve opened
4/6/2012	10:03:21 PM	Main Vac valve opened
4/6/2012	10:03:21 PM	Helium MFC set to  20.000000
4/6/2012	10:03:21 PM	H2 MFC set to  0.000000
4/6/2012	10:03:21 PM	BCl3 MFC set to  0.000000
4/6/2012	10:03:21 PM	PH3 MFC set to  0.000000
4/6/2012	10:03:21 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:03:21 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:03:22 PM	Tube furnace set to 0
4/6/2012	10:03:52 PM	Helium valve closed
4/6/2012	10:03:52 PM	H2 valve closed
4/6/2012	10:03:52 PM	BCl3 valve closed
4/6/2012	10:03:52 PM	PH3 valve closed
4/6/2012	10:03:52 PM	SiCl4 pre valve closed
4/6/2012	10:03:52 PM	SiCl4 post valve closed
4/6/2012	10:03:52 PM	Bypass valve closed
4/6/2012	10:03:52 PM	Bubbler valve closed
4/6/2012	10:03:52 PM	Main Vac valve opened
4/6/2012	10:03:52 PM	Helium MFC set to  0.000000
4/6/2012	10:03:52 PM	H2 MFC set to  0.000000
4/6/2012	10:03:52 PM	BCl3 MFC set to  0.000000
4/6/2012	10:03:52 PM	PH3 MFC set to  0.000000
4/6/2012	10:03:52 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:03:52 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:03:52 PM	Tube furnace set to 0
4/6/2012	10:04:22 PM	H2 valve closed
4/6/2012	10:04:22 PM	BCl3 valve closed
4/6/2012	10:04:22 PM	PH3 valve closed
4/6/2012	10:04:22 PM	SiCl4 pre valve closed
4/6/2012	10:04:22 PM	SiCl4 post valve closed
4/6/2012	10:04:22 PM	Bypass valve closed
4/6/2012	10:04:22 PM	Bubbler valve closed
4/6/2012	10:04:22 PM	Helium valve opened
4/6/2012	10:04:22 PM	Main Vac valve opened
4/6/2012	10:04:22 PM	Helium MFC set to  20.000000
4/6/2012	10:04:22 PM	H2 MFC set to  0.000000
4/6/2012	10:04:22 PM	BCl3 MFC set to  0.000000
4/6/2012	10:04:22 PM	PH3 MFC set to  0.000000
4/6/2012	10:04:22 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:04:22 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:04:22 PM	Tube furnace set to 0
4/6/2012	10:04:52 PM	Helium valve closed
4/6/2012	10:04:52 PM	H2 valve closed
4/6/2012	10:04:52 PM	BCl3 valve closed
4/6/2012	10:04:52 PM	PH3 valve closed
4/6/2012	10:04:52 PM	SiCl4 pre valve closed
4/6/2012	10:04:52 PM	SiCl4 post valve closed
4/6/2012	10:04:52 PM	Bypass valve closed
4/6/2012	10:04:52 PM	Bubbler valve closed
4/6/2012	10:04:52 PM	Main Vac valve opened
4/6/2012	10:04:52 PM	Helium MFC set to  0.000000
4/6/2012	10:04:52 PM	H2 MFC set to  0.000000
4/6/2012	10:04:52 PM	BCl3 MFC set to  0.000000
4/6/2012	10:04:52 PM	PH3 MFC set to  0.000000
4/6/2012	10:04:52 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:04:52 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:04:52 PM	Tube furnace set to 200
4/6/2012	10:05:22 PM	H2 valve closed
4/6/2012	10:05:22 PM	BCl3 valve closed
4/6/2012	10:05:22 PM	PH3 valve closed
4/6/2012	10:05:22 PM	SiCl4 pre valve closed
4/6/2012	10:05:22 PM	SiCl4 post valve closed
4/6/2012	10:05:22 PM	Bypass valve closed
4/6/2012	10:05:22 PM	Bubbler valve closed
4/6/2012	10:05:22 PM	Helium valve opened
4/6/2012	10:05:22 PM	Main Vac valve opened
4/6/2012	10:05:22 PM	Helium MFC set to  20.000000
4/6/2012	10:05:22 PM	H2 MFC set to  0.000000
4/6/2012	10:05:22 PM	BCl3 MFC set to  0.000000
4/6/2012	10:05:22 PM	PH3 MFC set to  0.000000
4/6/2012	10:05:22 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:05:22 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:05:22 PM	Tube furnace set to 200
4/6/2012	10:05:52 PM	Helium valve closed
4/6/2012	10:05:52 PM	H2 valve closed
4/6/2012	10:05:52 PM	BCl3 valve closed
4/6/2012	10:05:52 PM	PH3 valve closed
4/6/2012	10:05:53 PM	SiCl4 pre valve closed
4/6/2012	10:05:53 PM	SiCl4 post valve closed
4/6/2012	10:05:53 PM	Bypass valve closed
4/6/2012	10:05:53 PM	Bubbler valve closed
4/6/2012	10:05:53 PM	Main Vac valve opened
4/6/2012	10:05:53 PM	Helium MFC set to  0.000000
4/6/2012	10:05:53 PM	H2 MFC set to  0.000000
4/6/2012	10:05:53 PM	BCl3 MFC set to  0.000000
4/6/2012	10:05:53 PM	PH3 MFC set to  0.000000
4/6/2012	10:05:53 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:05:53 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:05:53 PM	Tube furnace set to 200
4/6/2012	10:06:23 PM	H2 valve closed
4/6/2012	10:06:23 PM	BCl3 valve closed
4/6/2012	10:06:23 PM	PH3 valve closed
4/6/2012	10:06:23 PM	SiCl4 pre valve closed
4/6/2012	10:06:23 PM	SiCl4 post valve closed
4/6/2012	10:06:23 PM	Bypass valve closed
4/6/2012	10:06:23 PM	Bubbler valve closed
4/6/2012	10:06:23 PM	Helium valve opened
4/6/2012	10:06:23 PM	Main Vac valve opened
4/6/2012	10:06:23 PM	Helium MFC set to  20.000000
4/6/2012	10:06:23 PM	H2 MFC set to  0.000000
4/6/2012	10:06:23 PM	BCl3 MFC set to  0.000000
4/6/2012	10:06:23 PM	PH3 MFC set to  0.000000
4/6/2012	10:06:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:06:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:06:23 PM	Tube furnace set to 200
4/6/2012	10:06:53 PM	Helium valve closed
4/6/2012	10:06:53 PM	H2 valve closed
4/6/2012	10:06:53 PM	BCl3 valve closed
4/6/2012	10:06:53 PM	PH3 valve closed
4/6/2012	10:06:53 PM	SiCl4 pre valve closed
4/6/2012	10:06:53 PM	SiCl4 post valve closed
4/6/2012	10:06:53 PM	Bypass valve closed
4/6/2012	10:06:53 PM	Bubbler valve closed
4/6/2012	10:06:53 PM	Main Vac valve opened
4/6/2012	10:06:53 PM	Helium MFC set to  0.000000
4/6/2012	10:06:53 PM	H2 MFC set to  0.000000
4/6/2012	10:06:53 PM	BCl3 MFC set to  0.000000
4/6/2012	10:06:53 PM	PH3 MFC set to  0.000000
4/6/2012	10:06:53 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:06:53 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:06:53 PM	Tube furnace set to 200
4/6/2012	10:07:23 PM	H2 valve closed
4/6/2012	10:07:23 PM	BCl3 valve closed
4/6/2012	10:07:23 PM	PH3 valve closed
4/6/2012	10:07:23 PM	SiCl4 pre valve closed
4/6/2012	10:07:23 PM	SiCl4 post valve closed
4/6/2012	10:07:23 PM	Bypass valve closed
4/6/2012	10:07:23 PM	Bubbler valve closed
4/6/2012	10:07:23 PM	Helium valve opened
4/6/2012	10:07:23 PM	Main Vac valve opened
4/6/2012	10:07:23 PM	Helium MFC set to  20.000000
4/6/2012	10:07:23 PM	H2 MFC set to  0.000000
4/6/2012	10:07:23 PM	BCl3 MFC set to  0.000000
4/6/2012	10:07:23 PM	PH3 MFC set to  0.000000
4/6/2012	10:07:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:07:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:07:23 PM	Tube furnace set to 200
4/6/2012	10:07:53 PM	Helium valve closed
4/6/2012	10:07:53 PM	H2 valve closed
4/6/2012	10:07:53 PM	BCl3 valve closed
4/6/2012	10:07:53 PM	PH3 valve closed
4/6/2012	10:07:53 PM	SiCl4 pre valve closed
4/6/2012	10:07:53 PM	SiCl4 post valve closed
4/6/2012	10:07:53 PM	Bypass valve closed
4/6/2012	10:07:53 PM	Bubbler valve closed
4/6/2012	10:07:53 PM	Main Vac valve opened
4/6/2012	10:07:53 PM	Helium MFC set to  0.000000
4/6/2012	10:07:53 PM	H2 MFC set to  0.000000
4/6/2012	10:07:53 PM	BCl3 MFC set to  0.000000
4/6/2012	10:07:53 PM	PH3 MFC set to  0.000000
4/6/2012	10:07:53 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:07:53 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:07:54 PM	Tube furnace set to 200
4/6/2012	10:08:24 PM	H2 valve closed
4/6/2012	10:08:24 PM	BCl3 valve closed
4/6/2012	10:08:24 PM	PH3 valve closed
4/6/2012	10:08:24 PM	SiCl4 pre valve closed
4/6/2012	10:08:24 PM	SiCl4 post valve closed
4/6/2012	10:08:24 PM	Bypass valve closed
4/6/2012	10:08:24 PM	Bubbler valve closed
4/6/2012	10:08:24 PM	Helium valve opened
4/6/2012	10:08:24 PM	Main Vac valve opened
4/6/2012	10:08:24 PM	Helium MFC set to  20.000000
4/6/2012	10:08:24 PM	H2 MFC set to  0.000000
4/6/2012	10:08:24 PM	BCl3 MFC set to  0.000000
4/6/2012	10:08:24 PM	PH3 MFC set to  0.000000
4/6/2012	10:08:24 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:08:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:08:24 PM	Tube furnace set to 200
4/6/2012	10:08:54 PM	Helium valve closed
4/6/2012	10:08:54 PM	H2 valve closed
4/6/2012	10:08:54 PM	BCl3 valve closed
4/6/2012	10:08:54 PM	PH3 valve closed
4/6/2012	10:08:54 PM	SiCl4 pre valve closed
4/6/2012	10:08:54 PM	SiCl4 post valve closed
4/6/2012	10:08:54 PM	Bypass valve closed
4/6/2012	10:08:54 PM	Bubbler valve closed
4/6/2012	10:08:54 PM	Main Vac valve opened
4/6/2012	10:08:54 PM	Helium MFC set to  0.000000
4/6/2012	10:08:54 PM	H2 MFC set to  0.000000
4/6/2012	10:08:54 PM	BCl3 MFC set to  0.000000
4/6/2012	10:08:54 PM	PH3 MFC set to  0.000000
4/6/2012	10:08:54 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:08:54 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:08:54 PM	Tube furnace set to 200
4/6/2012	10:09:24 PM	H2 valve closed
4/6/2012	10:09:24 PM	BCl3 valve closed
4/6/2012	10:09:24 PM	PH3 valve closed
4/6/2012	10:09:24 PM	SiCl4 pre valve closed
4/6/2012	10:09:24 PM	SiCl4 post valve closed
4/6/2012	10:09:24 PM	Bypass valve closed
4/6/2012	10:09:24 PM	Bubbler valve closed
4/6/2012	10:09:24 PM	Helium valve opened
4/6/2012	10:09:24 PM	Main Vac valve opened
4/6/2012	10:09:24 PM	Helium MFC set to  20.000000
4/6/2012	10:09:24 PM	H2 MFC set to  0.000000
4/6/2012	10:09:24 PM	BCl3 MFC set to  0.000000
4/6/2012	10:09:24 PM	PH3 MFC set to  0.000000
4/6/2012	10:09:24 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:09:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:09:24 PM	Tube furnace set to 200
4/6/2012	10:09:54 PM	Helium valve closed
4/6/2012	10:09:54 PM	H2 valve closed
4/6/2012	10:09:54 PM	BCl3 valve closed
4/6/2012	10:09:54 PM	PH3 valve closed
4/6/2012	10:09:54 PM	SiCl4 pre valve closed
4/6/2012	10:09:54 PM	SiCl4 post valve closed
4/6/2012	10:09:54 PM	Bypass valve closed
4/6/2012	10:09:54 PM	Bubbler valve closed
4/6/2012	10:09:54 PM	Main Vac valve opened
4/6/2012	10:09:54 PM	Helium MFC set to  0.000000
4/6/2012	10:09:54 PM	H2 MFC set to  0.000000
4/6/2012	10:09:54 PM	BCl3 MFC set to  0.000000
4/6/2012	10:09:54 PM	PH3 MFC set to  0.000000
4/6/2012	10:09:54 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:09:54 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:09:55 PM	Tube furnace set to 200
4/6/2012	10:10:25 PM	H2 valve closed
4/6/2012	10:10:25 PM	BCl3 valve closed
4/6/2012	10:10:25 PM	PH3 valve closed
4/6/2012	10:10:25 PM	SiCl4 pre valve closed
4/6/2012	10:10:25 PM	SiCl4 post valve closed
4/6/2012	10:10:25 PM	Bypass valve closed
4/6/2012	10:10:25 PM	Bubbler valve closed
4/6/2012	10:10:25 PM	Helium valve opened
4/6/2012	10:10:25 PM	Main Vac valve opened
4/6/2012	10:10:25 PM	Helium MFC set to  20.000000
4/6/2012	10:10:25 PM	H2 MFC set to  0.000000
4/6/2012	10:10:25 PM	BCl3 MFC set to  0.000000
4/6/2012	10:10:25 PM	PH3 MFC set to  0.000000
4/6/2012	10:10:25 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:10:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:10:25 PM	Tube furnace set to 200
4/6/2012	10:10:55 PM	Helium valve closed
4/6/2012	10:10:55 PM	H2 valve closed
4/6/2012	10:10:55 PM	BCl3 valve closed
4/6/2012	10:10:55 PM	PH3 valve closed
4/6/2012	10:10:55 PM	SiCl4 pre valve closed
4/6/2012	10:10:55 PM	SiCl4 post valve closed
4/6/2012	10:10:55 PM	Bypass valve closed
4/6/2012	10:10:55 PM	Bubbler valve closed
4/6/2012	10:10:55 PM	Main Vac valve opened
4/6/2012	10:10:55 PM	Helium MFC set to  0.000000
4/6/2012	10:10:55 PM	H2 MFC set to  0.000000
4/6/2012	10:10:55 PM	BCl3 MFC set to  0.000000
4/6/2012	10:10:55 PM	PH3 MFC set to  0.000000
4/6/2012	10:10:55 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:10:55 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:10:55 PM	Tube furnace set to 0
4/6/2012	10:10:56 PM	Run finished at 10:10 PM
4/6/2012	10:24:02 PM	Main Vac valve closed
4/6/2012	10:24:10 PM	Main Vac valve opened
4/6/2012	10:24:16 PM	Recipe started at 10:24 PM
4/6/2012	10:24:16 PM	Helium valve closed
4/6/2012	10:24:16 PM	H2 valve closed
4/6/2012	10:24:16 PM	BCl3 valve closed
4/6/2012	10:24:16 PM	PH3 valve closed
4/6/2012	10:24:16 PM	SiCl4 pre valve closed
4/6/2012	10:24:16 PM	SiCl4 post valve closed
4/6/2012	10:24:16 PM	Main Vac valve closed
4/6/2012	10:24:16 PM	Bypass valve closed
4/6/2012	10:24:16 PM	Bubbler valve closed
4/6/2012	10:24:16 PM	Helium MFC set to  0.000000
4/6/2012	10:24:16 PM	H2 MFC set to  0.000000
4/6/2012	10:24:16 PM	BCl3 MFC set to  0.000000
4/6/2012	10:24:16 PM	PH3 MFC set to  0.000000
4/6/2012	10:24:16 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:24:16 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:24:16 PM	Tube furnace set to 0
4/6/2012	10:24:19 PM	Helium valve closed
4/6/2012	10:24:19 PM	BCl3 valve closed
4/6/2012	10:24:19 PM	PH3 valve closed
4/6/2012	10:24:19 PM	SiCl4 pre valve closed
4/6/2012	10:24:19 PM	SiCl4 post valve closed
4/6/2012	10:24:19 PM	Main Vac valve closed
4/6/2012	10:24:19 PM	Bypass valve closed
4/6/2012	10:24:19 PM	Bubbler valve closed
4/6/2012	10:24:19 PM	H2 valve opened
4/6/2012	10:24:19 PM	Helium MFC set to  0.000000
4/6/2012	10:24:19 PM	H2 MFC set to  500.000000
4/6/2012	10:24:19 PM	BCl3 MFC set to  0.000000
4/6/2012	10:24:19 PM	PH3 MFC set to  0.000000
4/6/2012	10:24:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:24:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:24:19 PM	Tube furnace set to 0
4/6/2012	10:25:23 PM	Helium valve closed
4/6/2012	10:25:23 PM	BCl3 valve closed
4/6/2012	10:25:23 PM	PH3 valve closed
4/6/2012	10:25:23 PM	SiCl4 pre valve closed
4/6/2012	10:25:23 PM	SiCl4 post valve closed
4/6/2012	10:25:23 PM	Main Vac valve closed
4/6/2012	10:25:23 PM	Bypass valve closed
4/6/2012	10:25:23 PM	H2 valve opened
4/6/2012	10:25:23 PM	Bubbler valve opened
4/6/2012	10:25:23 PM	Helium MFC set to  0.000000
4/6/2012	10:25:23 PM	H2 MFC set to  500.000000
4/6/2012	10:25:23 PM	BCl3 MFC set to  0.000000
4/6/2012	10:25:23 PM	PH3 MFC set to  0.000000
4/6/2012	10:25:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:25:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:25:23 PM	Tube furnace set to 0
4/6/2012	10:25:24 PM	Helium valve closed
4/6/2012	10:25:24 PM	BCl3 valve closed
4/6/2012	10:25:24 PM	PH3 valve closed
4/6/2012	10:25:24 PM	SiCl4 pre valve closed
4/6/2012	10:25:24 PM	SiCl4 post valve closed
4/6/2012	10:25:24 PM	Main Vac valve closed
4/6/2012	10:25:24 PM	Bypass valve closed
4/6/2012	10:25:24 PM	H2 valve opened
4/6/2012	10:25:24 PM	Bubbler valve opened
4/6/2012	10:25:24 PM	Helium MFC set to  0.000000
4/6/2012	10:25:24 PM	H2 MFC set to  500.000000
4/6/2012	10:25:24 PM	BCl3 MFC set to  0.000000
4/6/2012	10:25:24 PM	PH3 MFC set to  0.000000
4/6/2012	10:25:24 PM	SiCl4 MFC set to  0.000000
4/6/2012	10:25:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:25:25 PM	Tube furnace set to 1000
4/6/2012	10:45:25 PM	Helium valve closed
4/6/2012	10:45:25 PM	PH3 valve closed
4/6/2012	10:45:25 PM	Main Vac valve closed
4/6/2012	10:45:25 PM	Bypass valve closed
4/6/2012	10:45:25 PM	H2 valve opened
4/6/2012	10:45:25 PM	BCl3 valve opened
4/6/2012	10:45:25 PM	SiCl4 pre valve opened
4/6/2012	10:45:25 PM	SiCl4 post valve opened
4/6/2012	10:45:25 PM	Bubbler valve opened
4/6/2012	10:45:25 PM	Helium MFC set to  0.000000
4/6/2012	10:45:25 PM	H2 MFC set to  450.000000
4/6/2012	10:45:25 PM	BCl3 MFC set to  1.500000
4/6/2012	10:45:25 PM	PH3 MFC set to  0.000000
4/6/2012	10:45:25 PM	SiCl4 MFC set to  50.000000
4/6/2012	10:45:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	10:45:25 PM	Tube furnace set to 1000
4/6/2012	11:20:25 PM	Helium valve closed
4/6/2012	11:20:25 PM	BCl3 valve closed
4/6/2012	11:20:25 PM	PH3 valve closed
4/6/2012	11:20:25 PM	SiCl4 pre valve closed
4/6/2012	11:20:25 PM	SiCl4 post valve closed
4/6/2012	11:20:25 PM	Main Vac valve closed
4/6/2012	11:20:25 PM	Bypass valve closed
4/6/2012	11:20:25 PM	H2 valve opened
4/6/2012	11:20:25 PM	Bubbler valve opened
4/6/2012	11:20:25 PM	Helium MFC set to  0.000000
4/6/2012	11:20:25 PM	H2 MFC set to  500.000000
4/6/2012	11:20:25 PM	BCl3 MFC set to  0.000000
4/6/2012	11:20:25 PM	PH3 MFC set to  0.000000
4/6/2012	11:20:25 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:20:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:20:25 PM	Tube furnace set to 950
4/6/2012	11:22:25 PM	Helium valve closed
4/6/2012	11:22:25 PM	BCl3 valve closed
4/6/2012	11:22:25 PM	PH3 valve closed
4/6/2012	11:22:25 PM	SiCl4 pre valve closed
4/6/2012	11:22:25 PM	SiCl4 post valve closed
4/6/2012	11:22:25 PM	Main Vac valve closed
4/6/2012	11:22:25 PM	Bypass valve closed
4/6/2012	11:22:25 PM	H2 valve opened
4/6/2012	11:22:25 PM	Bubbler valve opened
4/6/2012	11:22:25 PM	Helium MFC set to  0.000000
4/6/2012	11:22:25 PM	H2 MFC set to  500.000000
4/6/2012	11:22:25 PM	BCl3 MFC set to  0.000000
4/6/2012	11:22:25 PM	PH3 MFC set to  0.000000
4/6/2012	11:22:25 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:22:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:22:25 PM	Tube furnace set to 900
4/6/2012	11:24:25 PM	Helium valve closed
4/6/2012	11:24:25 PM	BCl3 valve closed
4/6/2012	11:24:25 PM	PH3 valve closed
4/6/2012	11:24:25 PM	SiCl4 pre valve closed
4/6/2012	11:24:25 PM	SiCl4 post valve closed
4/6/2012	11:24:25 PM	Main Vac valve closed
4/6/2012	11:24:25 PM	Bypass valve closed
4/6/2012	11:24:25 PM	H2 valve opened
4/6/2012	11:24:25 PM	Bubbler valve opened
4/6/2012	11:24:25 PM	Helium MFC set to  0.000000
4/6/2012	11:24:25 PM	H2 MFC set to  500.000000
4/6/2012	11:24:25 PM	BCl3 MFC set to  0.000000
4/6/2012	11:24:25 PM	PH3 MFC set to  0.000000
4/6/2012	11:24:25 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:24:25 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:24:25 PM	Tube furnace set to 850
4/6/2012	11:26:25 PM	H2 valve closed
4/6/2012	11:26:25 PM	BCl3 valve closed
4/6/2012	11:26:25 PM	PH3 valve closed
4/6/2012	11:26:26 PM	SiCl4 pre valve closed
4/6/2012	11:26:26 PM	SiCl4 post valve closed
4/6/2012	11:26:26 PM	Main Vac valve closed
4/6/2012	11:26:26 PM	Bypass valve closed
4/6/2012	11:26:26 PM	Helium valve opened
4/6/2012	11:26:26 PM	Bubbler valve opened
4/6/2012	11:26:26 PM	Helium MFC set to  500.000000
4/6/2012	11:26:26 PM	H2 MFC set to  0.000000
4/6/2012	11:26:26 PM	BCl3 MFC set to  0.000000
4/6/2012	11:26:26 PM	PH3 MFC set to  0.000000
4/6/2012	11:26:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:26:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:26:26 PM	Tube furnace set to 800
4/6/2012	11:28:26 PM	H2 valve closed
4/6/2012	11:28:26 PM	BCl3 valve closed
4/6/2012	11:28:26 PM	PH3 valve closed
4/6/2012	11:28:26 PM	SiCl4 pre valve closed
4/6/2012	11:28:26 PM	SiCl4 post valve closed
4/6/2012	11:28:26 PM	Main Vac valve closed
4/6/2012	11:28:26 PM	Bypass valve closed
4/6/2012	11:28:26 PM	Helium valve opened
4/6/2012	11:28:26 PM	Bubbler valve opened
4/6/2012	11:28:26 PM	Helium MFC set to  500.000000
4/6/2012	11:28:26 PM	H2 MFC set to  0.000000
4/6/2012	11:28:26 PM	BCl3 MFC set to  0.000000
4/6/2012	11:28:26 PM	PH3 MFC set to  0.000000
4/6/2012	11:28:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:28:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:28:26 PM	Tube furnace set to 750
4/6/2012	11:30:26 PM	H2 valve closed
4/6/2012	11:30:26 PM	BCl3 valve closed
4/6/2012	11:30:26 PM	PH3 valve closed
4/6/2012	11:30:26 PM	SiCl4 pre valve closed
4/6/2012	11:30:26 PM	SiCl4 post valve closed
4/6/2012	11:30:26 PM	Main Vac valve closed
4/6/2012	11:30:26 PM	Bypass valve closed
4/6/2012	11:30:26 PM	Helium valve opened
4/6/2012	11:30:26 PM	Bubbler valve opened
4/6/2012	11:30:26 PM	Helium MFC set to  500.000000
4/6/2012	11:30:26 PM	H2 MFC set to  0.000000
4/6/2012	11:30:26 PM	BCl3 MFC set to  0.000000
4/6/2012	11:30:26 PM	PH3 MFC set to  0.000000
4/6/2012	11:30:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:30:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:30:26 PM	Tube furnace set to 0
4/6/2012	11:50:26 PM	Helium valve closed
4/6/2012	11:50:26 PM	H2 valve closed
4/6/2012	11:50:26 PM	BCl3 valve closed
4/6/2012	11:50:26 PM	PH3 valve closed
4/6/2012	11:50:26 PM	SiCl4 pre valve closed
4/6/2012	11:50:26 PM	SiCl4 post valve closed
4/6/2012	11:50:26 PM	Main Vac valve closed
4/6/2012	11:50:26 PM	Bypass valve closed
4/6/2012	11:50:26 PM	Bubbler valve closed
4/6/2012	11:50:26 PM	Helium MFC set to  0.000000
4/6/2012	11:50:26 PM	H2 MFC set to  0.000000
4/6/2012	11:50:26 PM	BCl3 MFC set to  0.000000
4/6/2012	11:50:26 PM	PH3 MFC set to  0.000000
4/6/2012	11:50:26 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:50:26 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:50:26 PM	Tube furnace set to 0
4/6/2012	11:50:27 PM	Run finished at 11:50 PM
4/6/2012	11:53:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	11:53:19 PM	Recipe started at 11:53 PM
4/6/2012	11:53:19 PM	Helium valve closed
4/6/2012	11:53:19 PM	H2 valve closed
4/6/2012	11:53:19 PM	BCl3 valve closed
4/6/2012	11:53:19 PM	PH3 valve closed
4/6/2012	11:53:19 PM	SiCl4 pre valve closed
4/6/2012	11:53:19 PM	SiCl4 post valve closed
4/6/2012	11:53:19 PM	Main Vac valve closed
4/6/2012	11:53:19 PM	Bypass valve closed
4/6/2012	11:53:19 PM	Bubbler valve closed
4/6/2012	11:53:19 PM	Helium MFC set to  0.000000
4/6/2012	11:53:19 PM	H2 MFC set to  0.000000
4/6/2012	11:53:19 PM	BCl3 MFC set to  0.000000
4/6/2012	11:53:19 PM	PH3 MFC set to  0.000000
4/6/2012	11:53:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:53:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:53:19 PM	Tube furnace set to 0
4/6/2012	11:53:22 PM	H2 valve closed
4/6/2012	11:53:23 PM	BCl3 valve closed
4/6/2012	11:53:23 PM	PH3 valve closed
4/6/2012	11:53:23 PM	SiCl4 pre valve closed
4/6/2012	11:53:23 PM	SiCl4 post valve closed
4/6/2012	11:53:23 PM	Main Vac valve closed
4/6/2012	11:53:23 PM	Bypass valve closed
4/6/2012	11:53:23 PM	Bubbler valve closed
4/6/2012	11:53:23 PM	Helium valve opened
4/6/2012	11:53:23 PM	Helium MFC set to  500.000000
4/6/2012	11:53:23 PM	H2 MFC set to  0.000000
4/6/2012	11:53:23 PM	BCl3 MFC set to  0.000000
4/6/2012	11:53:23 PM	PH3 MFC set to  0.000000
4/6/2012	11:53:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:53:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:53:23 PM	Tube furnace set to 0
4/6/2012	11:53:23 PM	Helium valve closed
4/6/2012	11:53:23 PM	H2 valve closed
4/6/2012	11:53:23 PM	BCl3 valve closed
4/6/2012	11:53:23 PM	PH3 valve closed
4/6/2012	11:53:23 PM	SiCl4 pre valve closed
4/6/2012	11:53:23 PM	SiCl4 post valve closed
4/6/2012	11:53:23 PM	Main Vac valve closed
4/6/2012	11:53:23 PM	Bypass valve closed
4/6/2012	11:53:23 PM	Bubbler valve closed
4/6/2012	11:53:23 PM	Helium MFC set to  0.000000
4/6/2012	11:53:23 PM	H2 MFC set to  0.000000
4/6/2012	11:53:23 PM	BCl3 MFC set to  0.000000
4/6/2012	11:53:23 PM	PH3 MFC set to  0.000000
4/6/2012	11:53:23 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:53:23 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:53:23 PM	Tube furnace set to 0
4/6/2012	11:53:24 PM	Run finished at 11:53 PM
4/6/2012	11:53:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2012	11:55:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2012	11:55:19 PM	Recipe started at 11:55 PM
4/6/2012	11:55:19 PM	Helium valve closed
4/6/2012	11:55:19 PM	H2 valve closed
4/6/2012	11:55:19 PM	BCl3 valve closed
4/6/2012	11:55:19 PM	PH3 valve closed
4/6/2012	11:55:19 PM	SiCl4 pre valve closed
4/6/2012	11:55:19 PM	SiCl4 post valve closed
4/6/2012	11:55:19 PM	Main Vac valve closed
4/6/2012	11:55:19 PM	Bubbler valve closed
4/6/2012	11:55:19 PM	Bypass valve opened
4/6/2012	11:55:19 PM	Helium MFC set to  0.000000
4/6/2012	11:55:19 PM	H2 MFC set to  0.000000
4/6/2012	11:55:19 PM	BCl3 MFC set to  0.000000
4/6/2012	11:55:19 PM	PH3 MFC set to  0.000000
4/6/2012	11:55:19 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:55:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:55:19 PM	Tube furnace set to 0
4/6/2012	11:56:18 PM	Helium valve closed
4/6/2012	11:56:18 PM	H2 valve closed
4/6/2012	11:56:18 PM	BCl3 valve closed
4/6/2012	11:56:18 PM	PH3 valve closed
4/6/2012	11:56:18 PM	SiCl4 pre valve closed
4/6/2012	11:56:18 PM	SiCl4 post valve closed
4/6/2012	11:56:18 PM	Main Vac valve closed
4/6/2012	11:56:18 PM	Bubbler valve closed
4/6/2012	11:56:18 PM	Bypass valve opened
4/6/2012	11:56:18 PM	Helium MFC set to  0.000000
4/6/2012	11:56:18 PM	H2 MFC set to  0.000000
4/6/2012	11:56:18 PM	BCl3 MFC set to  0.000000
4/6/2012	11:56:18 PM	PH3 MFC set to  0.000000
4/6/2012	11:56:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:56:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:56:18 PM	Tube furnace set to 0
4/6/2012	11:57:18 PM	Helium valve closed
4/6/2012	11:57:18 PM	H2 valve closed
4/6/2012	11:57:18 PM	BCl3 valve closed
4/6/2012	11:57:18 PM	PH3 valve closed
4/6/2012	11:57:18 PM	SiCl4 pre valve closed
4/6/2012	11:57:18 PM	SiCl4 post valve closed
4/6/2012	11:57:18 PM	Bypass valve closed
4/6/2012	11:57:18 PM	Bubbler valve closed
4/6/2012	11:57:18 PM	Main Vac valve opened
4/6/2012	11:57:18 PM	Helium MFC set to  0.000000
4/6/2012	11:57:18 PM	H2 MFC set to  0.000000
4/6/2012	11:57:18 PM	BCl3 MFC set to  0.000000
4/6/2012	11:57:18 PM	PH3 MFC set to  0.000000
4/6/2012	11:57:18 PM	SiCl4 MFC set to  0.000000
4/6/2012	11:57:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2012	11:57:19 PM	Tube furnace set to 0
4/6/2012	11:57:20 PM	Run finished at 11:57 PM
4/6/2012	11:57:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
